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3D Lithography using X-ray Exposure Devices Integrated with Electrostatic and Electrothermal Actuators

  • Lee, Kwang-Cheol;Lee, Seung S.
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.2 no.4
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    • pp.259-267
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    • 2002
  • We present a novel 3D fabrication method with single X-ray process utilizing an X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures. 3D microstructures are revealed by development kinetics and modulated in-depth dose distribution in resist, usually PMMA. Fabrication of X-ray masks with integrated electrothermal xy-stage and electrostatic actuator is presented along with discussions on PMMA development characteristics. Both devices use $20-\mu\textrm{m}$-thick overhanging single crystal Si as a structural material and fabricated using deep reactive ion etching of silicon-on-insulator wafer, phosphorous diffusion, gold electroplating, and bulk micromachining process. In electrostatic devices, $10-\mu\textrm{m}-thick$ gold absorber on $1mm{\times}1mm$ Si shuttle mass is supported by $10-\mu\textrm{m}-wide$, 1-mm-long suspension beams and oscillated by comb electrodes during X-ray exposures. In electrothermal devices, gold absorber on 1.42 mm diameter shuttle mass is oscillated in x and y directions sequentially by thermal expansion caused by joule heating of the corresponding bent beam actuators. The fundamental frequency and amplitude of the electrostatic devices are around 3.6 kHz and $20\mu\textrm{m}$, respectively, for a dc bias of 100 V and an ac bias of 20 VP-P (peak-peak). Displacements in x and y directions of the electrothermal devices are both around $20{\;}\mu\textrm{m}$at 742 mW input power. S-shaped and conical shaped PMMA microstructures are demonstrated through X-ray experiments with the fabricated devices.

ON SOME L1-FINITE TYPE (HYPER)SURFACES IN ℝn+1

  • Kashani, Seyed Mohammad Bagher
    • Bulletin of the Korean Mathematical Society
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    • v.46 no.1
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    • pp.35-43
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    • 2009
  • We say that an isometric immersed hypersurface x : $M^n\;{\rightarrow}\;{\mathbb{R}}^{n+1}$ is of $L_k$-finite type ($L_k$-f.t.) if $x\;=\;{\sum}^p_{i=0}x_i$ for some positive integer p < $\infty$, $x_i$ : $M{\rightarrow}{\mathbb{R}}^{n+1}$ is smooth and $L_kx_i={\lambda}_ix_i$, ${\lambda}_i\;{\in}\;{\mathbb{R}}$, $0{\leq}i{\leq}p$, $L_kf=trP_k\;{\circ}\;{\nabla}^2f$ for $f\;{\in}\'C^{\infty}(M)$, where $P_k$ is the kth Newton transformation, ${\nabla}^2f$ is the Hessian of f, $L_kx\;=\;(L_kx^1,\;{\ldots},\;L_kx^{n+1})$, $x=(x^1,\;{\ldots},\;x^{n+1})$. In this article we study the following(hyper)surfaces in ${\mathbb{R}}^{n+1}$ from the view point of $L_1$-finiteness type: totally umbilic ones, generalized cylinders $S^m(r){\times}{\mathbb{R}}^{n-m}$, ruled surfaces in ${\mathbb{R}}^{n+1}$ and some revolution surfaces in ${\mathbb{R}}^3$.

SOLUTION TO ${\bar{\partial}}$-PROBLEM WITH SUPPORT CONDITIONS IN WEAKLY q-CONVEX DOMAINS

  • Saber, Sayed
    • Communications of the Korean Mathematical Society
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    • v.33 no.2
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    • pp.409-421
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    • 2018
  • Let X be a complex manifold of dimension n $n{\geqslant}2$ and let ${\Omega}{\Subset}X$ be a weakly q-convex domain with smooth boundary. Assume that E is a holomorphic line bundle over X and $E^{{\otimes}m}$ is the m-times tensor product of E for positive integer m. If there exists a strongly plurisubharmonic function on a neighborhood of $b{\Omega}$, then we solve the ${\bar{\partial}}$-problem with support condition in ${\Omega}$ for forms of type (r, s), $s{\geqslant}q$ with values in $E^{{\otimes}m}$. Moreover, the solvability of the ${\bar{\partial}}_b$-problem on boundaries of weakly q-convex domains with smooth boundary in $K{\ddot{a}}hler$ manifolds are given. Furthermore, we shall establish an extension theorem for the ${\bar{\partial}}_b$-closed forms.

NOTE ON GOOD IDEALS IN GORENSTEIN LOCAL RINGS

  • Kim, Mee-Kyoung
    • Bulletin of the Korean Mathematical Society
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    • v.39 no.3
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    • pp.479-484
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    • 2002
  • Let I be an ideal in a Gorenstein local ring A with the maximal ideal m and d = dim A. Then we say that I is a good ideal in A, if I contains a reduction $Q=(a_1,a_2,...,a_d)$ generated by d elements in A and $G(I)=\bigoplus_{n\geq0}I^n/I^{n+1}$ of I is a Gorenstein ring with a(G(I)) = 1-d, where a(G(I)) denotes the a-invariant of G(I). Let S = A[Q/a$_1$] and P = mS. In this paper, we show that the following conditions are equivalent. (1) $I^2$ = QI and I = Q:I. (2) $I^2S$ = $a_1$IS and IS = $a_1$S:sIS. (3) $I^2$Sp = $a_1$ISp and ISp = $a_1$Sp :sp ISp. We denote by $X_A(Q)$ the set of good ideals I in $X_A(Q)$ such that I contains Q as a reduction. As a Corollary of this result, we show that $I\inX_A(Q)\Leftrightarrow\IS_P\inX_{SP}(Qp)$.

Superconductivty and magnetic properties of $(Ru_{1-x}Nb_x)Sr_2(Sm_{1.4}Ce_{0.6})Cu_2O_z$

  • Lee, H.K.;Bae, S.M.;Lee, J.M.
    • Progress in Superconductivity and Cryogenics
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    • v.15 no.3
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    • pp.1-4
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    • 2013
  • We investigated the effect of Nb substitution for Ru on the structural and magnetic properties of $(Ru_{1-x}Nb_x)\;Sr_2(Sm_{1.4}Ce_{0.6})Cu_2O_z$ Samples. X-ray diffraction measurements indicated that nearly single-phase samples are formed in the range from x = 0 to 1.0. The superconducting transition temperature determined from the inflection in the field-cooled magnetic susceptibility decreased only slightly from $T_c$ = 25 K for x = 0 to $T_c$ = 22 K for x = 1.0, in consistent with the change in room temperature thermopower of the samples. However, the Nb substitution for Ru above x = 0.25 significantly suppressed the weak ferromagnetic component of the field-cooled magnetic susceptibility. It was also found that the Nb substitution for Ru results in an enhanced diamagnetic susceptibility with Nb content above x = 0.5 in both zero field-cooled and field-cooled magnetization measurements, in contrast to the behavior of the samples with $x{\leq}0.5$ in which the diamagnetic susceptibility decreases as the Nb content increases.

MINIMAL P-SPACES

  • Arya, S.P.;Bhamini, M.P.
    • Kyungpook Mathematical Journal
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    • v.27 no.1
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    • pp.27-33
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    • 1987
  • Minimal s-Urysohn and minimal s-regular spaces are studied. An s-Urysohn (respectively, s-regular) space (X, $\mathfrak{T}$) is said to be minimal s-Urysohn (respectively, minimal s-regular) if for no topology $\mathfrak{T}^{\prime}$ on X which is strictly weaker than $\mathfrak{T}$, (X, $\mathfrak{T}^{\prime}$) is s-Urysohn (respectively s-regular). Several characterizations and other related properties of these classes of spaces have been obtained. The present paper is a study of minimal P-spaces where P refers to the property of being an s-Urysohn space or an s-regular space. A P-space (X, $\mathfrak{T}$) is said to be minimal P if for no topology $\mathfrak{T}^{\prime}$ on X such that $\mathfrak{T}^{\prime}$ is strictly weaker than $\mathfrak{T}$, (X, $\mathfrak{T}^{\prime}$) has the property P. A space X is said to be s-Urysohn [2] if for any two distinct points x and y of X there exist semi-open set U and V containing x and y respectively such that $clU{\bigcap}clV={\phi}$, where clU denotes the closure of U. A space X is said to be s-regular [6] if for any point x and a closed set F not containing x there exist disjoint semi-open sets U and V such that $x{\in}U$ and $F{\subseteq}V$. Throughout the paper the spaces are assumed to be Hausdorff.

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SPACE CURVES SATISFYING $\Delta$H = AH

  • Kim, Dong-Soo;Chung, Hei-Sun
    • Bulletin of the Korean Mathematical Society
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    • v.31 no.2
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    • pp.193-200
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    • 1994
  • Let x : $M^{n}$ .rarw. $E^{m}$ be an isometric immersion of a manifold $M^{n}$ into the Euclidean space $E^{m}$ and .DELTA. the Laplacian of $M^{n}$ defined by -div.omicron.grad. The family of such immersions satisfying the condition .DELTA.x = .lambda.x, .lambda..mem.R, is characterized by a well known result ot Takahashi (8]): they are either minimal in $E^{m}$ or minimal in some Euclidean hypersphere. As a generalization of Takahashi's result, many authors ([3,6,7]) studied the hypersurfaces $M^{n}$ in $E^{n+1}$ satisfying .DELTA.x = Ax + b, where A is a square matrix and b is a vector in $E^{n+1}$, and they proved independently that such hypersurfaces are either minimal in $E^{n+1}$ or hyperspheres or spherical cylinders. Since .DELTA.x = -nH, the submanifolds mentioned above satisfy .DELTA.H = .lambda.H or .DELTA.H = AH, where H is the mean curvature vector field of M. And the family of hypersurfaces satisfying .DELTA.H = .lambda.H was explored for some cases in [4]. In this paper, we classify space curves x : R .rarw. $E^{3}$ satisfying .DELTA.x = Ax + b or .DELTA.H = AH, and find conditions for such curves to be equivalent.alent.alent.

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Prediction of Thermal Diffusivities of Fish Meat Paste Products 4. Thermal Diffusivities of White Muscled Fish Meat Paste Products (연제품류의 열확산도 추정에 관한 연구 4. 백색육 어육 연제품의 열확산도)

  • CHOI Soo-Il;HAN Bong-Ho;KIM Jong-Chul;BAE Tae-Jin;CHO Hyun-Duk
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.21 no.6
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    • pp.361-365
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    • 1988
  • Thermal diffusivities of white muscled fish meat paste products were measured and an experimental equation for prediction of the thermal diffusivity was suggested. The thermal diffusivities of products with water contents of 43.03 to $82.49\%$ and lipid contents of 0.50 to $14.88\%$ could be deduced as following equations ; $$\alpha_{80.39^{\circ}C}=0.0832{\cdot}10^{-6}{\cdot}X_w+0.0797{\cdot}10^{-6},\;m^2{\cdot}s^{-1}$$ $$\alpha_{100.63^{\circ}C}=0.0873{\cdot}10^{-6}{\cdot}X_w+0.0830{\cdot}10^{-6},\;m^2{\cdot}s^{-1}$$ $$\alpha_{120.09^{\circ}C}=0.0842{\cdot}10^{-6}{\cdot}X_w+0.0901{\cdot}10^{-6},\;m^2{\cdot}s^{-1}$$ From these equations, an experimental equation was derived for the prediction of thermal diffusivities of white muscled fish meat paste products ; $$\alpha=(1.308+0.1324{\cdot}X_w){\cdot}\alpha_w-0.0626{\cdot}10^{-6}{\cdot}X_w-0.1355{\cdot}10^{-6},\;m^2{\cdot}s^{-1}$$ The errors of the thermal diffusivities predicted with this equation were less than ${\pm}\;0.30\%$ compared with those measured.

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Common Fixed Point Theorems in Probabllistic Metric Spaces and Extension to Uniform Spaces

  • Singh, S.L.;Pant, B.D.
    • Honam Mathematical Journal
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    • v.6 no.1
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    • pp.1-12
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    • 1984
  • Let(X, $\Im$) be a probabilistic metric space with a t-norm. Common fixed point theorems and convergence theorems generalizing the results of Ćirić, Fisher, Sehgal, Istrătescu-Săcuiu and others are proved for three mappings P,S,T on X satisfying $F_{Pu, Pv}(qx){\geq}min\left{F_{Su,Tv}(x),F_{Pu,Su}(x),F_{Pv,Tv}(x),F_{Pu,Tv}(2x),F_{Pv,Su}(2x)\right}$ for every $u, v {\in}X$, all x>0 and some $q{\in}(0, 1)$. One of the main results is extended to uniform spaces. Mathematics Subject Classification (1980): 54H25.

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Dielectric and Piezoelectric Properties of Nonstoichiometric Sr1±xBi2±yTa2O9 and Sr1±xBi2±yNb2O9 Ceramics (비화학양론 Sr1±xBi2±yTa2O9 과 Sr1±xBi2±yNb2O9 세라믹의 유전 및 압전 특성)

  • Cho, J.A.;Park, S.E.;Song, T.K.;Kim, M.H.;Lee, H.S.
    • Korean Journal of Materials Research
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    • v.13 no.6
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    • pp.360-364
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    • 2003
  • $Sr_{l}$ $\pm$x/$Bi_{2}$ $\pm$y/$Ta_2$ $O_{9}$ and $Sr_{l}$ $\pm$$Bi_{x}$ $2\pm$y$Nb_2$$O_{9}$ ceramics were prepared by a solid state reaction method. X-ray diffraction analysis indicated that single-phase of Bi-layered perovskite was obtained. According to Sr/Bi content ratio, Curie temperature( $T_{c}$), electromechanical factor($K_{p}$ ) and mechanical quality factor($Q_{m}$ ) were measured. The Curie temperature of SBN(SBT) rose from $414^{\circ}C$(314$^{\circ}C$) to $494^{\circ}C$(426$^{\circ}C$) when Sr/Bi content ratio was increased. In the case of Sr/Bi content ratio = 0.55/2.3, the maximum value of the mechanical quality factor $Q_{m}$ of SBT and SBN were obtained 3320 and 1010, respectively.