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Research Trends on Chemical Mechanical Polishing Using Ultraviolet Light (자외선 광을 활용하는 화학기계적 연마에 관한 연구 동향)

  • Lee, Hyunseop
    • Tribology and Lubricants
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    • v.38 no.6
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    • pp.247-254
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    • 2022
  • Chemical mechanical polishing (CMP) is a hybrid surface-polishing process that utilizes both mechanical and chemical energy. However, the recently emerging semiconductor substrate and thin film materials are challenging to process using the existing CMP. Therefore, previous researchers have conducted studies to increase the material removal rate (MRR) of CMP. Most materials studied to improve MRR have high hardness and chemical stability. Methods for enhancing the material removal efficiency of CMP include additional provision of electric, thermal, light, mechanical, and chemical energies. This study aims to introduce research trends on CMP using ultraviolet (UV) light to these methods to improve the material removal efficiency of CMP. This method, photocatalysis-assisted chemical mechanical polishing (PCMP), utilizes photocatalytic oxidation using UV light. In this study, the target materials of the PCMP application include SiC, GaN, GaAs, and Ru. This study explains the photocatalytic reaction, which is the basic principle of PCMP, and reviews studies on PCMP according to materials. Additionally, the researchers classified the PCMP system used in existing studies and presented the course for further investigation of PCMP. This study aims to aid in understanding PCMP and set the direction of future research. Lastly, since there have not been many studies on the tribology characteristics in PCMP, research on this is expected to be required.

A Study on Display Data of Radiation Point at 3 Dimensions (3차원 공간상 방사선원 위치 정보 표현에 관한 연구)

  • Lee, Seung-Min;Lee, Heung-Ho
    • The Transactions of The Korean Institute of Electrical Engineers
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    • v.56 no.6
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    • pp.1130-1132
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    • 2007
  • In this research, 3D position exploring system was developed to detect direction and position of radiation source by using two general CCD camera. This system consists of a radiation detection device, a controlling device, and a monitoring device. A radiation detection device is composed of a collimator, a scintillator, CCD sensor, and radiation shielding part. Incident radiation is firstly collimated with direction and converted into visual lights in a scintillator. The CCD sensor detect the converted visual light and send a signal as an image. This can explore a radiation source with direction and distance from geometrical structure of two sensors. From these information, the developed 3D position exploring system can provide 3D radiation source information. This research will be useful for managing and processing radioactive materials in remote.

Intelligent robotic walker with actively controlled human interaction

  • Weon, Ihn-Sik;Lee, Soon-Geul
    • ETRI Journal
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    • v.40 no.4
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    • pp.522-530
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    • 2018
  • In this study, we developed a robotic walker that actively controls its speed and direction of movement according to the user's gait intention. Sensor fusion between a low-cost light detection and ranging (LiDAR) sensor and inertia measurement units (IMUs) helps determine the user's gait intention. The LiDAR determines the walking direction by detecting both knees, and the IMUs attached on each foot obtain the angular rate of the gait. The user's gait intention is given as the directional angle and the speed of movement. The two motors in the robotic walker are controlled with these two variables, which represent the user's gait intention. The estimated direction angle is verified by comparison with a Kinect sensor that detects the centroid trajectory of both the user's feet. We validated the robotic walker with an experiment by controlling it using the estimated gait intention.

Fatigue Analysis for Fiber Right Angle Direction of FRP Deck (FRP 바닥판의 섬유직각 방향에 대한 피로해석)

  • Kim, Doo-Hwan
    • Journal of the Korean Society of Safety
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    • v.29 no.6
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    • pp.81-86
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    • 2014
  • Composite materials have high specific stiffness, specific strength than existing concrete or steel materials. It has superior dynamic properties when utilizing advantages of material such as Non-corrosive, light weight, non-conducting and it has superior mold ability which can make variable shapes. Thus, in the construction, for using composite materials as construction materials, the study carried out static strength of fiber right angle direction and fatigue performance of FRP deck member. The study is going to deduct S-N curve by analyzing the results comparatively and estimate long-term durability. From now on, the study is going to provide interpretation of FRP member and basic data of design basis, furthermore providing foundation technique of composite materials' application of structural frame is the goal of this study.

A Study on the Location Characteristics in Rural Area of Valley Category ('곡'(谷)계 지명 농촌마을의 입지 특성에 관한 연구 -충청북도 괴산군을 대상으로-)

  • Roh, Seon-Hwa;Moon, Byung-Sun;Kim, Tai-Young
    • Journal of the Korean Institute of Rural Architecture
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    • v.9 no.2
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    • pp.103-111
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    • 2007
  • After researching 154 rural areas named 'valley' in Goesan County, Chungbuk Province, they are classified by 2 two classes. Firstly, villages located on the crossways valley are 109 of 154, they are located on the valley which is at right angles with a direction of light of a mountain range. A closed valley location is placed in the deep valley against a background mountain range. It is divided with closed large valley and small valley. Secondly, an open valley location style is 45 of 154. It means the villages are paralleled with a direction of mountain and located with same direction of entrance.

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Study on Extraction of the Center Point of Steam Generator Tubes (증기발생기 세관의 중심좌표추출에 대한 연구)

  • 조재완;김창회;서용칠;최영수;김승호
    • Proceedings of the IEEK Conference
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    • 2002.06d
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    • pp.263-266
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    • 2002
  • This paper describes extraction procedure for the center coordinates of steam generator tubes of Youngkwang NPP #6, which are arrayed in triangular patterns. Steam generator tube images taken with wide field-of-view lens and low-light lamp mounted on a ccd camera tend to have low contrast, because steam generator is sealed and poorly illuminated. The extraction procedures consists of two steps. The first step is to process the region with superior contrast in entire image of steam generator tubes and to extract the center points. Using the extracted coordinates in the first step and the geometrical array characteristics of tubes lined up in regular triangle forms, the central points of the rest region with low contrast are estimated. The straight lines from center point of a tube to neighbour points in horizontal and 60, 120$^{\circ}$ degree directions are derived. The intersections of straight line In horizontal direction and slant line in regular triangle direction are selected as the center coordinates of steam generator tubes. The Chi-square interpolation method is used to determine the line's coefficients in horizontal and regular triangle direction.

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New Photoreactive Materials Having Chalcone Units: Synthesis and Photoalignment of Nematic Liquid Crystals

  • Lee, Won-Joo;Lim, Ji-Chul;Paek, Sang-Hyon;Kigook Song;Chang, Ji-Young
    • Macromolecular Research
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    • v.9 no.6
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    • pp.339-344
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    • 2001
  • In order to investigate the photoalignment mechanism of nematic liquid crystals on a polymer film, a new photoreactive polymer having chalcone groups as side chains was synthesized. Linearly polarized UV light causes preferential photoreactions of the chalcone unit along the polarization direction and thus induces the anisotrpy in the polymer alignment layer resulting in homogeneous LC alignment perpendicular to the polarization direction. The sequential investigations of photoalignment generated by the preferential E/Z isomerization and (2+2) cycloaddition reactions show that either photoreaction can solely induce the LC alignment in the direction perpendicular to UV polarization.

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The real-time three-dimensional shape measurement by prism lens (프리즘 광학계를 이용한 실시간 삼차원 형상 측정)

  • Kim J.S.;Song C.K.;Joo B.K.;Hong J.H.
    • Proceedings of the Korean Society of Precision Engineering Conference
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    • 2005.10a
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    • pp.727-731
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    • 2005
  • We introduce a method of color-coded illumination that is simple and fast. The purpose of this study is the real-time shape measurement of three-dimensional object by using color-coded information. The object is illuminated by a prism color spectrum. A color spectrum of a white-light source is imaged onto the object by illumination from one certain direction. The object is observed by a color CCD camera from a direction of observation, which is different from the direction of illumination. It can be evaluated by the red, blue, green using a inherence colors of hue value are good point.

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A study on the Measurement of the Coefficient of Thermal Expansion of Polymer materials Exposed to Different Thermal Environments (서로 다른 열환경에 노출된 고분자 소재의 열팽창계수 측정에 관한 연구)

  • Kim, Dong-Ju;Park, Seul-Hyun
    • Journal of the Korean Society of Manufacturing Process Engineers
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    • v.20 no.4
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    • pp.80-86
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    • 2021
  • Plastics are widely used in mechanical and other fields due to their light weight, design flexibility, and molding processability. In processing plastics, defective products are mixed and reprocessed to improve production efficiency and reduce costs. In this study, an experiment was conducted to confirm the coefficient of thermal expansion of HDPE during this reprocessing. The coefficient of thermal expansion was measured at different measurement directions and heating rates. As a result, we observed that the coefficient of thermal expansion in the direction perpendicular to the injection direction is greater than that in the horizontal direction.