• 제목/요약/키워드: Liquid Precursor

검색결과 183건 처리시간 0.037초

Optical and electrical property of Indium-doped ZnO (IZO) grown by Atomic Layer Deposition (ALD) using Et2InN(TMS)2 as In precursor and H2O oxidant

  • 조영준;장효식
    • 한국진공학회:학술대회논문집
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    • 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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    • pp.421.1-421.1
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    • 2016
  • We studied indium-doped zinc oxide (IZO) film grown by atomic layer deposition (ALD) as transparent conductive oxide (TCO). A variety of TCO layer, such as ZnO:Al (AZO), InSnO2(ITO), Zn (O,S) etc, has been grown by various method, such as ALD, chemical vapor deposition (CVD), sputtering, laser ablation, sol-gel technique, etc. Among many deposition methods, ALD has various advantages such as uniformity of film thickness, film composition, conformality, and low temperature deposition, as compared with other techniques. In this study, we deposited indium-doped zinc oxide thin films using diethyl[bis(trimethylsilyl)amido]indium [Et2InN(TMS)2] as indium precursor, DEZn as zinc precursor and H2O as oxidant for ALD and investigated the optical and electrical properties of IZO films. As an alternative, this liquid In precursor would has several advantages in indium oxide thin-film processes by ALD, especially for low resistance indium oxide thin film and high deposition rate as compared to InCp, InCl3, TMIn precursors etc. We found out that Indium oxide films grown by Et2InN(TMS)2 and H2O precursor show ALD growth mode and ALD growth window. We also found out the different growth rate of Indium oxide as the substrate and investigated the effect of the substrate on Indium oxide growth.

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Ultrasonic Spray Pyrolysis 법에 의한 Bi2Sr2Ca2Cu3Ox 분말합성 및 특성평가 (Synthesis and Characterization of Bi2Sr2Ca2Cu3Ox Powders by Ultrasonic Spray Pyrolysis Method)

  • 배병수;정상진;이봉;문창권;최희락
    • 한국해양공학회지
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    • 제24권6호
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    • pp.86-91
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    • 2010
  • Superconductor material $Bi_2Sr_2Ca_2Cu_3O_x$(Bi-2223) powders were synthesized by ultrasonic spray pyrolysis method. It is clear that Bi-2223 phase more than Bi-2212 phase was acquired at sufficient synthesized time. Best condition for Bi-2223 phase was synthesizing temperature at $860^{\circ}C$. We also investigated the effects for concentrations and viscosities of starting liquid precursor as well as temperature distribution of reacting furnace. The size of synthesized powder was decreased by decreasing the concentration of starting liquid precursor. Modified reacting furnace with four different temperature heating zones gave us successful results for desirable nano-powder including $Bi_2Sr_2Ca_2Cu_3O_x$ phase. Citric acid addition to starting liquid precursor showed increasing of the size for synthesized powder. Bi-2223 single phase was acquired from Bi2223 and Bi-2212 mixed phases through heat treatment in box furnace at 24 hours.

액체상흡착제(HMDS) 주입조건에 따른 응축성 가스상 물질의 거동특성 비교 (Behaviour of Condensing Gaseous Species by Injection of Liquid Adsorbents (HMDS) in Combustion Facility)

  • 김용구;이상열;봉춘근;김현상
    • 대한환경공학회지
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    • 제37권5호
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    • pp.285-292
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    • 2015
  • 본 연구에서는 바이오매스의 탄화공정 시 발생되는 목초액을 응축성 가스물질의 전구물질로 이용하여 발생되는 응축성 가스상 오염물질을 제거하기 위하여 액체상 흡착제중 실리카 전구물질인 HMDS의 주입조건에 따른 응축성물질의 입경분포 변화특성을 명확히 파악하고자 하였다. 응축성 가스상 물질을 입자화시켜 제거하기 위하여 액체상 흡착제인 HMDS를 이용할 경우, 흡착제의 주입량, 체류시간 및 가열온도, MFC 유량 등의 적절한 조절로써 입자화 크기를 조절할 수 있었다. 특히 실리카 전구물질을 도입시 끓는점, 밀도(비중), 분자량 등의 물리화학적 특성을 고려하면, 발생되는 응축성 물질을 효과적으로 입자화시켜 제어 가능할 것으로 판단된다.

Polyvinyl Alcohol 폴리머 용액법으로 합성한 스포듀민 분말의 특성연구 (Characteristics of Spodumene Powders Synthesized by Polyvinyl Alcohol Solution Technique)

  • 이상진;박지은
    • 한국분말재료학회지
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    • 제18권1호
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    • pp.35-40
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    • 2011
  • LAS-system ceramic powder, spodumene ($Li_2O{\cdot}Al_2O_3{\cdot}4SiO_2$), was successfully synthesized by a chemical solution technique employing PVA(polyvinyl alcohol) as an organic carrier. The PVA content affected the microstructure of porous precursor gels and the crystalline development. The optimum PVA content contributed to homogeneous distribution of metal ions in the precursor gel and it resulted in the synthesis of glass free $\beta$-spodumene powder having a specific surface area of $7.57\;m^2/g$. The agglomerated $\beta$-spodumene powders were also enough soft to grind to fine powders by a simple ball milling process. The microstructures of the densified powder compacts were strongly dependant on the minor phases of spodumene solid solution and amount of liquid phase, which were formed from the inhomogeneous precursors.

Determination of Glimepiride in Human Plasma by Liquid Chromatography-Electrospray Ionization Tandem Mass Spectrometry

  • Kim, Ho-Hyun;Chang, Kyu-Young;Lee, Hee-Joo;Han, Sang-Beom
    • Bulletin of the Korean Chemical Society
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    • 제25권1호
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    • pp.109-114
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    • 2004
  • A sensitive method for quantitation of glimepiride in human plasma has been established using liquid chromatography-electrospray ionization tandem mass spectrometry (LC-ESI/MS/MS). Glipizide was used as an internal standard. Glimepiride and internal standard in plasma sample was extracted using diethyl etherethyl acetate (1 : 1). A centrifuged upper layer was then evaporated and reconstituted with the mobile phase of acetonitrile-5 mM ammonium acetate (60:40, pH 3.0). The reconstituted samples were injected into a $C_{18}$ reversed-phase column. Using MS/MS in the multiple reaction monitoring (MRM) mode, glimepiride and glipizide were detected without severe interference from human plasma matrix. Glimepiride produced a protonated precursor ion ([M+H]$^+$) at m/z 491 and a corresponding product ion at m/z 352. And the internal standard produced a protonated precursor ion ([M+H]]$^+$) at m/z 446 and a corresponding product ion at m/z 321. Detection of glimepiride in human plasma by the LC-ESI/MS/MS method was accurate and precise with a quantitation limit of 0.1 ng/mL. The validation, reproducibility, stability, and recovery of the method were evaluated. The method has been successfully applied to pharmacokinetic studies of glimepiride in human plasma.

Preparation of Si(Al)ON Precursor Using Organoaluminum Imine and Poly (Phenyl Carbosilane), and the Compositional Change of the Film with Different Heat Treatment Condition

  • Lee, Yoonjoo;Shin, Dong-Geun;Kwon, Woo Teck;Kim, Soo Ryong;Kim, Younghee
    • 한국세라믹학회지
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    • 제52권4호
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    • pp.243-247
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    • 2015
  • Si(Al)ON precursor was synthesized by formation of new Si-N bond using organoaluminum imine and liquid type poly(phenyl carbosilane). It was decomposed between $200-600^{\circ}C$, and the ceramic yield was 51% after pyrolysis. 150 - 200 nm in thickness of coating film was obtained by spin coating method. The precursor was easily oxidized during process because it was unstable in air. However the oxygen content was limited to 0.5 - 0.7 to silicon in heat treatment step. Even though the content of nitrogen was decreased by pyrolysis, Al-N and Si-N bonds were formed in ammonia atmosphere, and Si(Al)ON film was formed with 0.2 in content to silicon.

고액용융성장법을 이용한 YBCO 단결정 제조 (YBCO Bulk Superconductors Prepared by Solid-liquid Melt Growth)

  • 한상철;이정필;박병철;정년호;박병준;정세용;한영희;성태현
    • 한국전기전자재료학회논문지
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    • 제22권10호
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    • pp.860-863
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    • 2009
  • YBCO bulks with fine $Y_2BaCuO_5$(Y211) particles have been prepared by the top-seed modified powder melting process method, Solid-Liquid Melt Growth(SLMG), with $Y_2O_3$, $BaCuO_2$ and CuO mixing precursor. By using $Y_2O_3$ instead of $Y_2BaCuO_5$ as precursor, the processing became to be simpler and cheaper than the current powder melting process. The microstructures, trapped field and critical current density of the various conditioned YBCO bulks have been analyzed and the effect of Pt additive was studied. The different trapped magnetic field values of the several samples have been explained in the viewpoint of their microstructures. The fabrication of large-sized YBCO single domain has been conducted.

액상 침투 성장법으로 제조된 $YBa_2Cu_3O_{7-y}$ 벌크 초전도체의 임계전류밀도에 대한 $CeO_2$ 첨가된 $Y_2BaCuO_5$ 분말의 밀링 효과 (Milling Effects of $Y_2BaCuO_5$ Precursor Powder with $CeO_2$ Addition on the Critical Current Density of Liquid Infiltration Growth Processed $YBa_2Cu_3O_{7-y}$ Bulk Superconductors)

  • 아시프 마흐무드;전병혁;김찬중
    • Progress in Superconductivity
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    • 제12권1호
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    • pp.6-11
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    • 2010
  • The milling effects of a precursor $Y_2BaCuO_5$ (Y211) powder having 1 wt.% $CeO_2$ on the microstructure and critical current density ($J_c$) of liquid infiltration growth (LIG) processed $YBa_2Cu_3O_{7-y}$ (Y-123) bulk superconductors were investigated. The microstructure analysis revealed that the Y211 size in the final Y-123 products decreased with increasing the milling time and a relatively high density and uniform distribution of Y211 inclusions were observed in the sample prepared using 8 h milled powder. However, the unexpected Y211 particles coarsening was observed from the 4 h milled sample which was further increased for 10 h milled sample. Critical current density ($J_c$) of the LIG processed Y-123 bulk superconductors was found to be dependent on the milling time of the Y211 precursor powder. The $J_c$ increased with the increase of milling time and reached up to a maximum at 8 h in the self field while 10 h milled sample showed lower $J_c$ at the same field which might be due to the exaggerated growth and non-uniform distribution of Y211 particles.