Evaluation Method on Destruction and Removal Efficiency of Perfluorocompounds from Semiconductor and Display Manufacturing
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Lee, Jee-Yon
(Division of Metrology for Quality Life, Korea Research Institute of Standards and Science)
Lee, Jin-Bok (Division of Metrology for Quality Life, Korea Research Institute of Standards and Science) Moon, Dong-Min (Division of Metrology for Quality Life, Korea Research Institute of Standards and Science) Souk, Jun-Hyung (Samsung Electronics Co., LTD) Lee, Seung-Yeon (Samsung Advanced Institute of Technology) Kim, Jin-Seog (Division of Metrology for Quality Life, Korea Research Institute of Standards and Science) |
1 | Radoiu, M. T. Radiation Physics and Chemistry 2004, 69, 113 DOI ScienceOn |
2 | Van Brunt, R. J.; Herron, J. T. IEEE Trans. Electr. Insul. 1990, 25, 75 DOI ScienceOn |
3 | Johnson, A. D.; Ridgeway, R. G.; Maroulis, P. J. IEEE Tran. Semicon. Manufac. 2004, 17, 491 DOI ScienceOn |
4 | Mohindra, V.; Chae, H.; Sawin, H. H.; Mocella, M. T. IEEE Tran. Semicon. Manufac. 1997, 10, 399 DOI ScienceOn |
5 | Chan, E. M.; Loh, G.; Allgood, C. C. IEEE Tran. Semicon. Manufac. 2004, 17, 497 DOI ScienceOn |
6 | Vartanian, V.; Goolsby, B.; Chatterjee, R.; Kachmarik, R.; Babbitt, D.; Reif, R.; Tonnis, E. J.; Graves, D. IEEE Tran. Semicon. Manufac. 2004, 17, 483 DOI ScienceOn |
7 | Chang, M. B.; Chang, J. S. Ind. Eng. Chem. Res. 2006, 45, 4101 DOI ScienceOn |
8 | Stoffels, W. W.; Stoffels, E.; Tachibana, K. Journal of Vacuum Science & Technology A 1998, 16, 87 DOI ScienceOn |
9 | Fujii, T.; Arulmozhiraja, S.; Nakamura, M.; Shiokawa, Y. Anal. Chem. 2001, 73, 2937 |
10 | Stoffels, E.; Stoffels, W. W.; Tachibana, K. Rev. Sci. Instrum. 1998, 69, 116 DOI ScienceOn |
11 | Li, S. N.; Hsu, J. N.; Leo, G. H. Semiconductor Fabtech, 14th ed; 2005; p 63 |
12 | Kim, J. S.; Moon, D. M.; Kato, K.; Leonid, A.; Konopelko, L.; Kustikov, Y. A.; Guenther, F. R. Metrologia 2006, 43, 08009 DOI ScienceOn |
13 | Houghton, J. T.; Meira Filho, L. G.; Callander, B. A.; Harris, N.; Kattenberg, A.; Maskell, K. Climate Change 1995: The Science of Climate Change, Cambridge University Press: New York, 1996 |
14 | IPCC Guideline, Good practice guidance and uncertainty management in national greenhouse gas inventories, Intergovernmental Panel on Climate Change; 2000; Chapter 3.6, p 243 |
15 | Guber, A. E.; Kohler, U. J. Mol. Struct. 1995, 348, 209 DOI ScienceOn |
16 | Tsai, W. T.; Chen, H. P.; Hsien, W. Y. Journal of Loss Prevention in the Process Industries 2002, 15, 65 DOI ScienceOn |
17 | Lee, J. Y.; Yoo, H. S.; Park, J. S.; Hwang, K. J.; Kim, J. S. J. Chem. Edu. 2005, 82, 288 DOI ScienceOn |
18 | International Organization for Standardization, ISO 6142: Gas analysis -Preparation of Calibration Gas Mixtures-Gravimetric Methods, 2nd ed; 2001 |
19 | Lee, J. Y.; Yoo, H. S.; Marti, K.; Moon, D. M.; Lee, J. B.; Kim, J. S. J. Geophys. Res. 2006, 111, D05302 DOI |
20 | Moon, D. M.; Lee, J. B.; Lee, J. Y.; Kim, D. H.; Lee, S. H.; Lee, M. G.; Kim, J. S. Anal. Sci. Tech. 2006, 19, 535 |
21 | Li, S. N.; Hsu, J. N.; Shih, H. Y.; Lin, S. J.; Hong, J. L. Solid State Technology 2002, 45, 157 |
22 | Molina, L. T.; Wooldridge, P. J.; Molina, M. J. Geophys. Res. Lett. 1995, 22, 1873 DOI ScienceOn |
23 | Park, S. Y.; Kim, J. S.; Lee, J. B.; Esler, M. B.; Davis, R. S.; Wielgosz, R. I. Metrologia 2004, 41, 387 DOI ScienceOn |
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