Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 2008.07a
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- Pages.1470-1471
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- 2008
A Front-side Dry-Etched Thermopile Detector with 3-5 $\mu m$ Infrared Absorber and Its Application to Novel NDIR $CO_2$ Gas Sensors
3-5 $\mu m$ 적외선 흡수체를 가진 전면 건식 식각된 서모파일과 NDIR $CO_2$ 가스 센서의 응용
- Yoo, Kum-Pyo (Korea University) ;
- Kim, Si-Dong (Auto Electronic Corp.) ;
- Choi, Woo-Seok (Korea University) ;
- Singh, V.R. (Korea University) ;
- Min, Nam-Ki (Korea University)
- Published : 2008.07.16
Abstract
We present a front-side micromachined thermopile with high sensitivity in the 3-5
Keywords