Preparation of Si(Al)ON Precursor Using Organoaluminum Imine and Poly (Phenyl Carbosilane), and the Compositional Change of the Film with Different Heat Treatment Condition |
Lee, Yoonjoo
(Energy Efficient Material Team, Korea Institute of Ceramic Engineering and Technology)
Shin, Dong-Geun (Energy Efficient Material Team, Korea Institute of Ceramic Engineering and Technology) Kwon, Woo Teck (Energy Efficient Material Team, Korea Institute of Ceramic Engineering and Technology) Kim, Soo Ryong (Energy Efficient Material Team, Korea Institute of Ceramic Engineering and Technology) Kim, Younghee (Energy Efficient Material Team, Korea Institute of Ceramic Engineering and Technology) |
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