Characterization of Electromechanical Properties and Mass Effect of PZT Microcantilever |
황교선
(고려대 공대 전자컴퓨터공학과)
이정훈 (연세대 공대 세라믹공학과) 박정호 (고려대 공대 전자컴퓨터공학과) 김태송 (한국과학기술연구원 마이크로시스템연구센터) |
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