• 제목/요약/키워드: LiTaO$_3$

검색결과 154건 처리시간 0.022초

(Na,K,Li)(Nb,Sb,Ta)O3계 세라믹스의 소성시간이 압전특성에 미치는 영향 (Effect of Sintering Time on the Piezoelectric Properties of (Na,K,Li)(Nb,Sb,Ta)O3 Ceramics)

  • 김승원;류주현
    • 한국전기전자재료학회논문지
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    • 제30권4호
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    • pp.218-222
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    • 2017
  • In this paper, in order to develop excellent composition ceramics for a piezoelectric energy- harvesting device, we synthesized $0.99(Na_{0.52}\;K_{0.443}\;Li_{0.037})(Nb_{0.883}\;Sb_{0.08}\;Ta_{0.037})O_3$ + $0.01(Sr_{0.95}Ca_{0.05})TiO_3$ + $0.3\;wt%\;Bi_2O_3\;+\;0.3\;wt%\;Fe_2O_3\;+\;0.3\;wt%\;CuO$ (abbreviated as NKN-SCT) ceramics with different sintering times, using the ordinary solid-state reaction method. The effect of sintering time on the microstructure and piezoelectric properties was investigated. The ceramics with the sintering time of 7 h have the optimum values of the piezoelectric constant ($d_{33}$), piezoelectric voltage constant ($g_{33}$), planar piezoelectric coupling coefficient (kp), mechanical quality factor (Qm), and dielectric constant (${\varepsilon}r$): $d_{33}=314[pC/N]$, $g_{33}=20.07[10^{-3}mV/N]$, kp = 0.442, Qm = 93, ${\varepsilon}r=1,768$, all being suitable for a piezoelectric energy-harvesting device.

Na2CO3 첨가에 따른 (Na0.5K0.5)NbO3-LiTaO3 세라믹스의 압전 특성 (Effect of Na2CO3 Addition on Piezoelectric Properties in (Na0.5K0.5)NbO3-LiTaO3 Ceramics)

  • 김민수;오석;이대수;박언철;정순종;송재성
    • 한국전기전자재료학회논문지
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    • 제19권11호
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    • pp.1025-1028
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    • 2006
  • Dense $0.95(Na_{0.5}K_{0.5})NbO_3-0.05LiTaO_3$ (NKN-5LT) ceramics were developed by conventional sintering process. Sintering temperature was lowered by adding $Na_2CO_3$ as a sintering aid. The electrical properties of NKN-5LT ceramics were investigated as a function of $Na_2CO_3$ concentration. When the sample sintered at $1000^{\circ}C$ for 4 h with the addition of 1 mol% $Na_2CO_3$, electro-mechanical coupling factor $(k_p)$ and piezoelectric coefficient $(d_{33})$ of NKN-5LT ceramics were found to reach the highest values of 0.43 and 190 pC/N, respectively.

Lithium Tantalate (LiTaO3) 웨이퍼의 CMP에 관한 연구 (A Study on the CMP of Lithium Tantalate Wafer)

  • 이현섭;박범영;서헌덕;장원문;정해도
    • 대한기계학회논문집A
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    • 제29권9호
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    • pp.1276-1281
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    • 2005
  • Compound semiconductors are the semiconductors composed of more than two chemical elements. Lithium Tantalate$K_I$ wafer is used for several optical devices, especially surface acoustic wave(SAW) device. Because of the lithography in SAW device process, $LiTaO_3$ polishing is needed. In this paper, the commercial slurries $(NALC02371^{TM},\; ILD1300^{TM},\;ceria slurry)$ used for chemical mechanical polishing(CMP) were tested, and the most suitable slurry was selected by measuring material removal rate and average centerline roughness$(R_a)$. From these result, it was proven that $ILD1300^{TM}$ was the most suitable slurry for $LiTaO_3$ wafer CMP due to the chemical reaction between solution in slurry and material.

SnO2가 첨가된 저온소결 (Na,K,Li)(Nb,Sb,Ta)O3계 세라믹스의 유전 및 압전 특성 (Dielectric and Piezoelectric Properties of Low Temperature Sintering (Na,K,Li)(Nb,Sb,Ta)O3 Ceramics Doped with SnO2)

  • 이광민;류주현;이지영
    • 한국전기전자재료학회논문지
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    • 제28권11호
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    • pp.690-693
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    • 2015
  • In this paper, in order to develop excellent Pb-free composition ceramics for ultrasonic sensor. The $SnO_2$-doped ($Na_{0.525}K_{0.443}Li_{0.037})(Nb_{0.883}Sb_{0.08}Ta_{0.037})O_3$)(abbreviated as NKL-NST) ceramics have been synthesized using the ordinary solid state reaction method. The effect of $SnO_2$-doping on their dielectric and piezoelectric properties was investigated. The ceramics doped with 0 wt% $SnO_2$ have the optimum values of piezoelectric constant($d_{33}$), piezoelectric figure of merit($d_{33}.g_{33}$), planar piezoelectric coupling coefficient($k_p$) and density : $d_{33}=195[pC/N]$, $d_{33}.g_{33}=5.62pm^2/N.kp=0.40$, $density=4.436[g/cm^3]$. suitable for duplex ultrasonic sensor application.

Ta 치환이 (Li0.04(Na0.54K0.46)0.96(Nb0.96-xTaxSb0.04)O3 세라믹스의 유전 및 압전 특성에 미치는 영향 (Effect of Ta Substitution on the Dielectric and Piezoelectric Properties of (Li0.04(Na0.54K0.46)0.96(Nb0.96-xTaxSb0.04)O3Ceramics)

  • 노정래;류주현
    • 한국전기전자재료학회논문지
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    • 제24권8호
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    • pp.627-631
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    • 2011
  • [ $[Li_{0.04}(Na_{0.54}K_{0.46})_{0.96}](Nb_{1-0.04-X}TaxSb_{0.04})O_3$ ]lead-free piezoelectric ceramics have been prepared by normal sintering at $1,100^{\circ}C$ for 5 h. X-ray diffraction analysis indicated that specimens demonstrate orthorhombic symmetry when $Ta\leq5$ mol%. While transforming into tetragonal symmetry when $x\geq20$ mol%. These suggest that the orthorhombic and tetragonal phases co-exist in the ceramics with 5 mol% $cm^3$. As the result of SEM images, the grain growth was decreased with the increase of Ta substitution. The ceramics become 'softening', leading to improvements in $k_p$, $\varepsilon_r$ and $d_{33}$, but a decrease in $Q_m$. Excellent properties of $k_p$= 0.46, $d_{33}$= 293 pC/N, ${\varepsilon}_r$= 1,583 and Tc= $340^{\circ}C$ were obtained when Ta= 15 mol%.

소성 온도가 (Na,K,Li)(Nb,Sb,Ta)O3 세라믹스의 유전 및 압전 특성에 미치는 영향 (Effect of Sintering Temperature on the Dielectric and Piezoelectric Properties of (Na,K,Li)(Nb,Sb,Ta)O3 Ceramics)

  • 김유석;류주현;홍재일;이지영
    • 한국전기전자재료학회논문지
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    • 제26권11호
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    • pp.806-809
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    • 2013
  • In this study, $(Na_{0.525}K_{0.443}Li_{0.037})(Nb_{0.883}Sb_{0.08}Ta_{0.037})O_3+0.10\;wt%Bi_2O_3+0.35\;wt%B_2O_3$ ceramics were prepared by conventional soild-state sintering process. The specimens were sintered at temperature range from $1,060^{\circ}C$ to $1,100^{\circ}C$. XRD (X-ray diffractron), SEM (scanning electron microscope) were used to analyze the crystal structure and microstructural sproperties of specimens. And also, $T_{O-T}$, TC were observed by the mesurement of temperature dependence of dielectric constant. Excellect physical properties of the piezoelectric constant $d_{33}$= 170 pC/N, electromechanical coupling factor kp= 0.312, Tc= $315^{\circ}C$ were obtained, respectively, from the specimen sintered at $1,080^{\circ}C$.

Columbite법으로 제조된 (Na,K,Li)(Nb,Ta,Sb)O3 세라믹스의 하소온도에 따른 유전 및 압전 특성 (Dielectric and Piezoelectric Properties of (Na,K,Li)(Nb,Ta,Sb)O3 Ceramics Manufactured Using Columbite Methods with Calcination Temperature)

  • 라철민;류주현
    • 한국전기전자재료학회논문지
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    • 제29권3호
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    • pp.159-163
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    • 2016
  • In this paper, in order to develop optimum composition ceramics with excellent piezoelectric properties, $(Na_{0.525}K_{0.443}Li_{0.037})(Nb_{0.823}Sb_{0.08}Ta_{0.037})O_3+0.3wt%Bi_2O_3+0.4wt%Fe_2O_3$ lead-free piezoelectric ceramics were synthesized by conventional soild-state method. The calcination temperature of columbite precursors were fabricated at temperature range from $950^{\circ}C$ to $1,150^{\circ}C$ and sintering aids with low melting point were added to densify these ceramics. Effect of calcination temperature on dielectric and piezoelectric properties of ceramics were investigated. the ceramics with B-site columbite precursors at temperature of $1,100^{\circ}C$ obtained the optimal values of $d_{33}=272$ [pC/N], $k_p=0.51$, $Q_m=102$, ${\varepsilon}_r=978$.

주석-슬랙 중 $Ta_2O_5, Nb_2O_5, TiO_2, SnO_2$, 및 $ZrO_2$의 X-선 형광분석 (X-Ray Fluorescence Analysis of $Ta_2O_5, Nb_2O_5, TiO_2, SnO_2$ and $Zr_O2$ in Tin-Slags)

  • 김영상;이종욱
    • 대한화학회지
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    • 제27권4호
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    • pp.273-278
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    • 1983
  • 합성표준시료를 이용하여 주석슬랙 중 유가금속들인 $Ta_2O_5, Nb_2O_5, TiO_2, SnO_2 $$ZrO_2$를 X-선형광분광법으로 정량하였다. 분석시료와 표준시료분말들을 융제인 무수 $Li_2B_4O_7$$La_2O_3$를 무게비 15:42:3의 비율로 균일하게 혼합한다. 혼합분말을 $1,150^{\circ}C$에서 30분간 용융하여 유리구슬을 만든다. 이 구슬을 325메쉬 이하로 분쇄하여 수압기를 이용 pellet으로 만들어 시편으로 사용한다. 분석결과들은 다른 분석법에 의해 얻은 값들과 허용오차 범위내에서 잘 일치한다. 또 PTS-H시료에 대한 표준편차가 함량 3.40 %에서 0.12 %로 재현성도 좋음을 보여 주었다.

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필터와 레죠네이터 응용을 위한 $La_3Ga_5SiO_{14}$ 의 결정화학 및 성장 (Crystal chemistry and growth of$La_3Ga_5SiO_{14}$ for the applications of filter and resonator)

  • 정일형;주경;심광보;오근호
    • 한국결정성장학회지
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    • 제9권1호
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    • pp.74-79
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    • 1999
  • Langasite($La_3Ga_5SiO_14$)는 acoustic 특성에서 quartz, $LiTaO_3$$LiNbO_3$에 비교되는 새로운 압전재료이다. 본 연구에서는 새로운 Langasite 계열의 물질을 공기 중에서 고상반응법에 의해 합성하였고, 합성공정에서의 주요 확산종 을 조사하였다. 이때 합성된 물질의 소결체를 제조하여 각각의 유전적 성질을 비교평가하였다. 또한, Langasite 단결정 을 자체제작한 Czochralski 시스댐을 사용하여 성장시키는데 성공하였고, 성장된 결정의 물성을 평가하였다

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