Position Control of Wafer Lift Pin for the Reduction of Wafer Slip in Semiconductor Process Chamber |
Koo, Yoon Sung
(Department of Electronic Engineering, Myongji University)
Song, Wan Soo (Department of Electronic Engineering, Myongji University) Park, Byeong Gyu (Semiconductor Equipment Engineering Interdisciplinary Program, Myongji University) Ahn, Min Gyu (Semiconductor Equipment Engineering Interdisciplinary Program, Myongji University) Hong, Sang Jeen (Department of Electronic Engineering, Myongji University) |
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