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Rapid Manufacturing of 3D-Shaped Microstructures by UV Laser Ablation  

신보성 (부산대학교 ERC/NSDM)
양성빈 (한국기계연구원 나노공정그)
장원석 (한국기계연구원 나노공정그)
김재구 (한국기계연구원 나노공정그)
김정민 (한국기계연구원 나노공정그룹)
Publication Information
Journal of the Korean Society for Precision Engineering / v.21, no.7, 2004 , pp. 30-36 More about this Journal
Abstract
Recently, the lead-time of a product is to be shortened in order to satisfy consumer's demand. It is thus important to reduce the manufacturing time and the cost of 3D-shaped microstructures. Micro-Electro-Mechanical Systems (MEMS) and devices are usually fabricated by lithography-based methods. Above method is not flexible for the rapid manufacture of 3D-shaped microstructures because it depends on work's experiences and requires excessive cost and time for making many masks. In this paper, the effective laser micrornachining is developed to fabricate UV sensitive polymer microstructures using laser ablation. The proposed process, named by laser microRP, is a very useful method on rapid manufacturing for 3D-shaped microstructures.
Keywords
Rapid manufacturing; 3D-shaped microsouctures; UV laser; Ablation; Laser MicroRP;
Citations & Related Records
Times Cited By KSCI : 4  (Citation Analysis)
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