• Title/Summary/Keyword: Low-temperature phase transformation

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Property of Nano-thick Silicon Films Fabricated by Low Temperature Inductively Coupled Plasma Chemical Vapor Deposition Process (저온 ICP-CVD 공정으로 제조된 나노급 실리콘 박막의 물성)

  • Shen, Yun;Sim, Gapseop;Choi, Yongyoon;Song, Ohsung
    • Korean Journal of Metals and Materials
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    • v.49 no.4
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    • pp.313-320
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    • 2011
  • 100 nm-thick hydrogenated amorphous silicon $({\alpha}-Si:H)$ films were deposited on a glass and glass/30 nm Ni substrates by inductively-coupled plasma chemical vapor deposition (ICP-CVD) at temperatures ranging from 100 to $550^{\circ}C$. The sheet resistance, microstructure, phase transformation and surface roughness of the films were characterized using a four-point probe, AFM (atomic force microscope), TEM (transmission electron microscope), AES (Auger electron spectroscopy), HR-XRD(high resolution X-ray diffraction), and micro-Raman spectroscopy. A nano-thick NiSi phase was formed at substrate temperatures >$400^{\circ}C$. AFM confirmed that the surface roughness did not change as the substrate temperature increased, but it increased abruptly to 6.6 nm above $400^{\circ}C$ on the glass/30 nm Ni substrates. HR-XRD and micro-Raman spectroscopy showed that all the Si samples were amorphous on the glass substrates, whereas crystalline silicon appeared at $550^{\circ}C$ on the glass/30 nm Ni substrates. These results show that crystalline NiSi and Si can be prepared simultaneously on Ni-inserted substrates.

Synthesis and electrochemical properties of $LiCoO_2$ powders by urea hydrolysis (우레아 가수분해법에 의한 리튬이차전지용 $LiCoO_2$의 합성과 전기화학적 특성)

  • Jung Yong Hee;Kang Kui Won;Cheong Hun;Paik Ungyu;Hwang Kwang Taek
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.14 no.6
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    • pp.267-271
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    • 2004
  • Lithium cobalt oxide $(LiCoO_2)$ cathode powders for rechargeable battery have been successfully prepared using urea hydrolysis method. The obtained hydrolysis-derived precursors with different Li/Co molar ratio were calcined at various temperatures. Low temperature phase $(LT-LiCoO_2)$ and high temperature phase $(HT-LiCoO_2)$ were obtained after calcination at $500^{\circ}C$ for 2 hr, and phase transformation from $LT-LiCoO_2{\;}to{\;}HT-LiCoO_2$ was completely occurred over $700^{\circ}C$. The layered structure of $LiCoO_2$ was well developed with a rise in the calcination temperature. Charge-discharge test show that the lithium cobalt oxide with 1.2 molar ratio prepared at $800^{\circ}C$ has an initial discharge capacity as high as 152 mAh/g, and the relatively stable cycling characteristic with 9.2 % of capacity fading was obtained after 40th charge-discharge test.

Synthesis and Characterization of (AgSbTe2)15(GeTe)85 Thermoelectric Powder by Gas Atomization Process (가스분무공정을 이용한 (AgSbTe2)15(GeTe)85 열전분말의 제조 및 특성평가)

  • Kim, Hyo-Seob;Lee, Jin-Kyu;Koo, Jar-Myung;Chun, Byong-Sun;Hong, Soon-Jik
    • Journal of Powder Materials
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    • v.18 no.5
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    • pp.449-455
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    • 2011
  • In this study, p-type $(AgSbTe_2)_{15}(GeTe)_{85}$: TAGS-85 compound powders were prepared by gas atomization process, and then their microstructures and mechanical properties were investigated. The fabricated powders were of spherical shape, had clean surface, and illustrated fine microstructure and homogeneous $AgSbTe_2$ + GeTe solid solution. Powder X-ray diffraction results revealed that the crystal structure of the TAGS-85 sample was single rhombohedral GeTe phase, which with a space group $R_{3m}$. The grain size of the powder particles increased while the micro Vickers hardness decreased with increasing annealing temperature within the range of 573 K and 723 K due to grain growth and loss of Te. In addition, the crystal structure of the powder went through a phase transformation from rhombohedral ($R_{3m}$) at low-temperature to cubic ($F_{m-3m}$) at high-temperature with increasing annealing temperature. The micro Vickers hardness of the as-atomized powder was around 165 Hv, while it decreased gradually to 130 Hv after annealing at 673K, which is still higher than most other fabrication processes.

Heat Transfer and Solidification of Liquid Silicon in von-Kármán Swirling Flow (Von-Kármán 회전 유동 하에서의 액체 실리콘의 응고와 열전달)

  • Yoo, Joo-Sik
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.23 no.2
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    • pp.185-197
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    • 1999
  • Heat transfer and solidification of liquid silicon in von-$K{\acute{a}}rm{\acute{a}}n$ swirling flow is investigated. The moving boundary is fixed for all times by a coordinate transformation, and finite difference method Is used to obtain the instantaneous location of the solid-liquid Interface and the heat transfer from the surfaces of solid and liquid. For small Stefan number or low wall temperature, the transient heat transfer from the surface of solid(QS(t)) is much larger than that from the liquid side of solid-liquid interface(QL(t)) and QL(t) reaches its quasi-steady-state value much faster than QS(t).

The Investigation of the Plasma Sprayed Coatings for the Application of OG Cooling Tube in Steel Making Plant

  • Kim, HyungJun;Kwon, YoungGak
    • Corrosion Science and Technology
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    • v.4 no.1
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    • pp.23-28
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    • 2005
  • Several plasma-sprayed ceramic coatings with two- and three-layers were characterized and tested for the application of cooling tube coatings of oxygen convert gas recovery system (OG cooling system) in the steel making plant. Thermal cycling tests using a torch heating with compressed air cooling were carried out and characterized before and after the tests. The effects of metallic bond coat as well as ceramic top coat were also studied. Possible failure mechanisms with low carbon steel substrate were assessed in term of microstructure, porosity, bond strength, thermal expansion coefficient, and the phase transformation. Finally, the results of field tests at the OG cooling system are presented and discussed their microstructural degradation. Test results have shown that three-layered coatings perform better than two-layered coatings.

Numerical Prediction of Thermoacoustic Instability in Rijke Tube Using Non-linear Model for Heat Source (비선형 열원모델을 이용한 Rijke tube 내열음향 불안정 곡선의 수치예측기법)

  • Song, Woo-Seog;Lee, Seung-Bae
    • Proceedings of the KSME Conference
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    • 2008.11b
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    • pp.2524-2529
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    • 2008
  • The thermal system like a combustion chamber is believed to experience a significant instability problem with vibration in case that the thermal energy or the acoustic energy are transformed into a different form through a relevant path. This study deals with a numerically- predicted, Thermoacoustic instability in a Rijke tube by using a non-linear model for a heat source. The heating part where the energy transformation occurs actively is modeled after simulating two-dimensional cylinder case with constant surface temperature, and a nonlinear model that accounts for the transfer function of magnitude- and phase-characteristics is properly implemented so as to be dependent on the pulsation strength in the tube. The heat source model is observed to result in equivalent Thermoacoustic instabilities in the Rijke tube except low flow-rate cases in which the natural convection is dominant.

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Property and Microstructure Evaluation of Pd-inserted Nickel Monosilicides (Pd 삽입 니켈모노실리사이드의 물성과 미세구조 변화)

  • Yoon, Kijeong;Song, Ohsung
    • Korean Journal of Metals and Materials
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    • v.46 no.2
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    • pp.69-79
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    • 2008
  • A composition consisting of 10 nm-Ni/1 nm-Pd/(30 nm or 70 nm-poly)Si was thermally annealed using rapid thermal for 40 seconds at $300{\sim}1100^{\circ}C$ to improve the thermal stability of conventional nickel monosilicide. The annealed bilayer structure developed into $Ni(Pd)Si_x$, and the resulting changes in sheet resistance, microstructure, phase, chemical composition, and surface roughness were investigated. The silicide, which formed on single crystal silicon, could defer the transformation of $NiSi_2$, and was stable at temperatures up to $1100^{\circ}C$. It remained unchanged on polysilicon substrate compared with the sheet resistance of conventional nickel silicide. The silicides annealed at $700^{\circ}C$, formed on single crystal silicon and 30 nm polysilicon substrates exhibited 30 nm-thick uniform silicide layers. However, silicide annealed at $1,000^{\circ}C$ showed preferred and agglomerated phase. The high resistance was due to the agglomerated and mixed microstructures. Through X-ray diffraction analysis, the silicide formed on single crystal silicon and 30 nm polysilicon substrate, showed NiSi phase on the entire temperature range and mixed phases of NiSi and $NiSi_2$ on 70 nm polysilicon substrate. Through scanning probe microscope (SPM) analysis, we confirmed that the surface roughness increased abruptly until 36 nm on 30 nm polysilicon substrate while not changed on single crystal and 70 nm polysilicon substrates. The Pd-inserted nickel monosilicide could maintain low resistance in a wide temperature range and is considered suitable for nano-thick silicide processing.

Sheet Resistance and Microstructure Evolution of Cobalt/Nickel Silicides with Annealing Temperature (코발트/니켈 복합실리사이드의 실리사이드온도에 따른 면저항과 미세구조 변화)

  • Jung Young-soon;Cheong Seong-hwee;Song Oh-sung
    • Korean Journal of Materials Research
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    • v.14 no.6
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    • pp.389-393
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    • 2004
  • The silicide layer used as a diffusion barrier in microelectronics is typically required to be below 50 nm-thick and, the same time, the silicides also need to have low contact resistance without agglomeration at high processing temperatures. We fabricated Si(100)/15 nm-Ni/15 nm-Co samples with a thermal evaporator, and annealed the samples for 40 seconds at temperatures ranging from $700^{\circ}C$ to $1100^{\circ}C$ using rapid thermal annealing. We investigated microstructural and compositional changes during annealing using transmission electron microscopy and auger electron spectroscopy. Sheet resistance of the annealed sample stack was measured with a four point probe. The sheet resistance measurements for our proposed Co/Ni composite silicide was below 8 $\Omega$/sq. even after annealing $1100^{\circ}C$, while conventional nickel-monosilicide showed abrupt phase transformation at $700^{\circ}C$. Microstructure and auger depth profiling showed that the silicides in our sample consisted of intermixed phases of $CoNiSi_{x}$ and NiSi. It was noticed that NiSi grew rapidly at the silicon interface with increasing annealing temperature without transforming into $NiSi_2$. Our results imply that Co/Ni composite silicide should have excellent high temperature stability even in post-silicidation processes.

Tunable Dielectric Properties and Curie Temperature with BST Thick Films (BST 후막의 가변 유전특성과 큐리온도에 관한 연구)

  • Kim In-Sung;Song Jae-Sung;Min Bok-Ki;Jeon So-Hyun
    • The Transactions of the Korean Institute of Electrical Engineers C
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    • v.55 no.8
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    • pp.392-398
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    • 2006
  • The properties of tunable dielectric materials on RF frequency band are important high tunability and low loss for RF variable devices, variable capacitor, phased array antenna and other components application. Various composite of BST(barium strontium titanate) ratio combined with other non-electrical active oxide ceramics have been formulated for such uses. We present the tunable properties and Curie temperature on BST thick films. The grain growth of the weight ratio of $BaTiO_3$ increased. This can be explained by the substitute $Sr^{2+}$ ion for $Ba^{2+}$ ion in the $BaTiO_3$ system. The Curie temperature was shifted to lower temperature with increasing $SrTiO_3$in the $BaTiO_3-SrTiO_3$ system, because of decreasing the lattice constant. Also, the dielectric constant, tunability and K-factor of $(Ba_xSr_{1-x})TiO_3$ at over the Curie temperature decreased, at over the $60^{\circ}C$ fixation, maximum dielectric constant at Curie temperature and hence sharper phase transformation occurred at Curie temperature. The result were interpreted as a process of internal stress relaxation resulting form the increase of $90^{\circ}$ domains induced the BST. As a result, It is concluded that over the Curie temperature, frequency response and DC field effect for the tunable properties of BST thick film are suppressed by the transition broadening. For the application of tunable devices, that the curie temperature was investigated to be increased.

Characterization of LiCoO2 Synthesized via Structural and Compositional Variations of Precursors Prepared by Precipitation (침전법으로 제조된 전구체 성질에 의한 LiCoO2의 특성에 관한 연구)

  • Jeong, Myoung Kuk;Hwang, Chi Seok;Choi, Cheong Song
    • Clean Technology
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    • v.12 no.2
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    • pp.101-106
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    • 2006
  • HT-$LiCoO_2$ powders were synthesized from hydroxide precursors in this study. The cobalt hydroxide compounds with hydrotalcite-like(${\alpha}$-phase) and/or brucite-like(${\beta}$-phase) structures as a component of the precursor were prepared in various PH conditions using precipitation method. It was found that various phase and compositions of cobalt hydroxides could be tailor-prepared via a careful control of preparation parameters such as the concentration ratio of $[OH^-]/[CO^{2+}]$ and aging time. The hydroxides $Co(OH)_2$ and LiOH were mixed with aqueous methyl-alcohol. The precursor of a HT-$LiCoO_2$ was synthesized via subsequent processes including evaporation, drying and aging. The transformation of tailor-made ${\beta}$-phase $Co(OH)_2$ to CoOOH and formation of solid solution in the precursor were achieved during aging. These results cause HT-$LiCoO_2$ to be synthesized at low temperature($600^{\circ}C$ ) for a short time(10min).

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