• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.24 no.10
• /
• pp.1359-1367
• /
• 2000

In-situ particle monitors(ISPMs) are widely used for monitoring contaminant particles in vacuum-based semiconductor manufacturing equipment. In the present research, the performance of a Particle Measuring Systems(PMS) Vaculaz-2 ISPM at low pressures has been studied. We generated the uniform sized methylene blue particle beams using three identical aerodynamic lenses in the center of the vacuum line, and measured the detection efficiency of the ISPM. The effects of particle size, particle concentration, mass flow rate, system pressure, and arrangement of aerodynamic lenses on the detection efficiency of the ISPM were examined. Results show that the detection efficiency of the ISPM greatly depends on the mass flow rate, and the particle Stokes number. We also found that the optimum Stokes number ranges from 0.4 to 1.9 for the experimental conditions.

• Proceedings of the KSME Conference
• /
• 2004.04a
• /
• pp.1715-1719
• /
• 2004

An in-house supersonic ejector was designed to ensure low pressure and high speed scavenging of resonating cavity of chemical lasers. For given primary flow condition, 100g/s secondary mass flow rate was observed at the design pressure. Performance validation of a supersonic ejector system along with an investigation of effects of supersonic diffuser was conducted. Placement of diffuser at the secondary inlet further reduced diffuser upstream pressure to 1/4-1/5 relieving the local to the primary supply unit. In order to increase the secondary flow, we put two ejectors capable of removing 50g/s each of secondary flows together to deal with higher mass flow. Test of the parallel unit demonstrated the secondary flow rate was proportional to the numbers of individual units that were brought together. Additionally, flow calculations with a commercial code were carried out in every case of experiment and compared with results.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.20 no.4
• /
• pp.1481-1490
• /
• 1996

This study is intend to improve flow pattern within evaporator, which is low quality and low mass flux, by installing narrow horizontal annular crevice so that enhance heat transfer coefficient. The motive, which made to study heat transfer enhancement by using narrow annular crevice, came from capillary phenomena and pumping force of generating vapor on refrigerant boiling. Tests were run about 5 models of turbulence promoter with CFC-12, in the range of evaporating temperature (15.deg. C), mass flux (50 to 100 kg/m$\^$2/s), heat flux (3.4 to 6.7 kW/m$\^$2/), quality (0.1 to O.5). It is observed that flow pattern within evaporator is changed closely to semi-annular flow or annular flow, of which refrigerant liquid is reached to the upper side of tube by using narrow annular crevice. When the narrow annular crevice is installed in the evaporator tube, local heat transfer coefficient is generally more improved than that of smooth tube. That fact is according to observed result of flow pattern. It is learned that narrow annular crevice has more efficiency at a low mass flux. At the TP-5, enhancement of heat transfer rate is about 170% compare to that of smooth tube on a low mass flux (50 kg/m$\^$2/s), and it is about 134% on a high mass flux (100 kg/M$\^$2/S), so that we know that it is on a very high condition.

• Membrane and Water Treatment
• /
• v.4 no.3
• /
• pp.191-202
• /
• 2013

The application of ultrafiltration operation to the dialysis in countercurrently parallel-flow rectangular membrane modules was investigated. The assumption of uniform ultrafiltration flux was made for operation with slight concentration polarization and declination of transmembrane pressure. Considerable improvement in mass transfer is achievable if the operation of ultrafiltration is applied, especially for the system with low mass transfer coefficient. The enhancement in separation efficiency is significantly increased with increasing ultrafiltration flux, as well as with increasing the volumetric flow rates. Furthermore, increasing the volumetric flow rate in retentate phase is more beneficial to mass transfer than increasing in dialysate phase.

• Bulletin of the Korean Chemical Society
• /
• v.28 no.8
• /
• pp.1383-1388
• /
• 2007

Recently, the semiconductor and display industries have tried to reduce the emissions of perfluorocompounds (PFCs) from the globally environmental regulation. Total amount of PFC emission can be calculated from the flow rate and the partial pressures of PFCs. For the precise measurement of PFC emission amount, the mass flow controlled helium gas was continuously injected into the equipment of which scrubber efficiency is being measured. The partial pressures of PFCs and helium were accurately measured using a mass spectrometer in each sample extracted from inlet and outlet of the scrubber system. The flow rates are calculated from the partial pressures of helium and also, PFC destruction and removal efficiency (DRE) of the scrubber is calculated from the partial pressure of PFC and the flow rate. Under this method, the relative expanded uncertainties of the flow rate and the partial pressures of PFCs are ± 2% (k = 2) in case the concentrations of NF3 and SF6 are as low as 100 μmol/mol.

• 제어로봇시스템학회:학술대회논문집
• /
• 2000.10a
• /
• pp.212-212
• /
• 2000

This study was performed to construct a hot strip speed measuring system and check over whether the measured speed can be used for improving the mass flow of the head-end part of a hot strip in the 7-stand finishing mill. Because the mass flow in hot rolling mill affects the looper operation and the thickness and width control of a strip, accurate measurement of strip speed ie important. The measured speed was compared with the roll speeds of No. 6 and No.7 stand to check the performance of the system and analyzed to find how to apply the speed. As a result, it is shown that the accuracy of the system is enough, strip thickness error can be reduced by -275∼+200$\mu\textrm{m}$ using the measured speed and the existing FSU model has low accuracy for predicting forward slip rate. A neural network was developed to calculate forward slip rate instead of FSU model. The test result of the neural network shows that the neural network is more accurate than the FSU model.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.37 no.5
• /
• pp.503-511
• /
• 2013

The humidifying supply gas is important in terms of the performance efficiency and membrane life improvement of a PEM fuel cell. A planar membrane humidifier is classified as a cross-flow and counter-flow type depending on the flow direction, and heat and mass transfer occur between the plate and the membrane. In this study, the changes in heat and mass transfer for various inlet temperatures and flow rates are compared according to the flow direction by using the sensible and latent ${\varepsilon}$-NTU method. The obtained results indicate that the counter flow shows higher heat and mass transfer performance than the cross flow at a low flow rate, and the difference in performance decreases as the flow rate increases. Furthermore, changes in the mass transfer performance decrease considerably with a nonlinear increase in the inlet temperature, and variations of the heat transfer performance are small.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.28 no.3
• /
• pp.338-348
• /
• 2004

The present study is conducted to investigate the effect of rib arrangements on an impingement/effusion cooling system with initial crossflow. To simulate the impingement/effusion cooling system, two perforated plates are placed in parallel and staggered arrangements with a gap distance of 2 times of tile hole diameter. Initial crossflow passes between the injection and effusion plates, and the square ribs (3mm) are installed on the effusion plate. Both the injection and effusion hole diameters are 10mmand Reynolds number based on the hole diameter and hole-to-hole pitch are fixed to 10,000 and 6 times of the hole diameter, respectively. To investigate the effects of rib arrangements, various rib arrangements, such as 90$^{\circ}$transverse and 45$^{\circ}$angled rib arrangements, are used. Also, the effects of flow rate ratio of crossflow to impinging jets are investigated. With the initial crossflow, locally low transfer regions are formed because the wall jets are swept away, and level of heat transfer rate get decreased with increasing flow rate of crossflow. When the ribs are installed on the effusion plate, the local distributions of heat/mass transfer coefficients around the effusion holes are changed. The local heat/mass transfer around the stagnation regions and the effusion holes are affected by the rib positions, angle of attack and rib spacing. For low blowing ratio, the ribs have adverse effects on heat/mass transfer, but for higher blowing ratios, higher and more uniform heat transfer coefficient distributions are obtained than the case without ribs because the ribs prevent the wall jets from being swept away by the crossflow and increase local turbulence of the flow near the surface. Average heat transfer coefficients with rib turbulators are approximately 10% higher than that without ribs, and the higher values are obtained with small pitch of ribs. However, the attack angle of the rib has little influence on the average heat/mass transfer.

• 한국연소학회:학술대회논문집
• /
• 2006.10a
• /
• pp.27-35
• /
• 2006

It has been observed in experiments that combustion instability of low frequency (${\sim}$ 10Hz) results form the modulation of equivalence ratio at fuel injection hole when a pressure fluctuation propagates upwards along the channel of the burner under an unchoked fuel flow condition. In this study, a commercial program was used to determine how the fuel flow rate changed with respect to the pressure, velocity of the fuel flow and the mass fraction in a choked and an unchoked condition. The calculation focus on the upstream of the dump plane to know how the forced pressure with the fuel injection conditions affects the modulation of the equivalence ratio. Therefore, it is found that pressure fluctuation leads to oscillation of mass flow rate and then results in equivalence ratio modulation under the unchoked fuel flow condition.

• Membrane and Water Treatment
• /
• v.13 no.6
• /
• pp.313-320
• /
• 2022

Theoretical calculation results are presented for the enhancement of the water mass flow rate through the hydrophobic micro/nano pores in the membrane respectively on the micrometer and nanometer scales. The water-pore wall interfacial slippage is considered. When the pore diameter is critically low (less than 1.82nm), the water flow in the nanopore is non-continuum and described by the nanoscale flow equation; Otherwise, the water flow is essentially multiscale consisting of both the adsorbed boundary layer flow and the intermediate continuum water flow, and it is described by the multiscale flow equation. For no wall slippage, the calculated water flow rate through the pore is very close to the classical hydrodynamic theory calculation if the pore diameter (d) is larger than 1.0nm, however it is considerably smaller than the conventional calculation if d is less than 1.0nm because of the non-continuum effect of the water film. When the driving power loss on the pore is larger than the critical value, the wall slippage occurs, and it results in the different scales of the enhancement of the water flow rate through the pore which are strongly dependent on both the pore diameter and the driving power loss on the pore. Both the pressure drop and the critical power loss on the pore for starting the wall slippage are also strongly dependent on the pore diameter.