• 한국공작기계학회논문집
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• 제14권4호
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• pp.89-95
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• 2005

This paper intends to identify experimentally the relationship between transverse vibration behavior of a spinning disk and high-frequency fluctuation in the driving torque. A testrig has been developed using a CD-ROM disk, a driving motor with torque-varying capability and a power transmission belt and a laser vibrometer was employed to measure the transverse vibration displacements of the disk for a certain range of the spinning speed. The results show that the spinning speed and the magnitude and frequency of the torque fluctuation affect the stability of the disk. In other word, the torque fluctuation causes the instability of the disk at several ranges of the spinning speed below the critical speed and its effects become larger as the disk spins faster or the magnitude of torque fluctuation becomes bigger. The experimental results are found to be in good agreement with analytical estimation.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2001년도 하계학술대회 논문집 D
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• pp.2519-2521
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• 2001

This paper presents an auxilary beam-assisted adaptive compensation technique applied to alleviate the problem of LDV's body vibration. The LMS algorithm is applied to adaptively compensate the body vibration utilizing the reference signal provided by the auxiliary beam. The usefulness of the proposed technique is verified computer simulations performed for diverse types of target signals and body vibration.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제53권2호
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• pp.116-122
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• 2004

A micromachined self-exited piezoelectric cantilever has been fabricated using PZT(52/48) thin film. For the application to biosensor using antigen-antibody interaction, electromechanical properties such as resonant frequency and quality factor of micromachined piezoelectric cantilever were important factors. Electromechanical properties and resonant behaviors of microfabricated cantilever were simulated by FEA (Finite Element Analysis) using Coventorware$^{TM}$2003. And these characterization of microcantilever were measured by using LDV(Laser Doppler Vibrometer) to compare with FEA data. We present the resonant frequency shift of micromachined piezoelectric cantilevers due to combination of mass loading and change of spring constant by gold deposition. Experimental mass sensitivities of microcantilever were characterized by Au deposition on the backside of microcantilever. Mass sensitivities with $100{\times}300$ ${\mu}{\textrm}{m}$ dimension cantilever from simulation and experimental were 5.56 Hz/ng and 16.8 Hz/ng respectively.y.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3295-3297
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• 1999

This paper presents the fabrication of an electromagnetic micro actuator consisting of a Parylene diaphragm with a spiral copper coil and a permanent magnet. The copper coil is fabricated by electroplating and patterning. The frequency response of the actuator are obtained using a laser vibrometer. When the input voltage is 3 V, the DC deflection is 5 ${\mu}m$, and the resonance frequency is about 35 Hz. Also, the mechanical sensitivity of the actuator diaphragm is 69 ${\mu}m/V$.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3328-3330
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• 1999

In this paper, the fabrication of a micro actuator with a micro electromagnet and an actuator diaphragm is presented. The micro electromagnet consists of a magnetic core and a micro inductive planar coil. The actuator diaphragm is the p+ silicon diaphragm on both sides of which magnetostrictive materials are deposited by sputtering. The micro electromagnet is fabricated by sputtering, evaporating, etching and electroplating. The magnetic flux density of the micro electromagnet is measured by using the gauss meter. The deflection of the actuator diaphragm is measured by using the laser vibrometer and optic microscope.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2003년도 하계학술대회 논문집 C
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• pp.1424-1426
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• 2003

PMN-PZT 적충형 세라믹 액츄에이터 소자를 제작한후 그 열화 특성을 조사하였다. 액츄에이터는 tape casting 방법으로 green sheet를 제작한후, screen printing방법을 이용하여 전극형상을 만들고, lamination과 cutting공정을 통하여 소자를 제작하였다. 작된 소자의 구조적인 특성을 분석하기 위하여 X-ray diffractometer를 사용하였으며, Doppler effect를 사용하는 laser vibrometer를 이용하여 전압에 따른 변위량을 측정하였다. 제작된 소자의 열화 특성을 알아보기 위하여 60 Hz의 triangular 교류 파형을 적충형 세라믹 액츄에이터에 인가하여 열화전과 후의 P-E hysteresis loop의 변화를 살펴보았으며, unipolar AC 전압을 지속적으로 인가하여 소자를 depling 시킴으로써 열화현상을 관찰하였다. 파단면에 대한 SEM 분석을 통하여 소자의 파괴 메카니즘을 알아 보도록 하였다. 이로부터 전기적, 기계적 열화가 소자의 동작에 미치는 영향에 대해서 알아 보았다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2005년도 제36회 하계학술대회 논문집 C
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• pp.2372-2373
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• 2005

The design of a piezoelectric actuator for micro droplet ejecting system has bee studied. The actuator has been evaluated by using commercial FEM package and its displacement are measured by LDV(Laser Doppler Vibrometer). The characteristics of the actuator are evaluated with varation in a ratio of width of PZT to that of membrane and thickness ratio of PZT to membrane.

• 센서학회지
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• 제18권3호
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• pp.207-209
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• 2009

This paper describes the characteristics of poly 3C-SiC micro resonators with $3{\times}10^{17}{\sim}1{\times}10^{19}cm^{-3}$ doping concentrations. The 1.2 ${\mu}m$ thick cantilever and the 0.4 ${\mu}m$ thick doubly clamped beam resonators with different lengths were fabricated using poly 3C-SiC thin films. The characteristics of poly 3C-SiC micro resonators were evaluated by quartz and a laser vibrometer in vacuum at room temperature. The resonant frequencies of micro resonators decreased with doping concentrations owing to reduction in the Young's modulus of poly 3C-SiC thin films. It was confirmed that the resonant frequencies of poly 3C-SiC resonators are controllable by doping concentrations. Therefore, poly 3C-SiC resonators could be applied to MEMS devices and bio/chemical sensor applications.

• 센서학회지
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• 제17권6호
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• pp.425-428
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• 2008

This paper describes the resonant characteristics of polycrystalline SiC micro resonators. The $1{\mu}m$ thick polycrystalline 3C-SiC cantilevers with different lengths were fabricated using a surface micromachining technique. Polycrystalline 3C-SiC micro resonators were actuated by piezoelectric element and their fundamental resonance was measured by a laser vibrometer in vacuum at room temperature. For the $100{\sim}40{\mu}m$ long cantilevers, the fundamental frequency appeared at $147.2kHz{\sim}856.3kHz$. The $100{\mu}m$ and $80{\mu}m$ long cantilevers have second mode resonant frequency at 857.5.kHz and 1.14.MHz, respectively. Therefore, polycrystalline 3C-SiC resonators are suitable for RF MEMS devices and bio/chemical sensor applications.

• 한국소음진동공학회:학술대회논문집
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• 한국소음진동공학회 2001년도 추계학술대회논문집 II
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• pp.1010-1014
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• 2001

A severe strip vibration in continuous galvanizing line facilities of the steel companies has sometimes occurred due to the exceeding wearing of the roll bush and bearing. This vibration brings on the lack of uniform coating thickness in steel plate. As a result, the total maintenance and product costs in this factory are increased by the shortage of operation time for the replacement of bush, bearings and these components. In this study, the vibration characteristics of this strip are investigated by the FEM using ANSYS. Also the vibration measurement of strip and its structure performed by the laser Doppler vibrometer(LDV) and accelerometers are compared to theoretical analysis results.