• The Transactions of the Korean Institute of Electrical Engineers D
• /
• v.54 no.1
• /
• pp.33-39
• /
• 2005

In this paper, we propose a slider servo-mechanism driven by electro-magnetic actuator to improve straightness of linear motor stages. Based on axial-position dependent deterministic characteristics of the straightness error, a feedforward compensation control is appled to reduce the straightness error. In the consideration of uncertain properties of friction and its effects on positioning accuracy, a sliding mode control is applied. The effectiveness of the suggested mechanism and the control performances are illustrated along with some experimental results.

• Journal of the Semiconductor & Display Technology
• /
• v.19 no.4
• /
• pp.18-21
• /
• 2020

Undetected wafer slip during the lift pin-down motion in semiconductor equipment may affect the center to edge variation, wafer warpage, and pattern misalignment in plasma equipment. Direct measuring of the amount of wafer slip inside the plasma process chamber is not feasible because of the hardware space limitation inside the plasma chamber. In this paper, we demonstrated a practice for the wafer lift pin-up and down motions with respect to the gear ratio, operating voltage, and pulse width modulation to maintain accurate wafer position using remote control linear servo motor with an experimentally designed chamber mockup. We noticed that the pin moving velocity and gear ratio are the most influencing parameters to be control, and the step-wised position control algorithm showed the most suitable for the reduction of wafer slip.

• The Journal of the Korea institute of electronic communication sciences
• /
• v.17 no.5
• /
• pp.833-840
• /
• 2022

The precision of automation equipment and motors in factories is required, and global motor market has increased significantly. However, domestic motor technology lags behind foreign technology. In this thesis, the precision stability and efficiency were compared with a linear algorithm by applying a non-linear algorithm to a PLC servo motor and an Arduino step motor in order to improve the technology of the motor. The nonlinear algorithm was able to shorten the same driving reference time because the maximum speed of the motor was faster than the linear algorithm, and it was confirmed that the precision was improved due to the low curvature.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
• /
• 2000.04a
• /
• pp.291-296
• /
• 2000

Liner DC motors are widely used for servo-actuator, which would be applied for semiconductor equipments and precise machining systems. we have been developed linear DC motor with high speed, acceleration and position accuracy. From performance test, the position accuracy. From performance test, the position and repeatability accuracy were able to be controlled with 10 ${\mu}{\textrm}{m}$ and $\pm$1 ${\mu}{\textrm}{m}$, respectively. The highest acceleration and speed were obtained 3 G and 2m/sec, respectively. Static thrust force was 270N, and then error was 25%.

• Journal of Electrical Engineering and Technology
• /
• v.2 no.1
• /
• pp.50-54
• /
• 2007

In this paper, a dual-servo type VCM (Voice Coil Motor) for the measuring of nano-level displacement and small thrust is proposed and developed. The shape of VCM for improving the resolution of displacement and ensuring a large displacement are presented. The FEM (finite element method) is utilized to analyze the characteristics of VCM that produces linear driving thrust and satisfies the thrust that the measurement system requires. The Prototype is fabricated and an experiment is performed in order to measure displacement. As a result of simulation and testing, the proposed VCM shows the applicable possibility for a nano-level measurement system.

• The Transactions of the Korean Institute of Power Electronics
• /
• v.9 no.6
• /
• pp.553-559
• /
• 2004

The servo motor is used for the driving power source of the conventional linear conveyor system. The mechanical power transfer system is needed for converting the circular to the linear operation. But this system causes some problems of position error, the necessity of the periodical maintenance. In this paper the study on application of transverse flux linear motor(TFLM) is carried out for the indexer system of LCD processing because TFLM has much thrust per a volume than the conventional motor. TFLM is suitable system for the indexer system because of capacity of acceleration, maximum speed and precision of the position, etc.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
• /
• 2007.10a
• /
• pp.897-900
• /
• 2007

This paper presents a study on the DSP controller and IGBT inverter driver design for the power-by-wire(PBW) system using BLDC servo motor. This BLDC servo motor system was realized with DSP(Digital Signal Processor) and IGBT inveter module. The PBW system needs speed control of servo motor for linear thrust action. This paper implements a servo controller with vector control and min-max PWM technique. As CPU of controller, TMS320F2812 DSP was adopted because it has PWM(Pulse Width Modulation) waveform generator, A/D(Analog to Digital) converter, SPI( Serial Peripheral Interface) port and many input/output port etc.

• The Transactions of the Korean Institute of Power Electronics
• /
• v.11 no.2
• /
• pp.159-163
• /
• 2006

In order to tune the speed controller in the linear servo applications an accurate information of a mover mass including a load mass is always required. This paper suggests the mass estimation method of a permanent magnet linear synchronous motor(PMLSM) 4y using the parameter estimation method of Least-Squares algorithm. First, the deterministic autoregressive moving average(DARMA) model of the mechanical dynamic system is derived. Then the application of the Least-Squares algorithm shows that the mass can be accurately estimated both in the simulation results and in the experimental results.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2000.11a
• /
• pp.993-996
• /
• 2000

A brushless linear motor is suitable for a high-accuracy servo mechanism. It is also suitable for operation with higher speed and precision. Since it does not involve some sort of mechanical coupling, linear driving force can be applied directly. Basic models including magetomotive force and electromotive forces are introduced and simplified. Both conventional PID and fuzzy controllers are implemented and performance results using those controllers are compared. Along with better simulated performance observed using fuzzy controller, further fabrication is to be included with various empirical results. Several system operational characteristics have been observed. Typical nonlinearities as friction, cogging and torque or thrust ripple that might deteriorate system performance would be tackled using presumably effective method such as neural network based learning controller.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2000.05a
• /
• pp.973-976
• /
• 2000

A brushless linear motor is suitalbe fur a high-accuracy servo mechanism. It is also suitable for operation with higher speed and precision. Since it does not involve some sort of mechanical coupling, linear driving force can be applied directly. Basic models including magetomotive farce and electromotive forces are introduced and simplified. Both conventional PID and fuzzy controllers are implemented and performance results using those controllers are compared. Along with better simulated performance observed using fuzzy controller, further fabrication is to be included with various empirical results. Typical nonlinearities as friction, cogging and torque or thrust ripple that might deteriorate system performance would be tackled using presumably effective method such as neural network based learning controller.