Thermodynamic Equilibrium Compositions for a $NH_3-AlCl_3-H_2$ Vapor-Phase Reacting System and Synthesis of High-Purity AlN
($NH_3-AlCl_3-H_2$ 기상반응계의 열역학적 평형조성 및 고순도 AIN 합성)
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- Journal of the Korean Ceramic Society
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- v.23 no.1
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- pp.33-43
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- 1986