Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
권호 표지
DOI QR코드

DOI QR Code

Miniaturization and Optimization of Electromagnetic Actuators for Implantable Hearing Device Based on MEMS Technology

MEMS 기술 기반 이식형 청각 장치용 전자기 엑츄에이터의 소형화 및 최적화

  • Kim, Min-Kyu (Department of Automation System, Korea Polytechnics) ;
  • Jung, Yong Sub (Department of Automation System, Korea Polytechnics) ;
  • Cho, Jin-Ho (College of IT Engineering, Kyungpook National Unversity)
  • 김민규 (한국폴리텍대학 자동화시스템과) ;
  • 정용섭 (한국폴리텍대학 자동화시스템과) ;
  • 조진호 (경북대학교 전기컴퓨터공학부)
  • Received : 2018.01.15
  • Accepted : 2018.03.16
  • Published : 2018.03.31
Download PDF
⟨ Previous Next ⟩

Abstract

A micro electromagnetic actuator with high vibration efficiency is proposed for use in an implantable hearing device. The actuator, which can be implanted in the middle ear, consists of membranes based on the stainless steel 304 (SUS-304), and other components. In conventional actuators, in which a thick membrane and a silicone elastomer are used, the size reduction was difficult. In order to miniaturize the size of the actuator, it is necessary to reduce the size of the actuation potion that generates the driving force, resulting in reduction of the electromagnetic force. In this paper, the electromagnetic actuator is further miniaturized by the metal membrane and the vibration amplitude is also optimized. The actuator designed according to the simulation results was fabricated by using micro-electro-mechanical systems (MEMS) technology. In particular, a $20{\mu}m$ thick metal membrane was fabricated using the erosion process, which reduced the length of the actuator by more than $400{\mu}m$. In the experiments, the vibration displacement characteristics of the optimized actuator were above 400 nm within the range of 0.1 to 1 kHz when a current of $1mA_{rms}$ was applied to the coil.

Keywords

References

  1. R. Good, M. Rosenbaum and A. Maniglia, "The history and development of the implantable hearing aid", The Otolaryngologic Clinics of North America, Vol. 28(1), pp. 1-6, 1995.
  2. W. H. Ko, W. L. Zhu and A. J. Maniglia, "Engineering principles of mechanical stimulation of the middle ear", The Otolaryngologic Clinics of North America, Vol. 28(1), pp. 29-41, 1995.
  3. B. S. Song, M. K. Kim, Y. H. Yoon, S. H. Lee and J. H. Cho, "Design of a differential electromagnetic transducer for use in IME system", Int. J. IEICE Trans. INF. & SYST, Vol. E87-D(5), pp. 1231-1237, 2004.
  4. M. W. Kim, M. K. Kim, K. W. Seong, H. G. Lim, E. S. Jung, J. H. Han, I. Y. Park and J. H. Cho, "Vibration characteristic analysis of differential floating mass transducer using electrical model for fully-implantable middle ear hearing devices", J. of the Korean Sensors Society, Vol. 16(3), pp. 165-173, 2007.
  5. S. K. Park and K. C. Lee, "Design and analysis of a microelectromagnetic vibration transducer used as an implantable middle ear hearing aid", J. Micromech. Microeng., Vol. 12, pp. 505-511, 2002. https://doi.org/10.1088/0960-1317/12/5/301
  6. S. K. Park and K. C. Lee, "Microvibration transducer using silicon elastic body for an implantable middle ear hearing aid", Mechatronics, Vol. 12, pp. 1173-1184, 2002. https://doi.org/10.1016/S0957-4158(02)00022-3
  7. M. K. Kim, Y. H. Yoon, I. Y. Park and J. H. Cho, "Design of a differential electromagnetic transducer for implantable middle ear hearing device using finite element method", Sens. Actuators A-Phys., Vol. 130-131, pp. 234-240, 2006. https://doi.org/10.1016/j.sna.2006.01.038
  8. M. K. Kim, I. Y. Park, B. S. Song and J. H. Cho, "Fabrication and optimal design of differential electromagnetic transducer for implantable middle ear hearing device", Biosensors & Bioelectronics, Vol. 21, pp. 2170-2175, 2006. https://doi.org/10.1016/j.bios.2005.10.003
  9. C. W. Lee, M. K. Kim, I. Y. Park, B. S. Song, Y. R. Roh and J. H. Cho, "Proposal of a piezoelectric floating mass transducer for implantable middle ear hearing devices", J. of the Korean Sensors Society, Vol. 14(5), pp. 322-330, 2005.
  10. T. G. Dietz, G. R. Ball and B. H. Katz, "Partially implantable vibration ossicular prosthesis", In: Proceeding of the Transducers' 97, pp. 433-436, 1997.
  11. ASTM F2504-05(2014), Standard Practice for Describing System Output of Implantable Middle Ear Hearing Device, 2014.
  12. ASTM F755-99(2011), Standard Specification for Selection of Porous Polyethylene for Use in Surgical Implants, 2011.