• International Journal of Precision Engineering and Manufacturing
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• v.6 no.2
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• pp.55-60
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• 2005

In order to develop the hydrostatic guideways driven by a core less linear motor for ultra precision machine tools, a prototype of guideway is designed and tested. A coreless linear DC motor with a continuous force of 156 N and a laser scale with a resolution of 0.01 ㎛ are used in the system. Experimental analysis on the static stiffness, motion errors, positioning error and its repeatability, micro step response and velocity variation of the guideway are performed. The guideway shows infinite stiffness within 50 N applied load in the feed direction, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ㎛ linear motion error and 0.1 arcsec angular motion error are acquired. The guideway also reveals 0.21 ㎛ positioning error and 0.09 ㎛ repeatability, and it shows stable responses following a 0.01 ㎛ resolution step command. The velocity variation of feeding system is less than 0.6 ％. From these results, it is estimated that the hydrostatic guideway driven by a coreless linear motor is very useful for the ultra precision machine tools.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.6
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• pp.139-144
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• 2004

In order to discuss the availability of hydrostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resolution of 0.01 ${\mu}{\textrm}{m}$ are used as the feeding system. The experiments are performed on the static stuffiness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway has the infinite axial stillness within 50 N of applied load, and by the motion error compensation method using the Active Controlled Capillary, 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error are acquired. The guideway also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 0.01 ${\mu}{\textrm}{m}$ resolution step command. The velocity variation of feeding system is less than 0.6 %. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful fur the ultra precision machine tools.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.10a
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• pp.36-40
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• 2003

In order to discuss the availability of aerostatic guideways driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156N and a laser scale with the resolution of $0.01\mu\textrm{m}$ are used as the feeding system. The experiments are performed on the static stiffness, motion accuracy, positioning accuracy, microstep response and variation of velocity. The guideway also has $0.21\mu\textrm{m}$ of positioning error and $0.09\mu\textrm{m}$ of repeatability, and it shows the stable response against the $0.01\mu\textrm{m}$ resolution step command. The velocity variation of feeding system is less than 0.6%. From these results, it is confirmed that the aerostatic guideway driven by the coreless linear motion is very useful for the ultra precision machine tools.

• Journal of Advanced Marine Engineering and Technology
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• v.33 no.7
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• pp.1060-1067
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• 2009

The authors have proposed a linear motor driven container crane system, in which the linear motor to drive trolley chassis is also used to control swaying motion of a hanging container. To utilize the proposed system, it is needed to develop a power saving control system for the linear drive system. In this paper, an integrated control system to minimize required electric power to drive a trolley chassis with the suppressed swaying motion of a hanged container, is proposed. The validity of the proposed control system is investigated by the simulation using Simulink.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.343-346
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• 2003

In order to discuss the availability of the hydrostatic guideway driven by the coreless linear motor to ultra precision machine tools, a prototype of guideway is designed and tested in this research. A coreless linear DC motor with the continuous force of 156 N and a laser scale with the resulution of 10 nm are used as the feeding system. The experiments are performed on the static stiffness. motion accuracy, positioning accuracy. microstep response and variation of velocity. The guideway has the infinite axial stiffness within 50 N of applied load, and has 0.08 ${\mu}{\textrm}{m}$ of linear motion error and 0.1 arcsec of angular motion error. It also has 0.21 ${\mu}{\textrm}{m}$ of positioning error and 0.09 ${\mu}{\textrm}{m}$ of repeatability, and it shows the stable response against the 10 nm resolution step command. The velocity variation of feeding system is less than 5%. From these results, it is confirmed that the hydrostatic guideway driven by the coreless linear motor is very useful for the ultra precision machine tools.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.3
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• pp.40-45
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• 2008

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${\mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.

• International Journal of Precision Engineering and Manufacturing
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• v.7 no.2
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• pp.18-24
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• 2006

This paper proposes a LuGre Model-Based Neural Network (MBNN) friction compensation algorithm for a linear motor stage. For matching the friction phenomena in both the motion-start region and the motion-reverse region, the LuGre dynamic model is employed into the proposed compensation algorithm. After training of the model-based neural network is completed, the estimated friction for compensation is obtained. From the obtained result we find that the new structure gains advantage over the non-friction compensation system on the performance of the compensator in both regions. The proposed compensator is evaluated and compared experimentally with an uncompensated system on a microcomputer controlled linear motor tracking system in the final section of the paper. The experimental results show the improvement on the maximum velocity error and the root mean square tracking error in the motion-start region ranges from 34% to 53% and from 53% to 75% respectively, and in the motion-reverse region from 48% to 65% and from 79% to 90% respectively.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.16 no.6
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• pp.484-489
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• 2003

In this paper, a single phase driven piezoelectric motor design was presented for linear motion Two metal/ceramic composite actuators, a piezoelectric ring which was bonded to a metal endcap from one side, were used as the active elements of this motor. The motor was composed of a piezoelectric ceramic, a metal ring which has 4 arms, and a guider. Motors with 30 [mm] and 35 [mm] diameter were studied by finite element analysis and experiments. As results, the maximum speed of motor was obtained at resonance frequency. When the applied voltage of the motor increased, the speed was increased. Also, bidirectional motion of the motor was achieved by combining two motors which have different resonance frequency. But the characteristics of bidirectional motion were not equaled, because of the problem of reproduction on the fabrication and the experiment. If present motor is used at the auto-zoom device of a camera, it will have much advantage. Because the direct linear motion can be achieved with a simple structure of motor and no gearbox of total system.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.1380-1383
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• 2004

The scanning type XY stage is frequently used these days as precision positioning system in equipment for semiconductor or display element. It is requested higher velocity and more precise accuracy for higher productivity and measuring performance. The position accuracy of general stage is primarily affected by the geometric errors caused by parasitic motion of stage, misalignments such as perpendicular error, and thermal expansion of structure. In the case of scanning type stage, H type frame is usually used as base stage which is driven by two actuators such as linear motor. In the point view of scanning process, the stage is used in moving motion. Therefore, dynamic variation is added as significant position error source with other parasitic motion error. Because the scanning axis is driven by two actuators with two position detectors, 2 dimensional position errors have different characteristic compared to general tacked type XY stage. In this study 2D position error of scanning stage is analyzed by 1D heterodyne interferometer calibrator, which can measure 1D linear position error, straightness error, yaw error and pitch error, and perpendicular error. The 2D position error is evaluated by diagonal measurement (ISO230-6). The yaw error and perpendicular error are compensated on the base stage of scanning axis. And, the horizontal straightness error is compensated by cross axis compensation. And, dynamic motion error in scanning motion is analyzed.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.04a
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• pp.445-448
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• 2004

Linear motor is very rapidly substituted for rotary motor and ball screw for precision positioning applications because of its characteristics such as high speed, no backlash and simplicities. A precision positioning system which is composed of linear motion(LM) guide and linear motor is widely used since it has easy controllable property but this system has low accuracy problem caused by friction of the LM guide. In this study, a scanning type XY stage is manufactured and some experiments is performed to improve the accuracy of the stage.