• Steel and Composite Structures
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• 제32권6호
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• pp.753-767
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• 2019

Vibration control in mechanical equipments is an important problem where unwanted vibrations are vanish or at least diminished. In this paper, free vibration active control of the porous sandwich piezoelectric polymeric nanocomposite microbeam with microsensor and microactuater layers are investigated. The aim of this research is to reduce amplitude of vibration in micro beam based on linear quadratic regulator (LQR). Modified couple stress theory (MCST) according to sinusoidal shear deformation theory is presented. The porous sandwich microbeam is rested on elastic foundation. The core and face sheet are made of porous and three-phase carbon nanotubes/resin/fiber nanocomposite materials. The equations of motion are extracted by Hamilton's principle and then Navier's type solution are employed for solving them. The governing equations of motion are written in space state form and linear quadratic regulator (LQR) is used for active control approach. The various parameters are conducted to investigate on the frequency response function (FRF) of the sandwich microbeam for vibration active control. The results indicate that the higher length scale to the thickness, the face sheet thickness to total thickness and the considering microsensor and microactutor significantly affect LQR and uncontrolled FRF. Also, the porosity coefficient increasing, Skempton coefficient and Winkler spring constant shift the frequency response to higher frequencies. The obtained results can be useful for micro-electro-mechanical (MEMS) and nano-electro-mechanical (NEMS) systems.

• 센서학회지
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• 제20권1호
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• pp.58-63
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• 2011

A low loss radio frequency(RF) micro electro mechanical systems(MEMS) switch driven by a low actuation voltage was designed for the development of a new RF MEMS switch. The RF MEMS switch should be encapsulated. The glass cap and fabricated RF MEMS switch were assembled by the Au/Sn eutectic bonding principle for wafer-level packaging. The through-vias on the glass substrate was made by the glass dry etching and Au electroplating process. The packaged RF MEMS switch had an actuation voltage of 12.5 V, an insertion loss below 0.25 dB, a return loss above 16.6 dB, and an isolation value above 41.4 dB at 6 GHz.

• 한국가시화정보학회지
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• 제7권2호
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• pp.35-41
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• 2010

Supersonic microjets acquire considerable research interest from a fundamental fluid dynamics perspective, in part because the combination of highly compressible flow at low-to-moderate Reynolds number is not very common, and in part due to the complex nature of the flow itself. In addition, microjets have a great variety engineering applications such as micro-propulsion, MEMS(Micro-Electro Mechanical Systems) components, microjet actuators and fine particle deposition and removal. Numerical simulations have been carried out at moderate nozzle pressure ratios and for different nozzle exit diameters to investigate and to understand in-depth of aerodynamic characteristics of supersonic microjets.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 하계학술대회 논문집 C
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• pp.1025-1027
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• 1995

SEG(Selective Epitaxial Growth) and ELO(Epitaxial Lateral Growth) of Silicon offer new opportunities in the fabrication of MEMS(Micro Electro-Mechanical Systems) structures. SEG of silicon enables the stacking of junctions in addition to those resulting from the standard bipolar process and this properly was utilized for the fabrication of an improved-performance color sensor. When the crystalline growth takes place through the seed windows and proceeds over the dielectric, after reaching the surface, it form an ELO silicon layer and this ELO-Si can be modified into various structures for MEMS application such as cantilevers, beams, diaphragms.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2006년도 6th International Meeting on Information Display
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• pp.591-596
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• 2006

Lead zirconate titanate(PZT) thin films have been attracting worldwide interests in exploring their potential properties [1-3] or the origins [4-6] of their excellent dielectic, ferroelectric and piezoelectric properties near the morphotropic phase boundary (MPB). PZT thin films are expected to apply to the memory devices, micro electro mechanical systems (MEMS), and display because of their superior ferroelectric, pyroelectric, piezoelectric and electron emission properties. In this study, high- performance piezoelectric PZT thin films for actuated mirror array and optical scanner were developed by controlling the several factors, such as molecular-designed precursor, seeding layer and the residual stress in films, by a chemical solution deposition (CSD).

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2003년도 추계학술대회 발표 논문집
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• pp.82-85
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• 2003

MEMS(Micro Electro Mechanical Systems) 응용 분야에 있어서 RF나 Optic등에 응용되는 금속 구조물이나 배선을 위한 도금, 두꺼운 구조물의 식각등을 위해서 수십 um두께의 감광막이 필요하다. 특히 이러한 감광막은 도금을 위한 전단계에서 몰드 형성에 이용되는데 그 이유는 제작이 용이할 뿐만 아니라 다양한 두께 형성이 가능하고 금속과의 선택적 제거가 쉬운 장점이 있다. 감광막 몰드가 갖추어야 할 조건으로는 수직에 가까운 측면 기울기, 두께, 도금액에 대찬 저항성을 들 수 있으며 그 중에서 측면 기울기 개선에 관한 연구가 많이 진행되고 있다. 본 논문에서는 감광막의 형상에 영향을 주는 요인을 찾아내고 수식모델링을 통해 측면 기울기를 예측하고자 한다.

• 한국광학회:학술대회논문집
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• 한국광학회 2003년도 하계학술발표회
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• pp.114-115
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• 2003

최근 급속히 성장하고 있는 Wavelength-division-multiplexing (WDM) 시스템에 파장가변 필터는 핵심적인 소자로 적용될 수 있으며, 높은 가격 경쟁력과 광학 필터로서 좋은 특성과 높은 가변 특성을 구현할 수 있다. 이러한 파장가변 필터는 multi-beam 간섭을 이용하고, Micro electro mechanical systems (MEMS) 공정 기술인 벌크 마이크로 머시닝 기술을 이용하여 구현되어지고 있다. 또한 파장 가변 필터는 Optical-performance monitoring, Spectrometer, Optical noise filter, Sensor 등 여러 분야에 응용될 수 있다. (중략)

• 대한기계학회:학술대회논문집
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• 대한기계학회 2004년도 추계학술대회
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• pp.1623-1628
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• 2004

Recently mini-channels or micro-channels are widely used for cooling the high density power electronic devices. Especially, the channels are used in small and high efficient equipments such as heat pipes and heat exchangers. Interfacial velocities between liquid and gas phases are very important in mini or micro-channels. In this paper, an experiment and a numerical analysis on the interfacial velocities were performed. In the experiment, the interfacial velocities which were measured by the high-speed CCD camera were about $26{\sim}33$ cm/s and the velocities increased as the inclination angle did. In the numerical experiment, CFD-ACE+, a commercial program, was used, the velocities had similar values with experimental results. As the inclination angle and the contact angle increased, the interfacial velocities did because of the surface tension which causes to move the interface. The effect of inclination angle was larger in the converging channels than in straight channels.

• KSTLE International Journal
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• 제9권1_2호
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• pp.10-12
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• 2008

Silicon micro-patterns were fabricated on Si (100) wafers using photolithography and DRIE (Deep Reactive Ion Etching) fabrication techniques. The patterned shapes included micro-pillars and micro-channels. After the fabrication of the patterns, the patterned surfaces were chemically modified by coating Z-DOL (perfluoropolyether, PFPE) thin films. The surfaces were then evaluated for their micro-friction behavior in comparison with those of bare Si (100) flat, Z-DOL coated Si (100) flat and uncoated Si patterns. Experimental results showed that the chemically treated (Z-DOL coated) patterned surfaces exhibited the lowest values of coefficient of friction when compared to the rest of the test materials. The results indicate that a combination of both the topographical and chemical modification is very effective in reducing the friction property. Combined surface treatments such as these could be useful for tribological applications in miniaturized devices such as Micro/Nano-Electro-Mechanical-Systems (MEMS/NEMS).

• 센서학회지
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• 제14권5호
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• pp.337-342
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• 2005

A silicon-based micro-reactor to amplify small amount of deoxyribonucleic acid (DNA) has been fabricated using micro-electro-mechanical systems (MEMS) technology. Polymerase chain reaction (PCR) of DNA requires a precise and rapid temperature control. A Pt sensor is integrated directly in the chamber for real-time temperature measurement and an infrared lamp is used as external heating source for non-contact and rapid heating. In addition to the real-time temperature sensing, PCR needs a rapid thermocycling for effective PCR. For a fast thermal response, the thermal mass of the reactor chamber is minimized by removal of bulk silicon volume around the reactor using double-side KOH etching. The transparent optical property of silicon in the infrared wavelength range provides an efficient absorption of thermal energy into the reacting sample without being absorbed by silicon reactor chamber. It is confirmed that the fabricated micro-reactor could be heated up in less than 30 sec to the denaturation temperature by the external infrared lamp and cooled down in 30 sec to the annealing temperature by passive cooling.