• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.415-415
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• 2010

면방전 구조의 AC-PDP는 페닝 혼합 기체 중에서 Xe 플라스마에서 발생되는 VUV (Vacuum Ultra Violet) 에 의해 들뜬 형광체로부터 가시광이 발생된다. Xe 여기종은 828 nm의 공명준위를 거쳐 147 nm의 진공자외선을 방출하며 823 nm의 준안정준위에서 분자선을 거쳐 173 nm의 진공 자외선을 낸다. 이러한 Xe 여기종의 밀도를 측정하기 위해서는 828 nm와 823 nm의 레이저를 외부에서 인위적으로 조사하여 측정하면 IR (Infrared)의 흡수전과 흡수후의 빛의 세기로 Xe 여기종의 밀도 및 분포를 계산할 수 있다. 본 실험에서는 823 nm에 초점을 두었으며 LAS (Laser Absorption Spectroscopy) 기법을 통하여 He-Ne-Xe(15%, 20 %, 30%) 400Torr의 3종 기체의 Xe 함량에 따른 시공간의 Xe($1s_5$) 여기종 밀도 분포와 방전효율을 관측하였다. 최근 3전극 면방전형 AC-PDP 효율 향상을 위해 3종 기체의 Xe함량비의 방전기체에 대한 연구가 수행되고 있다. 이러한 기초 데이터는 혼합기체 조건에 따른 면방전 구조의 3전극 AC-PDP의 발광 효율을 개선하는 데 유용한 자료로 활용될 것이다.

• Korean Journal of Materials Research
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• v.29 no.9
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• pp.547-552
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• 2019

In the present study, the thermal conductivity of a silicon nitride($Si_3N_4$) thin-film is evaluated using the dual-wavelength pump-probe technique. A 100-nm thick $Si_3N_4$ film is deposited on a silicon (100) wafer using the radio frequency plasma enhanced chemical vapor deposition technique and film structural characteristics are observed using the X-ray reflectivity technique. The film's thermal conductivity is measured using a pump-probe setup powered by a femtosecond laser system of which pump-beam wavelength is frequency-doubled using a beta barium borate crystal. A multilayer transient heat conduction equation is numerically solved to quantify the film property. A finite difference method based on the Crank-Nicolson scheme is employed for the computation so that the experimental data can be curve-fitted. Results show that the thermal conductivity value of the film is lower than that of its bulk status by an order of magnitude. This investigation offers an effective way to evaluate thermophysical properties of nanoscale ceramic and dielectric materials with high temporal and spatial resolutions.

• Journal of the Architectural Institute of Korea Structure & Construction
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• v.34 no.11
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• pp.45-54
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• 2018

The primary objective of this study is to develop a conceptual design of all-in-one attachment based steel pipe pile cutting robot that improves the conventional work in safety, quality, convenience and productivity. For this, the following research works are conducted sequentially; 1)literature review, 2)field investigation, 3)selection of element technology for conceptual design, 4)deduction of conceptual design and its work process, 5)technical feasibility analysis of the conceptual design and its work process. As a result, leveling laser and laser detector, plasma cutter, rotary grapple are selected as core technologies. Futhermore, a conceptual design and work process of an all-in-one attachment based steel pipe pile cutting robot are developed based on the core technologies. According to the technical feasibility analysis result, at least 76.8% of the respondents are selected positive answer about each device of the all-in-one attachment based steel pipe cutting robot. It is expected that the application range and impact on the construction industry will be enormous due to the increasing trend of the steel pipe pile market.

• Current Applied Physics
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• v.18 no.11
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• pp.1381-1387
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• 2018

One dimensional (1D) grating has been fabricated (using focused ion beam) on 50 nm gold (Au) film deposited on higher refractive index Gallium phosphate (GaP) substrate. The sub-wavelength periodic metal nano structuring enable to couple photon to couple with the surface plasmons (SPs) excited by them. These grating devices provide the efficient control on the SPs which propagate on the interface of noble metal and dielectric whose frequency is dependent on the bulk electron plasma frequency of the metal. For a fixed periodicity (${\Lambda}=700 nm$) and slit width (w = 100 nm) in the grating device, the efficiency of SPP excitation is about 40% compared to the transmission in the near-field. Efficient coupling of SPs with photon in dielectric provide field localisation on sub-wavelength scale which is needed in Heat Assisted Magnetic recording (HAMR) systems. The GaP is also used to emulate Vertical Cavity Surface emitting laser (VCSEL) in order to provide cheaper alternative of light source being used in HAMR technology. In order to understand the underlying physics, far-and near-field results has been compared with the modelling results which are obtained using COMSOL RF module. Apart from this, grating devices of smaller periodicity (${\Lambda}=280nm$) and slit width (w = 22 nm) has been fabricated on GaP substrate which is photoluminescence material to observe amplified spontaneous emission of the SPs at wavelength of 805 nm when the grating device was excited with 532 nm laser light. This observation is unique and can have direct application in light emitting diodes (LEDs).

• 제어로봇시스템학회:학술대회논문집
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• 2004.08a
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• pp.499-503
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• 2004

This application-oriented paper describes an automated welding carriage system to weld a thin corrugated workpiece with welding seam tracking function. Hyundai Heavy Industries Corporation has developed an automatic welding carriage system, which utilizes pulsed plasma arc welding process for corrugated sheets. It can obtain high speed welding more than 2 times faster than traditional TIG based welding system. The aim of this development is to increase the productivity by using automatic plasma welding carriage systems, to track weld seam line using vision sensor automatically, and finally to provide a convenience to operator in order to carry out welding. In this paper a robust image processing and a distance based tracking algorithms are introduced for corrugated workpiece welding. The automatic welding carriage system is controlled by the programmable logic controller(PLC), and the automatic welding seam tracking system is controlled by the industrial personal computer(IPC) equipped with embedded OS. The system was tested at actual workpiece to show the feasibility and performance of proposed algorithm and to confirm the reliability of developed controller.

• 한국정보디스플레이학회:학술대회논문집
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• 2004.08a
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• pp.305-308
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• 2004

We present a novel process for the ultra low temperature (<150$^{\circ}C$) polycrystalline silicon (ULTPS) TFT for the flexible display applications on the plastic substrate. The sequential lateral solidification (SLS) was used for the crystallization of the amorphous silicon film deposited by rf magnetron sputtering, resulting in high mobility polycrystalline silicon (poly-Si) film. The gate dielectric was composed of thin $SiO_2$ formed by plasma oxidation and $Al_2O_3$ deposited by plasma enhanced atomic layer deposition. The breakdown field of gate dielectric on poly-Si film showed above 6.3 MV/cm. Laser activation reduced the source/drain resistance below 200 ${\Omega}$/ㅁ for n layer and 400 ${\Omega}$/ㅁ for p layer. The fabricated ULTPS TFT shows excellent performance with mobilities of 114 $cm^2$/Vs (nMOS) and 42 $cm^2$/Vs (pMOS), on/off current ratios of 4.20${\times}10^6$ (nMOS) and 5.7${\times}10^5$ (PMOS).

• Proceedings of the Materials Research Society of Korea Conference
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• 2003.03a
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• pp.217-217
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• 2003

W-Cu 합금은 우수한 전기적, 열적 특성으로 인하여 열소산재료(Heat sink)로 많이 응용되고 있다. 첨단 전자부품 이외에도 핵융합로의 Diverter가 그 예로서, 내부는 고강도와 고융점의 특성을 요구하는 반면, 외부는 높은 열전도성을 필요로 한다. 그래서 동일한 조성의 일반적인 W-Cu 합금보다 W과 Cu의 조성이 점차적으로 변화하는 경사기능재료(Functionally Graded Materials)가 냉각효율이 클 것으로 기대된다. 현재, W-Cu FGM에 대한 많은 연구가 진행되고 있지만, 그 조성이 연속적으로 변화하는 W-Cu FGM에 대한 연구는 전무한 실정이다 본 연구에서는 방전플라즈마 소결장치(Spark Plasma Sintering System)와 용침고정을 이용하여 연속적인 조성변화를 갖는 W-Cu FGM을 제조하고 그 특성에 관해 분석하고자 하였다. 소결체가 밀도 변화를 갖게 되도록 제작한 특수 경사기능 몰드에 W분말을 장입한 후, 15㎬의 압력하에서 SPS를 이용하여 W소결체를 제조하였다. 제조된 W소결체는 수평관상로에서 수소분위기 하에 Cu 용침을 실시하여 W-Cu FGM을 제조하였다 SEM을 이용한 각 위치별 조직관찰과 Image Analyzer를 이용한 W과 Cu의 면적비, 그리고 비커스경도계에 의한 경도 측정을 실시하였다. 또 열기계적 분석기를 이용하여 측정된 선팽창률로부터 열팽창계수를 구하였다. 80$0^{\circ}C$에서 ？칭하는 반복적인 싸이클을 통해 열충격시험을 실시하였고, Laser flash method로 열확산계수를 측정하였다.

• Proceedings of the International Microelectronics And Packaging Society Conference
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• 2000.04a
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• pp.109-109
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• 2000

Recently, carbon nanotube has been investigating for field emission display ( (FED) applications due to its high electron emission at relatively low electric field. However, the growing of carbon nanotube generally requires relatively high temperature processing such as arc-discharge (5,000 ~ $20,000^{\circ}C$) and laser evaporation (4,000 ~ $5,000^{\circ}C$) methods. In this presentation, low temperature growing of carbon nanotube by plasma enhanced chemical vapor deposition (PECVD) using nickel catalyst which is compatible to conventional FED processing temperature will be described. Carbon n notubes with average length of 100 run and diameter of 2 ~ $3\mu$ill were successfully grown on silicon substrate with native oxide layer at $550^{\circ}C$using nickel catalyst. The morphology and microstructure of carbon nanotube was highly depended on the processing temperature and nickel layer thickness. No significant carbon nanotube growing was observed with samples deposited on silicon substrates without native oxide layer. This is believed due to the formation of nickel-silicide and this deteriorated the catalytic role of nickel. The formation of nickel-silicide was confirmed by x-ray analysis. The role of native oxide layer and processing parameter dependence on microstructure of low temperature grown carbon nanotube, characterized by SEM, TEM XRD and R없nan spectroscopy, will be presented.

• Journal of the Korean institute of surface engineering
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• v.29 no.5
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• pp.549-555
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• 1996

Diamond Like Carbon film is amorphous film which is considered to consist of three coordinate graphite structure and tetrahedron coordinate diamond structure. Its hardness, thermal conductivity and chemical stability are nearly to one of diamond. It is well known to become semi-conductor by doping of inpurity. In this study Diamond Like Carbon film was synthesized by Microwave Plasma CVD in the gas mixture of hydrogen-methan-nitrogen and doped of nitrogen on the single-crystal silicon or silica glass. The temperature of substrate and nitrogen concentration in the gas mixture had an effect on the bonding state, structural properties and conduction mechanism. The surface morphology was observed by Scanning Electron Microscope. The strucure was analyzed by laser Raman spectrometry. The bonding state was evaluated by electron spectroscopy. Diamond Like Carbon film synthesized was amorphous carbon containing the $sp^2$ and $sp^3$ carbon cluster. The number of $sp^2$ bonding increased as nitrogen concentration increased from 0 to 40 vol% in the feed gas at 1233K substrate temperature and at $7.4\times10^3$ Pa. Increase of nitrogen concentration made Diamond Like Carbon to be amorphous and the doze of nitragen could be controlled by nitrogen concentration of feed gas.

• Nuclear Engineering and Technology
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• v.56 no.6
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• pp.2367-2374
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• 2024

In this paper, based on the need for high-strength connections between all-tungsten-oriented plasma materials and thermal sinking materials of copper and its alloys in nuclear fusion devices, a study on the effect of tungsten surface laser micro structuring on the interfacial bonding properties of W/Cu joints was carried out. In the experiment, the connectors were prepared by vacuum fusion infiltration technology, and the effects of microgroove structure on the mechanical and thermal conductivity of W/Cu connectors were investigated under different parameters (including microgroove pitch, microgroove depth, and microgroove taper). The maximum shear strength is 126.0 MPa when the pitch is 0.15 mm and the depth is 34 ㎛. In addition, the negative taper structure, i.e., the width of the entrance of the microstructure is smaller than the width of the interior of the microstructure, is also investigated. The shear tests show that there is an approximately linear relationship between the shear strength of W/Cu and taper. Compared with the positive taper, the shear strength of the samples with the same morphological density and depth of the tungsten surface is significantly higher.