• 센서학회지
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• 제31권5호
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• pp.286-292
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• 2022

As mobile electronics become smarter, higher-level security systems are necessary to protect private information and property from hackers. For this, biometric authentication systems have been widely studied, where the recognition of unique biological traits of an individual, such as the face, iris, fingerprint, and voice, is required to operate the device. Among them, ultrasound fingerprint imaging technology using piezoelectric materials is one of the most promising approaches adopted by Samsung Galaxy smartphones. In this review, we summarize the recent progress on piezoelectric ultrasound micro-electro-mechanical systems (MEMS) transducers with various piezoelectric materials and provide insights to achieve the highest-level biometric authentication system for mobile electronics.

• Smart Structures and Systems
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• 제5권6호
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• pp.663-679
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• 2009

The use of Micro-Electro-Mechanical Systems (MEMS) accelerometers in geotechnical instrumentation is relatively new but on the rise. This paper describes a new MEMS-based system for in situ deformation and vibration monitoring. The system has been developed in an effort to combine recent advances in the miniaturization of sensors and electronics with an established wireless infrastructure for on-line geotechnical monitoring. The concept is based on triaxial MEMS accelerometer measurements of static acceleration (angles relative to gravity) and dynamic accelerations. The dynamic acceleration sensitivity range provides signals proportional to vibration during earthquakes or construction activities. This MEMS-based in-place inclinometer system utilizes the measurements to obtain three-dimensional (3D) ground acceleration and permanent deformation profiles up to a depth of one hundred meters. Each sensor array or group of arrays can be connected to a wireless earth station to enable real-time monitoring as well as remote sensor configuration. This paper provides a technical assessment of MEMS-based in-place inclinometer systems for geotechnical instrumentation applications by reviewing the sensor characteristics and providing small- and full-scale laboratory calibration tests. A description and validation of recorded field data from an instrumented unstable slope in California is also presented.

• 한국정보통신학회논문지
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• 제23권11호
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• pp.1397-1406
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• 2019

신경학적 손상에 의한 언어장애인/비장애인 간의 일상적인 휴대폰 통화시 신경학적 손상으로 인한 발음의 정확도와 언어장애인의 발음 특징이 결합되어 원활한 의사소통을 저해하는 경우가 많다. 이러한 문제점을 개선하기 위하여 제한하는 방법은 언어장애인 특성에 맞춘 단어의 모호성(out of vocabulary) 개선과, 언어 장애인 구강 특성에 따른 어려운 발성 부분을 인위적으로 보정해주는 유도선이 포함된 MEMS(Micro Electro-mechanical System) Microphone 장치 개선이다. S/W적 개선은 도치기능이 포함된 결정트리이며, 연속어 특성을 감안하여 개선된 matrix-vector rnn 방법을 제시하였다. H/W와 S/W 특성을 감안하여 유사 사전을 만들어 원활한 의사소통을 위한 말명료도 향상에 기여하였다.

• 한국전자파학회논문지
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• 제24권12호
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• pp.1113-1119
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• 2013

본 논문에서는 다중 입출력(Multiple-Input Multiple-Output: MIMO) 무선 기계에 대한 안테나의 설계를 제안하였다. 제안된 안테나는 다양한 LTE(Long Term Evolution) 서비스 대역을 다룬다; 밴드(band) 17(704~746 MHz), 밴드 13(746~787 MHz), 밴드 5(824~894 MHz), and 밴드 8(880~960 MHz). 제안된 주(main) 안테나는 광대역 동작을 위해 역 L-형태의 슬릿(slit)을 가지고 있다. 그리고 LTE 부(sub) 안테나는 스위치(switch)를 결합한 루프(loop) 안테나 구조에 기초를 두었고, 논리 회로에 의해서 공진 주파수가 조절될 수 있다. LTE 수신 안테나에 대한 조절 기술은 원하는 대역의 실현을 위해, 그리고 임피던스(impedance) 조절을 위해 RF MEMS(Micro-Electro Mechanical System)를 사용하였다. 두 개의 제안된 안테나는 서로 수직으로 편파되기 때문에 원하는 주파수 대역에서 두 안테나는 -20 dB 이하의 격리도 특성을 가지며, 두 안테나 사이의 상관 계수(Envelope Correlation Coefficient: ECC) 특성은 0.06 이하의 매우 낮은 값을 가진다. 제안된 안테나는 통합된 LTE 다중 입출력 시스템의 단말기에 적용이 가능하다.

• 전기학회논문지
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• 제63권8호
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• pp.1075-1079
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• 2014

In this paper, we describe the analysis and the compensation method of the g-sensitivity error for MEMS vibratory gyroscopes. Usually, the g-sensitivity error has been ignored in the commercial MEMS gyroscope, but it deserves our attention to apply for the missile application as a tactical grade performance. Thus, it is necessary to compensate for the g-sensitivity error to reach a tactical grade performance. Generally, the g-sensitivity error seems intuitively to be a gyroscope bias error proportional to the linear acceleration. However, we assert that the g-sensitivity error mainly causes not a bias error but a scale-factor error. And we verify that the g-sensitivity scale-factor error occurs due to the non-linearity of parallel plate electrodes. Therefore, we propose the compensation method to remove the g-sensitivity scale-factor error. The experimental result showed that a proposed compensation method improved successfully the performance of the MEMS vibratory gyroscope.

• 센서학회지
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• 제18권5호
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• pp.359-364
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• 2009

This paper presents flexible electrocardiography(ECG) sensors using micro electro mechanical systems(MEMS) and flexible printed circuit(FPC) technology. By using FPC technology, ECG sensors which consisted of an outer hook-shaped electrode and an inner circular-shaped electrode were fabricated on the polyimide substrate. Thereafter, the bipolar ECG sensor was miniaturized using MEMS technology. The ECG measurement capability was examined by attaching the sensor to the human chest and wrist. Performance of the proposed sensors was then compared with ECG measured by commercial Ag/AgCl electrodes. It was verified that ECG could be measured using proposed sensors at only single body.

• 센서학회지
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• 제30권3호
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• pp.170-174
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• 2021

As the rising attention to the medical and healthcare issue, Bio-MEMS (Micro electro mechanical systems) platform such as bio sensor, cell culture system, and microfluidics device has been studied extensively. Bio-MEMS platform mostly has high resolution structure made by biocompatible material such as polydimethylsiloxane (PDMS). In addition, three dimension structure has been applied to the bio-MEMS. Lithography can be used to fabricate complex structure by multiple process, however, non-rectangular cross section can be implemented by introducing optical apparatus to lithography technic. X-ray lithography can be used even for sub-micron scale. Here in, we demonstrated lines with round shape cross section using the tilted gold absorber which was deposited on the oblique structure as the X-ray mask. This structure was used as a mold for PDMS. Molded PDMS was applied to the cell culture platform. Moreover, molded PDMS was bonded to flat PDMS to utilize to the sub-micro channel. This work has potential to the large area bio-MEMS.

• 센서학회지
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• 제27권2호
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• pp.99-104
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• 2018

A micro electromagnetic actuator with high vibration efficiency is proposed for use in an implantable hearing device. The actuator, which can be implanted in the middle ear, consists of membranes based on the stainless steel 304 (SUS-304), and other components. In conventional actuators, in which a thick membrane and a silicone elastomer are used, the size reduction was difficult. In order to miniaturize the size of the actuator, it is necessary to reduce the size of the actuation potion that generates the driving force, resulting in reduction of the electromagnetic force. In this paper, the electromagnetic actuator is further miniaturized by the metal membrane and the vibration amplitude is also optimized. The actuator designed according to the simulation results was fabricated by using micro-electro-mechanical systems (MEMS) technology. In particular, a $20{\mu}m$ thick metal membrane was fabricated using the erosion process, which reduced the length of the actuator by more than $400{\mu}m$. In the experiments, the vibration displacement characteristics of the optimized actuator were above 400 nm within the range of 0.1 to 1 kHz when a current of $1mA_{rms}$ was applied to the coil.

• 센서학회지
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• 제20권2호
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• pp.77-81
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• 2011

This paper presents a single-pole eight-throw(SP8T) switch based on proposed a radio-frequency(RF) microelectromechanical systems (MEMS) switches. The proposed switch was driven by a double stop(DS) comb drive, with a lateral resistive contact. Additionally, the proposed switch was designed to have tapered signal line and bi-directionally actuated. A forward actuation connects between signal lines and contact part, and the output becomes on-state. A reverse actuation connects between ground lines and contact part, and the output becomes off-state. The SP8T switch of 3-stage tree topology was developed based on an arrangement of the proposed RF MEMS switches. The developed SP8T switch had an actuation voltage of 12 V, an insertion loss of 1.3 dB, a return loss of 15.1 dB, and an isolation of 31.4 dB at 6 GHz.

• 대한기계학회논문집A
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• 제26권5호
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• pp.914-923
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• 2002

Recently, there has been considerable interest in micro gyroscopes made of silicon chips. It can be applied to many micro-electro-mechanical systems (MEMS): devices for stabilization, general rate control, directional pointing, autopilot systems, and missile control. This paper shows how the mechanical design of the gyroscope can be done using axiomatic design, followed by the application of the Taguchi robust design method to determine the dimensions of the parts so as to accommodate the dimensional variations introduced during manufacturing. Functional requirements are defined twofold. One is that the natural frequencies should have fixed values, and the other is that the system should be robust to large tolerances. According to the Independence Axiom, design parameters are classified into a few groups. Then, the detailed design process is performed fellowing the sequence indicated by the design matrix. The dimensions of the structure are determined to have constant values fur the difference of frequencies without consideration of the tolerances. It is noted that the Taguchi concept is utilized as a unit process of the entire axiomatic approach.