• 한국융합학회논문지
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• 제11권7호
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• pp.157-162
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• 2020

최근 레이저를 이용하여 환원된 친환경 그래핀 패턴 기술(Laser Induced Graphene, LIG)은 간단하고 효율적으로 원하는 형태로 다양한 기판 위에 패터닝하는 것이 가능하여 신축 유연 전자 소자, 박막 형태의 에너지 저장 소자 등과 같이 새로운 친환경 전자 소자 제작에 많이 활용되고 있다. 이러한 그래핀 패턴 구조를 이용한 전자 소자의 성능과 효용성을 높이기 위해서는 그래핀 고유의 2차원 특성을 유지하면서 가능한 최소한의 선폭을 구현할 수 있는 최적화된 레이저 패터닝 조건에 대한 연구가 필수적이다. 본 논문에서는 최근 레이저 그래핀 패턴 연구에서 많이 사용되는 Ti:sapphire 펨토초 레이저를 이용해서 그래핀 광-열 산화반응을 분석하여 최적화된 그래핀의 최소선폭을 구현하였다. 레이저 에너지의 확산 효과를 최소화하기 위하여 레이저 광강도와 레이저 스캔 속도를 조절하여 최적의 그래핀 특성을 나타내는 패턴을 연구하였으며 18 ㎛의 집속된 빔을 이용하여 최소 30 ㎛의 이차원 그래핀 선폭을 구현하였다.

• 한국레이저가공학회지
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• 제15권4호
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• pp.1-5
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• 2012

We demonstrate that reduced graphene oxide (rGO) coated thin aluminum film is an effective optoacoustic transmitter for generating high pressure and high frequency ultrasound previously unattainable by other techniques. The rGO layer of different thickness is deposited between a 100 nm-thick aluminum film and a glass substrate. Under a pulsed laser excitation, the transmitter generates enhanced optoacoustic pressure of 64 times the aluminum-alone transmitter. A promising optoacoustic wave generation is possible by optimizing thermoelasticity of metal film and thermal conductivity of rGO in the proposed transmitter for laser-induced ultrasound (LIUS) applications.

• 한국산업융합학회 논문집
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• 제23권4_2호
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• pp.693-699
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• 2020

355nm UV pulse laser is irradiated on the surface of polyimide (PI) by LDW (Laser Direct Writing) method to produce a high sensitivity flexible humidity sensor using a simple one-step process. The LDW method continuously investigates 2-D CAD data using a galvano scanner and an F-lens. This method is non-contact, so it minimizes physical strain on the PI. Laser-induced graphene (LIG) produced by lasers has a high surface area due to its high flexibility and numerous pores and oxidizers compared to conductors. For this reason, it is highly useful as a flexible humidity sensor. The humidity sensor produced in this study was attached to the inside of a mask filter, which has become a hot topic recently, and its applicability was confirmed.The measurement of humidity measured the sensitivity, reactivity, stability and recovery behavior of the sensor by measuring changes in capacitance and resistance.

• 전기학회논문지
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• 제67권3호
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• pp.406-412
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• 2018

This paper describes the fabrication process of laser induced graphene (LIG) and its transfer method on to a flexible and stretchable PDMS substrate. By irradiating CO2 laser on a polyimide(PI) film surface, a localized high temperature is created, resulting in a three-dimensional porous graphene network structure with good conductivity. This LIG electrode is relatively easy to fabricate and since it is very weak the LIG electrode was transferred to a flexible PDMS substrate to increase the sturdiness as well as possible use in flexible applications. Sheet resistance, thickness, and electrochemical activity of the fabricated in-situ LIG electrodes have been examined and compared with the LIG electrodes after transferring to PDMS elastomer. The properties of the LIG electrodes were also examined depending on the $CO_2$ laser power. As the irradiated laser power increased, the LIG electrode resistance decreases and the LIG electrode thickness increased. At 4.8 W of laser power, the average sheet resistance and thickness of the fabricated LIG electrodes were approximately $31.7{\Omega}/{\Box}$ and $62.67{\mu}m$, respectively. Moreover, the electrochemical activity of the fabricated LIG electrode at 4.8 W of laser power showed a high oxidation current of $28.2{\mu}A$ after transferring to PDMS.

• 센서학회지
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• 제28권1호
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• pp.47-51
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• 2019

Sweat-based glucose sensors are being widely investigated and researched as they facilitate painless and continuous measurement. However, because the concentration of sweat glucose is almost a hundred times lower than that of blood glucose, it is important to develop electrochemical sensing electrode materials that are highly sensitive to glucose molecules for the detection of low concentrations of glucose. The preparation of a flexible and ultra-sensitive sensor for detection of sweat glucose is presented in this study. Oxygen and nitrogen are removed from the surface of a polyimide film by exposure to a CO2 laser; hence, laser-induced graphene (LIG) is formed. The fabricated LIG electrode showed favorable properties of high roughness and good stability, flexibility, and conductivity. After the laser scanning, Pt nanoparticles (PtNP) with good catalytic behavior were electrodeposited and the glucose sensor thus developed, with a LIG/PtNP hybrid electrode, exhibited a high order of sensitivity and detection limit for sweat glucose.

• Current Optics and Photonics
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• 제7권6호
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• pp.738-744
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• 2023

Graphene-based saturable absorbers (SAs) are widely used as laser mode-lockers at various laser oscillators. In particular, transmission-type graphene-SAs with ultrabroad spectral coverage are typically manufactured on transparent substrates with low nonlinearity to minimize the effects on the oscillators. Here, we developed two types of transmitting graphene SAs based on CaF₂ and ZnSe. Using the graphene-SA based on CaF₂, a passively mode-locked mid-infrared Cr:ZnS laser delivers relatively long 540 fs pulses with a maximum output power of up to 760 mW. In the negative net cavity dispersion regime, the pulse width was not reduced further by inhomogeneous group delay dispersion (GDD) compensation. In the same laser cavity, we replaced only the graphene-SA based on CaF₂ with the SA based on ZnSe. Due to the additional self-phase modulation effect induced by the ZnSe substrate with high nonlinearity, the stably mode-locked Cr:ZnS laser produced Fourier transform-limited ~130 fs near 2,340 nm. In the stable single-pulse operation regime, average output powers up to 635 mW at 234 MHz repetition rates were achieved. To our knowledge, this is the first attempt to achieve shorter pulse widths from a polycrystalline Cr:ZnS laser by utilizing the graphene deposited on the substrate with high nonlinearity.

• 전기학회논문지
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• 제67권3호
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• pp.413-418
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• 2018

In this paper, we describe the development of a non-enzymatic glucose sensor based on copper nanocubes(Cu NCs) electroplated laser induced graphene(LIG) electrodes which can detect a certain range of glucose concentrations. $CO_2$ laser equipment was used to form LIG electrodes on the PI film. This fabrication method allows easy control of the LIG electrode size and shape. The Cu NCs were electrochemically deposited on the LIG electrodes to improve electron transfer rates and thus enhancing electrocatalytic reaction with glucose. The average sheet resistances before and after electroplating were $15.6{\Omega}/{\Box}$ and $19.6{\Omega}/{\Box}$, respectively, which confirmed that copper nanocubes were formed on the laser induced graphene electrodes. The prepared electrode was used to measure the current according to glucose concentration using an electrochemical method. The LIG electrodes with Cu NCs demonstrated a high degree of sensitivity ($1643.31{\mu}A/mM{\cdot}cm^2$), good stability with a linear response to glucose ranging from 0.05 mM to 1 mM concentration, and a limit of detection of 0.05 mM. In order to verify that these electrodes can be used as flexible devices, the electrodes were bent to $30^{\circ}$, $90^{\circ}$, and $180^{\circ}$ and cyclic voltammetry measurements were taken while the electrodes were bent. The measured data showed that the peak voltage was almost constant at 0.42 V and the signal was stable even in the flexed condition. Therefore, it is concluded that these electrodes can be used in flexible sensors for detecting glucose in the physiological sample like saliva, tear or sweat.

• 한국전기전자재료학회논문지
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• 제36권3호
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• pp.203-213
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• 2023

Owing to carbon materials' diverse functionalization and versatility, the design and synthesis of carbon-based three-dimensional porous structures have become important foundational research topics across various fields. Among the various methods for producing porous carbon structures, laser-induced graphene (LIG) has garnered attention because of its large surface area, controllable structure, excellent electrical conductivity, scalability, and eco-friendly synthesis process. In addition, recent research results have reported more novel functionalities by advancing further from the unique characteristics of LIG through functionalization or compounding of LIG, making it an attractive material for various applications in electronic devices, sensing, catalysis, and energy storage. This review aims to update the research trends in LIG and its functionalization, providing insights to inspire more interesting studies on functional LIG to expand its potential applications ultimately. Starting with the synthesis method and material characteristics of LIG, we introduce the functionalization of LIG, which is classified into surface modification, heteroatom doping, and hybridization based on the interaction mechanism. Finally, we summarize and discuss the prospects of LIG and its functionalization.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.115-115
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• 2015

Many efforts have been devoted on chemical modification of graphene layer to modulate its electrical properties. In the previous report, laser irradiation on the CYTOP (Amorphous Fluoropolymer) covered graphene layer induces chemical modification wherein carbon fluoride is formed on the graphene surface. This results in the insulating I-V characteristics, which have been attracting much research interests on it. However, the direct analytical evidence of the fluoride formation on graphene surface is not yet studied. In this work we investigated what happened on the CYTOP/graphene interface during photon irradiation using spatially resolved photoemission spectroscopy method. It is found that the soft x-ray (614 eV) induces desorption of fluoride atoms from the CYTOP and change di-fluoride form to mono-fluoride. As the photo-induced fluorine desorption is continue strong dipole field generated by initial di-fluoride forms is gradually decreased, resulting in the overall binding energy shift of the C 1s core levels. Both photo-modified CYTOP and CYTOP starts to desorb above $286^{\circ}C$ (~ 0.047 eV), which means that no strong chemical interaction between CYTOP and graphene is established.

• 마이크로전자및패키징학회지
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• 제28권1호
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• pp.1-12
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• 2021

본 논문에서는 레이저 유도에 의한 그래핀 합성 기술 및 이를 이용한 전기/전자 소자 제조 기술과 다양한 소자 제조 기술을 검토하였다. 최근까지 개발되고 있는 3차원 그래핀 구조 활용으로 설계된 마이크로/나노 패턴화는 효율적인 제조공정으로 인하여 많은 각광을 받고 있으며, 차세대 기판 소재로의 응용까지 다양하게 개발되고 있다. 산업에서 요구하는 실제적인 적용 연구의 예들은, 레이저의 파장대역 선택, 출력 조정 및 광 간섭 기술 응용 등의 점진적인 해결방안 논의를 통해 큰 발전 가능성을 보여주고 있다. 기존의 그래핀의 전기/전자 소자 장치로의 응용 확장성은 이미 검증된 바 있으며, 새로운 합성 방식 및 기판 적용 기술은 마이크로 패키징 기술과의 통합 운용으로, 바이오센서, 슈퍼커패시터, 다공성 전기화학 센서 등 응용분야가 매우 다양하다. 본 논문에서 소개하는 레이저 기반 그래핀 가공 기술은 가까운 미래에 휴대형 소형 전자기기 및 전자 소자에 쉽게 적용 가능하리라 사료된다.