• Title/Summary/Keyword: M-ICP

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고효율 태양전지를 위한 ICP-RIE기반 결정질 실리콘 표면 Texturing 공정연구

  • Lee, Myeong-Bok;Lee, Byeong-Chan;Park, Gwang-Muk;Jeong, Ji-Hui;Yun, Gyeong-Sik
    • Proceedings of the Korean Vacuum Society Conference
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    • 2010.02a
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    • pp.315-315
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    • 2010
  • 결정질 실리콘을 포함하는 태양전지의 광전효율은 표면에 입사되는 태양광의 반사를 제외하면 흡수된 광자에 의해 생성되는 전자-정공쌍의 상대적인 비율인 내부양자효율에 의존하게 된다. 실제 생성된 전자-정공쌍은 기판재료의 결정상태와 전기광학적 물성 등에 의해 일부가 재결합되어 2차적인 광자의 생성이나 열로서 작용하고 최종적으로 전자와 정공이 완전히 분리되고 전극에 포집되어 실질적인 유효전류로 작용한다. 16% 이상의 고효율 결정질 실리콘 태양전지양산이 요구되고 있는 현실에서 광전효율 개선 위해 가장 우선적으로 고려되어야 할 변수는 입력 태양광스펙트럼에 대한 결정질 실리콘 표면반사율을 최소화하여 광흡수를 극대화하는 것이라 할 수 있다. 이의 해결을 위하여 대기와 실리콘표면 사이의 굴절률차이가 크면 클수록 태양광스펙트럼에 대한 결정질 실리콘의 광반사는 증가하기 때문에 상대적으로 낮은 굴절률의 $SiO_x$$SiN_x$와 같은 반사방지막을 광입력 실리콘표면에 증착하여 광반사율 저감공정을 적용하고 있다. 이와 더불어 결정질 실리콘표면을 화학적으로 혹은 플라즈마이온으로 50-100nm 직경의 바늘형 피라미드형상으로 texturing 함으로 광자들의 다중반사 등에 기인하는 광흡수율의 증가를 기대할 수 있기 때문에 태양전지효율 개선에 긍정적인 영향을 미치는 것으로 이해된다. 본 실험에서도 고효율 다결정 실리콘 태양전지 양산공정에 적용 가능한 ICP-RIE기반 결정질 실리콘표면에 대한 texturing 공정기술을 연구하였다. Double Langmuir 플라즈마 진단시스템(DLP2000)을 적용하여 사용한 $SF_6$$O_2$ 개스유량과 챔버압력, 플라즈마 파워에 따른 이온밀도, 전자온도, 포화이온전류밀도, 플라즈마포텐셜의 공간분포를 모니터링하였고 texturing이 완료된 시료에 대하여 A1.5G 표준태양광스펙트럼의 300-1100nm 파장대역에서 반사율을 측정하여 그 변화를 관찰하였다. 본 연구에서 얻어진 결과를 간략히 정리하면 Si texturing에 가장 적합한 플라즈마파워는 100W, $SF_6/O_2$ 혼합비는 18:22, 챔버압력은 30mtorr 등이고 이에 상응하는 플라즈마의 이온밀도는 $2{\sim}3{\times}10^8\;ions/cm^3$, 전자온도는 14~15eV, 포화전류밀도는 $0.014{\sim}0.015mA/cm^2$, 플라즈마포텐셜은 38~39V 범위 등이었다. 현재까지 얻어진 최소 평균반사율은 14.2% 였으며 최적의 texturing패턴 플라즈마공정 조건은 이온에 의한 Si표면원자들의 스퍼터링과 화학반응에 의한 증착이 교차하는 플라즈마 에너지 및 밀도 상태인 것으로 해석된다.

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Fabrication of Large Area Transmission Electro-Absorption Modulator with High Uniformity Backside Etching

  • Lee, Soo Kyung;Na, Byung Hoon;Choi, Hee Ju;Ju, Gun Wu;Jeon, Jin Myeong;Cho, Yong Chul;Park, Yong Hwa;Park, Chang Young;Lee, Yong Tak
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.220-220
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    • 2013
  • Surface-normal transmission electro-absorption modulator (EAM) are attractive for high-definition (HD) three-dimensional (3D) imaging application due to its features such as small system volume and simple epitaxial structure [1,2]. However, EAM in order to be used for HD 3D imaging system requires uniform modulation performance over large area. To achieve highly uniform modulation performance of EAM at the operating wavelength of 850 nm, it is extremely important to remove the GaAs substrate over large area since GaAs material has high absorption coefficient below 870 nm which corresponds to band-edge energy of GaAs (1.424 eV). In this study, we propose and experimentally demonstrate a transmission EAM in which highly selective backside etching methods which include lapping, dry etching and wet etching is carried out to remove the GaAs substrate for achieving highly uniform modulation performance. First, lapping process on GaAs substrate was carried out for different lapping speeds (5 rpm, 7 rpm, 10 rpm) and the thickness was measured over different areas of surface. For a lapping speed of 5 rpm, a highly uniform surface over a large area ($2{\times}1\;mm^2$) was obtained. Second, optimization of inductive coupled plasma-reactive ion etching (ICP-RIE) was carried out to achieve anisotropy and high etch rate. The dry etching carried out using a gas mixture of SiCl4 and Ar, each having a flow rate of 10 sccm and 40 sccm, respectively with an RF power of 50 W, ICP power of 400 W and chamber pressure of 2 mTorr was the optimum etching condition. Last, the rest of GaAs substrate was successfully removed by highly selective backside wet etching with pH adjusted solution of citric acid and hydrogen peroxide. Citric acid/hydrogen peroxide etching solution having a volume ratio of 5:1 was the best etching condition which provides not only high selectivity of 235:1 between GaAs and AlAs but also good etching profile [3]. The fabricated transmission EAM array have an amplitude modulation of more than 50% at the bias voltage of -9 V and maintains high uniformity of >90% over large area ($2{\times}1\;mm^2$). These results show that the fabricated transmission EAM with substrate removed is an excellent candidate to be used as an optical shutter for HD 3D imaging application.

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$TiO_2$-Encapsulated EFAL-Removed Zeolite Y as a New Photocatalyst for Photodegradation of Azo Dyes in Aqueous Solution

  • ChO, Won-Je;Sook-Ja Yoon,;Yoon, Min-Joong
    • Journal of Photoscience
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    • v.12 no.1
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    • pp.17-23
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    • 2005
  • Application of a new photocatalyst has been attempted to improve the efficiency and rates of photocatalytic degradation of azo dyes by using a model dye such as Methyl Orange. As a new photocatalyst, $TiO_2$ encapsulated EFAL-removed zeolite Y ($TiO_2$ /EFAL-removed zeolite Y) has been synthesized by ion-exchange in the mixture of EFAL-removed zeolite Y with 0.05 M aqueous [$(NH_4)_2 TiO(C_2O_4)_2.H_2O$] [$TiO(C_2O_4)_2.H_2O$]. This new photocatalyst has been characterized by measuring XRD, IR and reflectance absorption spectra as well as ICP analysis, and it was found that the framework structure of $TiO_2$ /EFAL-removed zeolite Y is not changed by removing the extra-framework aluminum (EFAL) from the normal zeolite Y and the $TiO_2$ inside the photocatalyst exists in the form of $(TiO^{2+})_n$ nanoclusters. Based on the ICP analysis, the Si/Al ratio of the $TiO_2$ /EFAL-removed zeolite Y and the weight of $TiO_2$ were determined to be 23 and 0.061g in 1.0g photocatalyst, respectively. It was also found that adsorption of the azo dye in the $TiO_2$ /EFAL-removed zeolite is very effective (about 80 % of the substrate used). This efficient adsorption contributes to the synergistic photocatalytic activities of the $TiO_2$ /EFAL-removed zeolite by minimizing the required flux diffusion of the substrate. Thus, the photocatalytic reduction of methyl orange (MO) was found to be 8 times more effective in the presence of $TiO_2$ /EFAL-removed zeolite Y than in the presence of $TiO_2$ /normal zeolite Y. Furthermore, the photocatalytic reduction of MO by using 1.0 g of the $TiO_2$ /EFAL-removed zeolite Y containing 0.061g of $TiO_2$ is much faster than that carried out by using 1.0 g of Degussa P-25.

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Effect of Korean Gu-Gi-Ja Tea on Plasma Hormone in Cd-administered Rats (구기자가 카드뮴 급여에 의한 흰쥐의 혈 중 호르몬에 미치는 영향)

  • 한성희;신미경;이호섭
    • Journal of the Korean Society of Food Science and Nutrition
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    • v.30 no.6
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    • pp.1272-1277
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    • 2001
  • This study was designed to investigate the effects of Korean Gu-Gi-Ja tea on plasma hormone such as renin and aldosterone water in cadmium administered rats. The cadmium administered rats were given 50 ppm and 100 ppm of CdCl$_2$.2$H_2O$ disolved in the distilled water. Sixty male Sprague-Dawley rats weighing 100$\pm$10 g were divided into 6 groups according to body weight. The control group was fed standard diet without cadmium. The experimental groups, which were fed standard diet containing 50 ppm and 100 ppm cadmium and Gu-Gi-Ja tea group. The results of this study were as follows; food intake, body weight gain and kidney weight content in cadmium administered groups were lower than those in Gu-Gi-Ja tea group. The contents of cadmium in kidney of the rats were determined by using ICP (Inductively Coupled Plasma Spectrcphotometer). In kidney accumulation of Gu-Gi-Ja tea groups were lower than those in cadmium administered group. Plasma levels of renin activity was increased by Cadmium administration group, compared with Gu-Gi-Ja tea and cadmium administred group. Plasma levels of aldosterone activity was increased by cadmium administration group, compared with Gu-Gi-Ja tea and cadmium administred group. This results suggested that Gu-Gi-Ja tea has a lowering effects on the accumulation of cadmium in kidney and it is believed that the Gu-Gi-Ja tea has some protective effects to cadmium administered lenin and aldosterone hormone in rats, but the mechanism of these effects was obscure.

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Electrochemical Behaviors of Pt-Ru Catalysts on the Surface Treated Mesoporous Carbon Supports for Direct Methanol Fuel Cells (직접메탄올 연료전지용 표면처리된 중형기공 탄소지지체에 담지된 백금-루테늄 촉매의 전기화학적 거동)

  • Kim, Byung-Ju;Seo, Min-Kang;Choi, Kyeong-Eun;Park, Soo-Jin
    • Applied Chemistry for Engineering
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    • v.22 no.2
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    • pp.167-172
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    • 2011
  • In this work, the effect of surface treatment on mesoporous carbons (MCs) supports was investigated by analyzing surface functional groups. MCs were prepared by a conventional templating method using mesoporous silica (SBA-15) for using catalyst supports in direct methanol fuel cells (DMFCs). The MCs were treated with different phosphoric acid ($H_3PO_4$) concentrations i.e., 0, 1, 3, 4, and 5 M at 343 K for 6 h. And then Pt-Ru was deposited onto surface treated MCs (H-MCs) by chemical reduction method. The characteristics of Pt-Ru catalysts deposited onto H-MCs were determined by specific surface area and pore size analyzer, X-ray diffraction, X-ray photoelectron, transmission electron microscopy, and inductive coupled plasma-mass spectrometer. The electrochemical properties of Pt-Ru/H-MCs catalysts were also analyzed by cyclic voltammetry experiments. From the results of surface analysis, an oxygen functional group was introduced to the surface of carbon supports. From the results, the H4M-MCs carbon supports surface treated with 4 M $H_3PO_4$ led to uniform dispersion of Pt-Ru onto H4M-MCs, resulting in enhancing the electro-catalytic activity of Pt-Ru catalysts.

A study on the airborne concentration of welding fume for some manufacturing industries (일부 업종의 용접흄 분석 및 폭로농도에 관한 연구)

  • Byeon, Sang-Hoon;Park, Seung-Hyun;Kim, Chang-Il;Park, In-Jeong;Yang, Jeong-Sun;Oh, Se-Min;Moon, Young-Hahn
    • Journal of Korean Society of Occupational and Environmental Hygiene
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    • v.5 no.2
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    • pp.172-183
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    • 1995
  • The airborne concentrations of the welding fumes produced during $CO_2$ arcwelding process at shipbuilding, shiprepairing, container manufacturing and car accessary manufacturing industry were investigated. The effects how much reduced the welding fume were checked when the portable fan was used. The results were as follows; 1.The geometric mean of welding fume concentration in shipbuilding factory was $10.05mg/m^3$. This exposure concentration was higher than other 3 manufacturing industries at 95% confidence level. 2. The sampling filters for welding fume could be digested with acid within 1 hour by microwave oven. The recoveries for investigated metal elements were all over 95%. 3. The optimal wavelength could be selected for the simultaneous analysis of 8 metal elements by ICP(Inductively Coupled Plasma). 4. Noxious gases($O_1,NO_2$) produced during $CO_1$ gas arc welding process were detected that the concentration of ozone($O_1$) was less than 0.01 ppm and that of nitrogen dioxide($NO_2$) was 0.01-0.03 ppm. 5. The geometric mean of welding fume particle diameter was $1.26{\mu}m$ and geometric standard deviation was 1.51 for the counts when particle an analyzer(ELZONE) had been used. 6. When the portable fan had been used,the reduced percent of total welding fume for workers was about 47.8% when portable fan was applied to blow and 71.7% when to exhaust.

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A Comparison Study on the Concentration of Total Welding Fume and Respirable Particulate Mass for Welding Workers of a Shipbuilding (조선소 용접작업자들의 총용접흄과 호흡성분진농도 비교연구)

  • Kang, Yong-Seon;Sim, Sang-Hyo;Lee, Song-Kwon;Bin, Sung-Oh;Choi, Eun-Seok
    • Journal of Environmental Health Sciences
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    • v.33 no.4
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    • pp.276-282
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    • 2007
  • The purpose of this study is to assess the accurate state of the following: total welding fumes versus welding fumes in the air, respirable particulate mass, and exposure of dockyard welders to heavy metals. In addition, this study provides basic data for proposing improvements to create efficient and appropriate welding environments and to prevent occupational diseases. The subjects of this study were 94 laborers who worked at the block construction sites of large-scale dockyards located in Gyeongnam Province from March 2005 to June 2005. In order to collect samples on total welding fumes in the air and respirable particulate mass from the welders, Methods 0500 and 0600, established by the National Institute for Occupational Safety and Health (NIOSH), were used. The metals within the welding fumes were also analyzed using Inductively Coupled Plasma (ICP) under Method 7300 from NIOSH. The results of this research are summarized below. The geometric mean concentration of total welding fumes and that of respirable particulate mass were $4.11\;mg/m^3\;and\;3.53\;mg/m^3$, respectively. As a result of comparing the two measurement methods, there were significant differences (p<0.05) between the two groups for Ca, Cu, Cr, and Ni; however, there were no differences in Fe, Mg, Zn, Mg, Pb, and Cd. As a result of the analysis, the correlation between Mn and the concentration of heavy metals in the total welding fumes and respirable particulate mass was found to be -0.29, a significant negative correlation. The correlation between other heavy metals, however, was low. Finally, in the same total welding fumes, the correlation of Fe and Mg was high.

The study of characterization of extracted vanadium in waste catalyst for vanadium redox flow battery (폐촉매에서 추출한 바나듐 레독스 흐름전지용 바나듐의 특성 연구)

  • Kang, Ung Il
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.10
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    • pp.598-602
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    • 2018
  • This study examined the characteristics of the waste catalyst used in the petroleum refinery operations. The total pore volume, specific surface area, and average pore size of the spent catalyst used in the petroleum refinery operations were 3.96cc/g, 13.81m2/g, and 1.15A, respectively. The weight loss observed in the range from $25^{\circ}C-700^{\circ}C$ for the spent catalysts using TG and DTA was approximately 23 wt. %. EDS analysis of the waste catalyst sample showed that the five major components were vanadium, nickel, manganese, iron, and copper. The extraction system is attractive for liquid-liquid extraction. In this study, Cynex 272 was used to extract vanadium from waste catalyst. The electrochemical characteristics of the extracted vanadium solution were measured by cyclic voltammetry (CV). As a result, an oxidation / reduction peak appeared, indicating the potential of an electrolytic solution.

Isolation and Characteristics of Lactic Acid Bacteria Producing Casein Phosphopeptides from Kimchi (Casein phosphopeptide를 생산하는 김치 유래 유산균의 분리 및 특성 연구)

  • Lee, Mi-Gyeong;Kwon, Hyo-Jeong;Byun, Ock-Hee;Bang, Bo-Yeon;Kim, Yu-Jin;Park, JungMin;Bai, Dong-Hoon
    • Microbiology and Biotechnology Letters
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    • v.44 no.1
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    • pp.68-73
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    • 2016
  • Lactic acid bacteria showing both protease activity and the capacity to produce casein phosphopeptide (CPP) were isolated from Korean kimchi, a traditional food made from fermented vegetables. Among the 450 strains of isolated lactic acid bacteria, the strain MG-379 showed high protease activity and the highest ability to produce CPP. Characterization results showed that MG-379 was gram-positive and measured $0.6-0.8{\mu}m$ in diameter. DNA sequencing of MG-379 and comparison with other sequences using BLAST revealed a 100% identity with the sequence of Enterococcus faecalis. However, MG-379 showed a higher CPP-producing ability than E. faecalis KCCM 40450. Accordingly, MG-379 was newly named as E. faecalis MG-379. Amount of free calcium liberated by CPPs was 2227.5 and 1151.6 mg/kg for E. faecalis MG-379 and E. faecalis KCCM (control), respectively.

Characterization and Identification of Organic Selenium-enriched Bacteria Isolated from Rumen Fluid and Hot Spring Water

  • Dalia, A.M.;Loh, T.C.;Sazili, A.Q.;Jahromi, M.F.;Samsudin, A.A.
    • Microbiology and Biotechnology Letters
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    • v.45 no.4
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    • pp.343-353
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    • 2017
  • In the present study, the isolation of selenium (Se)-enriched bacteria from rumen fluid and hot spring water was carried out. Rumen fluid samples were taken from cannulated goats fed a basal diet and the water samples were collected from Selayang hot spring, Selangor-Malaysia. A total number of 140 Se-tolerant isolates were obtained aerobically using an Se-enriched medium and spread plate technique. All the isolates were initially screened for the ability to transform the Se-containing medium to a red-orange culture using a spectrophotometer. Twenty isolates of dark red-orange medium were selected for a screening of the highest Se-containing protein accumulating strains using the dialysis technique and icp.ms to measure the Se content. Four isolates, identified as Enterobacter cloacae (ADS1, ADS7, and ADS11), and Klebsiella pneumoniae (ADS2) from rumen fluid origin, as well as, one isolate from hot spring water (Stenotrophomonas maltophilia (ADS18)), were associated with the highest biomass organic Se-containing protein when grown in a medium enriched with $10{\mu}g/ml$ sodium selenite. In addition, around $50{\mu}g/100{\mu}g$ of the absorbed inorganic Se was accumulated as an organic form. Organic Se-containing protein in all the selected strains showed antioxidant properties in the range of 0.306 to 0.353 Trolox equivalent antioxidant capacity (TEAC) mg/ml. Therefore, these strains may offer a potential source of organic Se due to their Se-tolerant nature and higher biomass organic to inorganic Se ratio.