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http://dx.doi.org/10.5370/JEET.2007.2.1.050

A Dual-Servo Type VCM for a Nano-Level Measurement System  

Yoo, Yong-Min (Compressor R&D group, Compressor team, Samsung Gwangju Electronics)
Kwon, Byung-Il (Dept. of Electrical Engineering, Hanyang University)
Publication Information
Journal of Electrical Engineering and Technology / v.2, no.1, 2007 , pp. 50-54 More about this Journal
Abstract
In this paper, a dual-servo type VCM (Voice Coil Motor) for the measuring of nano-level displacement and small thrust is proposed and developed. The shape of VCM for improving the resolution of displacement and ensuring a large displacement are presented. The FEM (finite element method) is utilized to analyze the characteristics of VCM that produces linear driving thrust and satisfies the thrust that the measurement system requires. The Prototype is fabricated and an experiment is performed in order to measure displacement. As a result of simulation and testing, the proposed VCM shows the applicable possibility for a nano-level measurement system.
Keywords
Dual-servo; Finite element analysis; Measurement system; Voice coil motor;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
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