• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2001년도 춘계학술대회 논문집 반도체재료
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• pp.30-33
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• 2001

Chemical mechanical polishing(CMP) process has been widely used to planarize dielectrics, which can apply to employed in integrated circuits for sub-micron technology. Despite the increased use of CMP process, it is difficult to accomplish the global planarization of free-defects in inter-level dielectrics (ILD). Especially, defects like micro-scratch lead to severe circuit failure, and affects yield. CMP slurries can contain particles exceeding $1{\mu}m$ size, which could cause micro-scratch on the wafer surface. The large particles in these slurries may be caused by particle agglomeration in slurry supply line. To reduce these defects, slurry filtration method has been recommended in oxide CMP. In this work, we have studied the effects of filtration and the defect trend as a function of polished wafer count using various filters in inter-metal dielectric(IMD)-CMP. The filter installation in CMP polisher could reduce defect after IMD-CMP. As a result of micro-scratches formation, it shows that slurry filter plays an important role in determining consumable pad lifetime.

• 혜화의학회지
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• 제28권2호
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• pp.41-47
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• 2019

Objectives : Atopic dermatitis is an irritable skin disease accompanying rash and itching leading to impaired skin barrier. ATO-ALL is an ethanol extract of natural products comprising 12 herbs and effective on atopic dermatitis. In this study, we aimed to propose that the effect of ATO-ALL on skin regeneration in human keratinocyte cell line, HaCaT cells. Methods : To evaluate the skin regenerating effects of ATO-ALL, scratch wound healing assay, bromodeoxyuridine (BrdU) assay, and propidum iodide (PI) assay were performed using cultured HaCaT cell line. Result : Scratch wound healing assay showed that ATO-ALL was able to enhance the gap filling activity more than 2-fold at 7 ppm concentration compared with control group. BrdU assay demonstrated that ATO-ALL treatment increased the de novo cell proliferation in a dose-dependent manner. Finally, PI assay indicated that the cell cycle of HaCaT cells was modulated by ATO-ALL treatment. Conclusions : These results suggested that ATO-ALL may have skin regenerating effects by increasing cell proliferation via cell cycle regulation. Taken together, ATO-ALL is supposed to have a potential on regeneration of damaged skin or functional disease including atopic dermatitis.

• 융복합기술연구소 논문집
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• 제6권1호
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• pp.23-26
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• 2016

DC motor shafts have several defects such as double cut, deep scratch on surface, and defects in diameter and length. The deep scratches are due to collision among the other shafts. So the scratches are long and thin but their orientations are random. If the smallest enclosing box, i.e. oriented bounding box for a detective point group is found, then the size of the corresponding defect can be modeled as its diagonal length. This paper proposes an suface inspection algorithm for the DC motor shaft using the oriented bounding box. To evaluate the proposed algorithm, a test bed is made with a line scan CCD camera (4096 pixels/line) and two rollers mechanism to rotate the shaft. The experimental result on a pre-processed image with contrast streching algorithm, shows that the proposed algorithm sucessfully finds 150 surface defects and its computation time (0.291 msec) is enough fast for the requirement (4 seconds).

• 컴퓨터교육학회논문지
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• 제21권4호
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• pp.1-10
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• 2018

초중등 프로그래밍 교육에서 Scratch로 대변되는 블록 프로그래밍 환경은 학습자의 특성과 인지수준에 적합하여 활용이 권장되고 있을 뿐 아니라 프로그래밍 초보자도 쉽게 사용할 수 있어 전세계적으로 활용되고 있다. 블록 프로그래밍 환경 이후 데이터 처리과정에 대한 이해, 알고리즘의 정교성과 효율성 측면에 대한 이해, 간단한 SW를 제작하는 활동을 위해 텍스트 프로그래밍 환경으로의 전이는 필수적일뿐 아니라 교육과정에서도 단계적으로 제시하고 있다. 본 연구에서는 블록 프로그래밍 환경에서 텍스트 프로그래밍 환경으로 전이하기 위한 목적으로 온라인 평가 시스템인 WithBlock를 개발하였다. 개발한 시스템은 동일한 알고리즘 문제를 블록과 텍스트 프로그래밍 환경 모두에서 풀이가 가능할 뿐 아니라 작성한 코드를 자동으로 채점하여 즉시적인 피드백을 제공할 수 있어 초중등 프로그래밍 교육에 활용할 수 있다. 개발한 시스템의 프로그래밍 교육에 적용 가능성을 분석하기 위한 목적으로 사용성, 학습 가능성, 흥미와 만족을 설문하였고, 설문결과 프로그래밍 교육에 활용 가능함을 보여주었다.

• 한국정밀공학회지
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• 제17권2호
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• pp.211-219
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• 2000

This paper simulated surface grinding process with statistically simulated grinding wheel topography, considering ridge formation phenomenon when grain scratch workpiece. Wheel grain is modeled as hybrid sphere and cone. Grinding wheel characteristic was evaluated with stylus by expanding the scanning region of the profilometer from a straight line to a plane. Each grain's diameter and semi-angle are assumed as normal distribution, each grain's protrusion height from wheel plane is assumed gamma distribution. So grinding wheel is simulated with grain's position randomly distributed without overlapping. Ground surface is 3-dimensionally simulated considering ridge formation of workpiece by each grain's cutting, and then surface profile and surface roughness parameters are compared with real ground workpiece.

• 한국정보과학회:학술대회논문집
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• 한국정보과학회 2007년도 한국컴퓨터종합학술대회논문집 Vol.34 No.1 (C)
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• pp.454-459
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• 2007

최근 다양한 형태의 멀티미디어의 확산과 영상에 대한 관심이 높아짐에 따라 필름 복원은 많은 사람들로부터 관심을 받고 있는 연구 분야다. 본 논문에서는 스크래치 텍스처 및 형태 특성을 이용하여 모든 종류의 스크래치를 자동으로 검출하고 복원 할 수 있는 방법을 제안한다. 제안된 방법은 손상된 필름에서 자주 발생되는 스크래치의 공간적인 정보를 이용하여 텍스처 분류기와 형태 필터링을 통해 스크래치를 검출 하고, 양선형 보간법을 사용하여 손상된 필름 영역을 주변 픽셀 값을 이용하여 스크래치를 제거 함으로써 영상을 복원한다. 본 논문에서 제안된 방법은 Kokaram의 논문에 제안된 방법보다 다양한 종류의 스크래치를 정확하게 인식하며, 적은 계산 비용임에도 불구하고 양선형 보간법은 스크래치 영역을 제거한다.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 춘계학술대회
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• pp.1296-1301
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• 2003

The chemical mechanical polishing(CMP) is necessarily applied to manufacturing the dielectric layer and metal line in the semiconductor device. The conditioning of polishing pad in CMP process additionally operates for maintaining the removal rate, within wafer non-uniformity, and wafer to wafer non-uniformity. But the fixed abrasive pad(FAP) using the hydrophilic polymer with abrasive that has the swelling characteristic by water owns the self-conditioning advantage as compared with the general CMP. FAP also takes advantage of planarity, resulting from decreasing pattern selectivity and defects such as dishing due to the reduction of abrasive concentration. This paper introduces the manufacturing technique of FAP. And the tungsten CMP using FAP achieved the good conclusion in point of the removal rate, non-uniformity, surface roughness, material selectivity, micro-scratch free contemporary with the pad life-time.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제55권4호
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• pp.166-171
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• 2006

In this paper, we have studied for analysis of the partial discharge(PD) signal in underground transmission line. The PD signal has estimated as detected signal accumulation of a PRPDA method by using Labview, and analyzed with fuzzy algorithm. In our algorithm, we developed system configuration that detected accumulating PD signal using by Labview and programmed fuzzy algorithm can be analyzed the PD signal using with Matlab. With practical PD logic implementation of theoretical detected system and hardware implementation, the device for Hipotronics Company's 50kV setup has generated and then has applied with $15k{\sim}17kV$ with 1:1 time probe. It's also used the LDPE 0.27mmt (scratch error 0.05mmt) to sample for making PD. In conclusion, Our new class of PD detected algorithm has also compared with previous PRPDA or Fuzzy algorithm. which has diagnose more conveniently by adding numerical values.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2005년도 추계학술대회 논문집
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• pp.182-185
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• 2005

Indentation pattern and line pattern were machined on borosilicate(Pyrex 7740 glass) surface using the combination of mechanical machining by $Nanoi-indenter\circledR$ XP and HF wet etching, and a etch-mask effect of the affected layer of the nano-scratched and indented Pyrex 7740 glass surface was investigated. In this study, effects of indentation and scratch process with etching time on the morphologies of the indented and scratched surfaces after isotropic etching were investigated from an angle of deformation energies.

• 한국정보과학회:학술대회논문집
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• 한국정보과학회 2005년도 가을 학술발표논문집 Vol.32 No.2 (2)
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• pp.868-870
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• 2005

스크래치는 오래된 필름에서 가장 많이 나타나는 손상 요인이다. 고화질의 멀티미디어 서비스를 제공하기 위해서는 이러한 스크래치들은 반드시 검출 및 복원되어야 한다. 이러한 중요성 때문에 지금까지 많은 복원 알고리즘이 개발되어 왔으나, 스크래치 영역의 자동검출에 대한 연구는 거의 이루어지지 않은 실정이다. 따라서 본 논문에서는 자동으로 스크래치영역을 추출할 수 있는 신경망 기반의 검출 방법을 제안한다. 다층 퍼셉트론 (Multi-layer perceptron: MLP)을 이용하여 스크래치영역과 비 스크래치영역을 구분하는데, 이 MLP는 다양한 크기의 스크래치를 검출하기 위해 다양한 크기의 입력 영상에 대해 적용된다. 제안된 방법의 평가를 위해 principal/ secondary 스크래치, alone/not-alone 스크래치, moving/static 스크래치등의 다양한 종류의 스크래치를 가진 영상에 대해 실험이 이루어졌고, 그 결과 제안된 방법의 강건함과 효율성을 입증되었다.