• Electrical & Electronic Materials
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• v.9 no.5
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• pp.476-482
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• 1996

The multi-dielectric layer SiO$_{2}$/Si$_{3}$N$_{4}$/SiO$_{2}$(ONO) is used to improve electrical capacitance and to scale down the memory device. In this paper, improvement of the capacitance by reducing the bottom oxide thickness in the nitride deposition with load lock(L/L) vacuum system is studied. Bottom oxide thickness under the nitride layer is measured by ellipsometer both in L/L and non-L/L systems. Both results are in the range of 3-10.angs. and 10-15.angs., respectively, independent of the nitride and top oxide thickness. Effective thickness and cell capacitance for SONOS capacitor are in the range of 50-52.angs. and 35-37fF respectively in the case of nitride 70.angs. in L/L vacuum system. Compared with non-L/L system, the bottom oxide thickness in the case of L/L system decreases while cell capacitance increases about 4 fF. The results obtained in this study are also applicable to ONO scaling in the thin bottom oxide region of memory stacked capacitor.

• Journal of the Korean Vacuum Society
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• v.18 no.6
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• pp.411-417
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• 2009

The constant volume flow meter system (the chamber volume in the 22 L class) was developed to estimate the pumping speed of the dry pump used for the industry of the next generation semiconductor and display. In order to insure the validity of the system, The base pressure and the leak rate in the enclosed system were checked, which were the $6{\times}10^{-8}\;mbar$ and $1.5{\times}10^{-6}\;mbar-L/s$, respectively. Furthermore, it is also confirmed that the value of throughput limit in this system was as much as 1 order of magnitude lower than that in a previously developed system in the 875 L class. By using this developed system, the pumping speed of the new small dry pump was measured. It is believed that the new developed system can be alternating the expensive constant pressure flow meter system in the range of $1{\times}10^{-2}\;mbar-L/s{\sim}1{\times}10^{-3}\;mbar-L/s$.

• Aerospace Engineering and Technology
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• v.3 no.1
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• pp.103-108
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• 2004

The space environment is characterized such a severe condition as high vacuum and very low temperature. Since a satellite will be exposed such a space environment as soon as it goes into the its orbit, thermal vacuum test should be carried out to verify the performance of the satellite on the ground under the space environmental conditions. KARI has a thermal vacuum chamber with useful dimensions of ∮3.6m×L3m, in which KOMPSAT-1 and KOMPSAT-2 satellites were tested. But very large thermal vacuum chamber with useful dimensions of ∮8m×L10m has been needed to meet the future demand of large satellites. Generally, the thermal vacuum chamber can be divided into a vacuum system and a thermal system. Especially, a cryogenic system in the thermal system simulates very low temperature of -196℃ under the high vacuum condition. In this paper, we propose the new cryogenic system can be applied to the future large thermal vacuum chamber.

• Journal of the Korean Vacuum Society
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• v.5 no.4
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• pp.269-277
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• 1996

The vacuum systems of PLS linac provides average pressure of $2.6\times 10^{-6}$Pa under high power microwave of 54 MW peak with 4.1 $\mu \textrm s$ pulse width and 10 Hz repetition rates. The base pressure of system is$2.4\times 10^{-6}$Pa with 45$^{\circ}C$ cooling water. The outgassing rate of the system is decreased from $3.0\times 10^{-11}Torr-l/sec-\textrm{cm}^2$ at the initial stage after installation to $1\times 10^{-12}Torr-l/sec-\textrm{cm}^2$ at present. Total accumulated microwave energy dose is about 140 GJ per module. All ion pumps are working under saturated regime and effective pumping speeds of 60 I/s, 230 I/s ion pumps are 45 I/s, 65 I/s, 140 I/s under the operating range. Main problems occurred in recent year are troubles of ion pump controller and vacuum gauge controller, vacuum leak of energy doubler window and electron gun ceramic, and water leak in the dummy load of acceleraing columns. Total of 41 troubles with 140. 8 hours down time give good system availability of 98%. Down time can be reduced by high power waveguide valves and water dummy loads under development, and then availability is expected to be increased up to 99.5%.

• Journal of the Korean Vacuum Society
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• v.15 no.4
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• pp.347-353
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• 2006

A helium permeation type standard leak calibration system has newly developed by using dynamic gas expansion method. The measurement range was extended lower to $10^{-6}$ Pa L/s for participating CCM (Consultative Committee for Mass and Related Quantities) standard leak key comparison. For the system, pressure ratios of high and ultra-high vacuum chamber and porous plug conductance for helium gas were determined. By using the system, a permeation type standard leak of $5.6{\times}10^{-4}$ Pa L/s range was calibrated. The calibration result showed that the difference between standard commercial leak was 11.1 %.

• Progress in Superconductivity and Cryogenics
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• v.24 no.4
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• pp.65-70
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• 2022

A vacuum system is designed for thermal insulation of a 10 ton/day class air liquefaction cold box for liquid air energy storage. The vacuum system is composed of a turbomolecular pump, a backing pump and vacuum piping for the vacuum pumps. The turbomolecular pump is in combination with the backing pump for pumping capacity. The vacuum piping is designed with system installation conditions, such as distance from the cold box, connections to vacuum pumps and installation space. The capacity of the vacuum pump combination, namely pumping speed, is determined by analysis of the vacuum system, and pump-down time to 1×10^-5 mbar is estimated. Vacuum piping conductance, system pumping speed and outgassing rate are calculated for the pump-down time with the ultimate pumping speed range of the vacuum pump combination of 1400 - 2300 l/s. Although the pump-down time gets shorter by larger capacity vacuum pumps, it mainly depends on target vacuum degree and outgassing rate in the cold box. The pump-down time is estimated as 3 - 6 hours appropriate for cold box operation for the pumping speed range. Considering the outgassing rate has uncertainty, the vacuum pump combination with pumping speed of 1900 l/s is chosen for the vacuum system, which is middle value of the pumping speed range.

• Journal of the Korean Vacuum Society
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• v.21 no.6
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• pp.295-300
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• 2012

We preliminarily evaluated the performance of a flowmeter by the measurement of the pressure of a ionization gauge and the produced throughput (Q) using a vacuum system and pistons with the radius of 10 mm and 20 mm. The throughput range with the later piston was from $1{\times}10^{-1}Pa{\cdot}L/s$ to $1.2Pa{\cdot}L/s$ and that with the former piston was from $5.3{\times}10^{-1}Pa{\cdot}L/s$ to $1.05Pa{\cdot}L/s$. In these ranges, both pistons showed good repeatability and linearity. The developed oil flowmeter as the leak standard will be used in the calibration of standard leak.

• Journal of Plant Biotechnology
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• v.49 no.1
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• pp.61-73
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• 2022

In this study, we developed a reliable and efficient Agrobacterium-mediated genetic transformation system by applying sonication and vacuum infiltration to six chickpea cultivars (ICCV2, ICCV10, ICCV92944, ICCV37, JAKI9218, and JG11) using embryo axis explants. Wounded explants were precultured for 3 days in shoot induction medium (SIM) before sonication and vacuum infiltration with an Agrobacterium suspension and co-cultivated for 3 days in co-cultivation medium containing 100 µM/l of acetosyringone and 200 mg/l of L-cysteine. Responsive explants with putatively transformed shoots were selected using a gradual increase in kanamycin from 25 mg/l to 100 mg/l in selection medium to eliminate escapes. Results showed optimal transformation efficiency at a bacterial density of 1.0, an optical density at 600 nm wavelength (OD₆₀₀), and an infection duration of 30 min. The presence and stable integration of the β-glucuronidase (gusA) gene into the chickpea genome were confirmed using GUS histochemical assay and polymerase chain reaction. A high transformation efficiency was achieved among the different factors tested using embryo axis explants of cv. JAKI 9218. Of the six chickpea cultivars tested, JAKI9218 showed the highest transformation efficiency of 8.6%, followed by JG11 (7.2%), ICCV92944 (6.8%), ICCV37 (5.4%), ICCV2 (4.8%), and ICCV10 (4.6%). These findings showed that the Agrobacterium-mediated genetic transformation system will help transfer novel candidate genes into chickpea.

• Journal of the Korean Vacuum Society
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• v.22 no.2
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• pp.45-54
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• 2013

The cryopump of the pulse tube type has been developed successfully, and manufacturing of a prototype pump is finished under leading of Woosung Vacuum. The target pumping speed of the prototype pump is above 3,600 L/s for nitrogen with the intake port of 14 inches I.D (16 inches O.D). For designing optimally the pump structure including the charcoal array, thermal shield, and baffle, the pumping speed was simulated for various configurations through Monte Carlo method. Pumping performances of the protype cryopump manufactured on the basis of optimal design were conformed experimentally with a standard test system and procedures. The measured $N_2$ pumping speed of the prototype cryopump was 4,600 L/s which agreed well with simulated one and exceeded the target value.

• Journal of Biosystems Engineering
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• v.38 no.4
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• pp.306-311
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• 2013

Purpose: With the ever-rising energy prices, thermal energy heavily consuming facilities of the agricultural sector such as commercialized greenhouses and large-scale Rice Processing Complexes (RPCs) need to cut down their energy cost if they must run profitable businesses continually. One possible way to reduce their energy cost is to utilize combustible agricultural by-products or low-price oil instead of light oil as the fuel for their boiler systems. This study aims to analyze the heavy oil combustion characteristics of a newly developed hot water boiler system that can use both rice husk and heavy oil as its fuel convertibly. Methods: Heavy oil combustion experiments were conducted in this study employing four fuel feed rates (7.6, 8.5, 9.5, 11.4 $l/h$) at a combustion furnace vacuum pressure of 500 Pa and with four combustion furnace vacuum pressures (375, 500, 625, 750 Pa) at fuel feed rates of 9.5 and 11.4 $l/h$. Temperatures at five locations inside the combustion furnace and 20 additional locations throughout the whole hot water boiler system were measured to ascertain the combustion characteristics of the heavy oil. From the temperature measurement data, the thermal efficiency of the system was calculated. Flue gas smoke density and concentrations of air-polluting components in the flue gas were also measured by a gas analyzer. Results: As the fuel feed rate or combustion furnace vacuum pressure increased, the average temperature in the combustion furnace decreased but the thermal efficiency of the system showed no distinctive change. On the other hand, the thermal efficiency of the system was inversely proportionally to the vacuum level in the furnace. For all experimental conditions, the thermal efficiency remained in the range of 80.1-89.6%. The CO concentration in the flue gas was negligibly low. The NO and $SO_2$ concentration as well as the smoke density met the legal requirements. Conclusions: Considering the combustion temperature characteristics, thermal efficiency, and flue gas composition, the optimal combustion condition of the system seemed to be either the fuel feed rate of 9.5 $l/h$ with a combustion furnace vacuum pressure of 375 Pa or a fuel feed rate of 11.4 $l/h$ with a furnace vacuum pressure between 500 Pa and 625 Pa.