Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1999.07g
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- Pages.3295-3297
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- 1999
Fabrication of an Electromagnetic Actuator with the Planar Coil
평면 코일을 이용한 전자 구동기 제작
- Jeong, Hyun-Ku (School of Electronics Engineering Ajou University) ;
- Kwon, Ki-Young (School of Electronics Engineering Ajou University) ;
- Jeong, Ok-Chan (School of Electronics Engineering Ajou University) ;
- Yang, Sang-Sik (School of Electronics Engineering Ajou University)
- Published : 1999.07.19
Abstract
This paper presents the fabrication of an electromagnetic micro actuator consisting of a Parylene diaphragm with a spiral copper coil and a permanent magnet. The copper coil is fabricated by electroplating and patterning. The frequency response of the actuator are obtained using a laser vibrometer. When the input voltage is 3 V, the DC deflection is 5
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