Property of Nano-thick Silicon Films Fabricated by Low Temperature Inductively Coupled Plasma Chemical Vapor Deposition Process |
Shen, Yun
(Department of Materials Science and Engineering, University of Seoul)
Sim, Gapseop (Department of Materials Science and Engineering, University of Seoul) Choi, Yongyoon (Department of Materials Science and Engineering, University of Seoul) Song, Ohsung (Department of Materials Science and Engineering, University of Seoul) |
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