• Journal of the Korean Institute of Gas
• /
• v.12 no.2
• /
• pp.48-52
• /
• 2008

According to extremely industrial growth, gas facilities, equipments and chemical plants are gradually increased due to incremental demands of annual amount of gases. The safety management of gases, however, is still far from their requirements. Methane, the principal ingredient of natural gas, is inflammable and explosive and is much used in factories and houses. Therefore, these gas safety management is essential. So, we, with a program of the gas safety management, hope to develop the detection system of methane gas leak using mid-infrared ray LED and PD with $3.2\;{\mu}m$. The cryogenic cooling device is indispensible at laser but needless at LED driven on the room temperature if manufacturing optical sensor with $3.2\;{\mu}m$. It, consequently, is not only possible to implement for subminiature and portable type but also able to speedily detect methane of extremely small quantities because the $CH_4$ absorption intensity at $3.2\;{\mu}m$ is stronger than that at $1.67\;{\mu}m$. Our objective of research is to prevent gas leak accidents from occurring previously and to minimize the extent of damage from them.

• Journal of Sensor Science and Technology
• /
• v.24 no.6
• /
• pp.379-384
• /
• 2015

An infrared image sensor is a core device in a thermal imaging system. The fabrication method of a focal plane array (FPA) is a key technology for a high resolution infrared image sensor. Each pixels in the FPA have $Si_3N_4/SiO_2$ membranes including legs to deposit bolometric materials and electrodes on Si readout circuits (ROIC). Instead of polyimide used to form a sacrificial layer, the feasibility of an amorphous silicon (${\alpha}-Si$) was verified experimentally in a $8{\times}8$ micro-bolometer array with a $50{\mu}m$ pitch. The elimination of the polyimide sacrificial layer hardened by a following plasma assisted deposition process is sometimes far from perfect, and thus requires longer plasma ashing times leading to the deformation of the membrane and leg. Since the amorphous Si could be removed in $XeF_2$ gas at room temperature, however, the fabricated micro-bolomertic structure was not damaged seriously. A radio frequency (RF) sputtered nickel oxide film was grown on a $Si_3N_4/SiO_2$ membrane fabricated using a low stress silicon nitride (LSSiN) technology with a LPCVD system. The deformation of the membrane was effectively reduced by a combining the ${\alpha}-Si$ and LSSiN process for a nickel oxide micro-bolometer.

• Journal of Sensor Science and Technology
• /
• v.30 no.4
• /
• pp.250-254
• /
• 2021

A highly sensitive and selective non-dispersive infrared (NDIR) carbon dioxide gas sensor requires achieving high transmittance and narrow full width at half maximum (FWHM), which depends on the interface of the optical filter for precise measurement of carbon dioxide concentration. This paper presents the design, simulation, and fabrication of a Fabry-Perot filter based on a distributed Bragg reflector (DBR) for a low-cost NDIR carbon dioxide sensor. The Fabry-Perot filter consists of upper and lower DBR pairs, which comprise multilayered stacks of alternating high- and low-index thin films, and a cavity layer for the resonance of incident light. As the number of DBR pairs inside the reflector increases, the FWHM of the transmitted light becomes narrower, but the transmittance of light decreases substantially. Therefore, it is essential to analyze the relationship between the FWHM and transmittance according to the number of DBR pairs. The DBR is made of silicon and silicon dioxide by RF magnetron sputtering on a glass wafer. After the optimal conditions based on simulation results were realized, the DBR exhibited a light transmittance of 38.5% at 4.26 ㎛ and an FWHM of 158 nm. The improved results substantiate the advantages of the low-cost and minimized process compared to expensive commercial filters.

• Journal of the Semiconductor & Display Technology
• /
• v.12 no.3
• /
• pp.35-39
• /
• 2013

In this paper, we developed an optical sheet for LED lighting with integrated $CO_2$ gas and temperature sensor which can monitor at the indoor environment. The optical sheet for LED lighting is fabricated through PMMA(Polymethyl methacrylate) injection process using mold. This research enables to fabricate the reflective sheet, light-guide plate and the prism sheet in a optical sheet. The fabricated sheet demonstrates higher intensity of optical efficiency compared with single-sided sheets. The $CO_2$ sensor was fabricated using NDIR(NON-Dispersive Infrared) method and it has $0.0235mV/V{\cdot}PPM$ sensitivity. The temperature sensor was fabricated using RTD(Resistance temperature detector) method and it has $0.563{\Omega}/^{\circ}C $sensitivity.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.13 no.6
• /
• pp.297-303
• /
• 2003

Mn-Ni-Co type thin films were prepared at various conditions by a rf magnetron sputtering system. At the condition. or substrate temperature of $300^{\circ}C$ and $Ar/O_2$= 10/0, a cubic spinel phase was obtained. When oxygen was included in process gas, a cubic spinel phase was not formed even after the thermal annealing at $900^{\circ}C$. The thermistor thin film had no other elements except Mn, Ni and Co. The infrared reflection spectra of the thermistor thin films showed that the films had somewhat high reflectance for incoming infrared ray with some angle. The etch rate of the thermistor thin films was about 63nm/min at a condition of DI water : $HNO_3$: HCl = 60 : 30 : 10 vol%. The B constant and temperature coefficient of resistance of the thermistor thin films were 3500 K and -3.95 %/K, respectively. The voltage responsivity of the thermistor thin film infrared sensor was 108.5 V/W and its noise equivalent power and specific detectivity were $5.1\times 10^{-7}$ W/$Hz^{-1/2}$ and $0.2\times 10^6$cm $Hz^{1/2}$/W, respectively.

• Journal of Korea Society of Industrial Information Systems
• /
• v.28 no.6
• /
• pp.21-27
• /
• 2023

Modern naval ships install an Infra-Red Signature Suppression system (IRSS) in their exhaust pipe to reduce infrared signature emitted to the outside. In addition, naval ships are strategic assets with a very long life cycle, so high reliability of the performance of the equipment on board must be guaranteed. Therefore, equipment such as IRSS is evaluated for performance through model testing at the design stage. A variety of measuring instruments are used in IRSS model testing, and the reliability of these instruments must also be guaranteed. In this paper, a study was conducted to evaluate the reliability of measurement equipment used in IRSS model testing. The test equipment and instruments used were a hot gas wind tunnel, pitot tube, digital differential pressure gauge, thermocouple sensor, and digital recorder. As the fan speed of the hot gas wind tunnel increased, the measurement deviation of the flow decreased, and the temperature output of the thermocouple sensor showed differences in response time and stability depending on the method used.

• Journal of Sensor Science and Technology
• /
• v.28 no.2
• /
• pp.101-105
• /
• 2019

ZnS substrates with excellent transmittance in the mid-infrared region ($3-5{\mu}m$) were prepared using hot pressing instead of conventional chemical vapor deposition (CVD). Diamond-like carbon(DLC) was coated on either one or both sides of the ZnS substrates to improve their mechanical properties and transmittance. More specifically DLC was coated using CVD with an Ar and $C_2H_2$ mixed gas, and Ge was used as the bonding layer. During CVD, the bias voltage was fixed to 500 V and analyzed by Fourier transform infrared spectroscopy (FT-IR), nanoindenter, scanning electron microscope and energy dispersive spectrometry. Results of hardness analysis using the nanoindenter, showed that DLC coating increased from 5.9 to 17.7 GPa after deposition. The FT-IR spectroscopy results showed that, in the mid-infrared region ($3-5{\mu}m$), the average transmittance of the samples with DLC coating on one and both sides increased by approximately 6% and approximately 11.2% respectively. In conclusion, the DLC coating improved the durability and transmittance of the ZnS substrates.

• Proceedings of the KIEE Conference
• /
• 1999.07e
• /
• pp.2450-2452
• /
• 1999

Presently, it is now developing the optical remote gas sensor system which can measure combustible gases such as $CH_4$ and $C_2H_2$ generating by partial discharges inside the cable and connection parts to detect thermal deterioration of Oil-Filled (OF) power cable at the appropriate time. It is the most important parameter to select central wavelength of laser diode (LD) by analyzing the absorption bend of measuring gases in the infrared region. In this research, we proposed the optical spectrum analyzer to absorption band of $CH_4$ and $C_2H_2$ for the preliminary research of optical fiber gas detecting system.

• Proceedings of the KIEE Conference
• /
• 2008.07a
• /
• pp.1470-1471
• /
• 2008

We present a front-side micromachined thermopile with high sensitivity in the 3-5${\mu}m$ window, and discuss its application to a novel non-dispersive infrared (NDIR) $CO_2$ gas sensor with a light source emitting collimated light. The micromachined thermopile shows a measured sensitivity of 30 mV/W and a $D^*$ of $0.3{\times}10^8cm^{\surd}Hz/W$. Using this newly fabricated thermopile, we also have successfully developed a small, sensitive NDIR $CO_2$ detector module for accurate air quality monitoring systems in energy-saving building and automotive applications. The novel sample cavity comprising specular reflectors around the light bulb is configured to uniformly emit collimated light into the entrance aperture of the cavity in order to enhance the sensitivity of NDIR $CO_2$ detector.

• Journal of the Korea Safety Management & Science
• /
• v.11 no.3
• /
• pp.73-78
• /
• 2009

In this paper, we developed the care system for older people living alone using the RFID technologies and the living informations. The care system store living informations, extracted through a unconstrained detection method by the RFID tags and readers, into a monitering server. The unconstrained detection method improved a weakness of existing systems that detected a living informations through an infrared sensor, ultrasonic sensor, camera, consumed quantity of the tap water or gas. The result of this study will playa very important role, as a part of a composite older-welfare services. Also, in the future, accumulated living informations will be allowed for a health data of older peoples.