• Title/Summary/Keyword: Inductive Post

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자화된 유도결합형 플라즈마를 이용한 Al-Nd 박막의 식각특성에 관한 연구

  • 한혜리;이영준;오경희;홍문표;염근영
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.246-246
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    • 1999
  • TFT-LCD 제조공정의 발전에 따라, 박막층(a-Si, SiNx, gate 전극, ITO 등)에 대한 습식공정을 대치하는 건식식각이 선호되고 있다. scan signal의 전파지연시간을 단축시키는 장점을 갖는 Al gate 전극의 건식식각의 경우, 높은 식각속도와 slope angle의 조절, 그리고 식각균일도가 요구된다. 이러한 Al gate 전극물질로는 Al에 Ti이나 Nd와 같은 금속을 첨가하여 post annealing 동안에 발생하는 hillock을 방지하고 더불어 낮은 resistivity(<10$\mu$$\Omega$cm)와 열과 부식에 대한 높은 저항성을 얻을 수 있다. 그러나 Al-Nd alloy 박막은 식각속도와 photoresist에 대한 식각선택도가 낮아 문제로 지적되고 있다. 본 실험에서는 고밀도 플라즈마원의 일종인 자화된 고밀도 유도결합형 플라즈마를 이용하여 식각가스 조합, inductive power, bias voltage 그리고 공정압력 등의 다양한 공정변수에 따른 Al-Nd film의 기본적인 식각특성 변화를 관찰하였다. 식각시 chloring gas를 주요 식각가스로 사용하고 BCl, HBr 등을 10mTorr의 일정한 압력을 유지하는 조건하에서 첨가하였으며 inductive power는 5100W~800W, bias voltage는 -50V~-200V까지 변화를 주었다. 식각공정의 전후를 통하여 Al-Nd 박막표면의 조성변화를 관찰하기 위하여 X-ray photoelectron spectroscopy(XPS)를 이용하였으며 공정변수에 따른 식각후 profile 관찰은 scanning electron microscopy(SEM)을 통하여 관찰하였다. Al-Nd 식각속도는 100% Cl2 플라즈마에 비해 BCl3의 양이 증가할수록 증가하였으며 75%의 BCl3 gas를 첨가하였을 때 가장 높은 식각속도를 얻을 수 있었다. 또한 SEM을 이용한 표면분석으로 roughness가 감소된 공정조건을 찾을 수 있었다.

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Design and Fabrication of a Narrow-Band Orthomode Transducer for Satellite Communication (위성통신용 협대역 직교모드편파분리기의 설계 및 제작)

  • 장중호;최현철
    • The Journal of Korean Institute of Communications and Information Sciences
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    • v.24 no.6B
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    • pp.1149-1155
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    • 1999
  • This paper presents a narrow-band orthomode transducer(OMT) based on waveguide to waveguide transitions which can separate two linearly polarized orthogonal modes. This operates in the range 120Hz-13GHz frequency band. It consists of two parts, main arm and side arm. Stepped transformers are designed and an inductive post is inserted to improve the characteristics of the transmission loss and isolation. This paper also presents results from fabricated OMT These results show that the transmission loss is less than 1dB and the isolation between the ports for the OMT is above 20dB.

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The Effect of Fluctuations in Photoperiod and Ambient Temperature on the Timing of Flowering: Time to Move on Natural Environmental Conditions

  • Song, Young Hun
    • Molecules and Cells
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    • v.39 no.10
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    • pp.715-721
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    • 2016
  • Plants have become physiologically adapted to a seasonally shifting environment by evolving many sensory mechanisms. Seasonal flowering is a good example of adaptation to local environmental demands and is crucial for maximizing reproductive fitness. Photoperiod and temperature are major environmental stimuli that control flowering through expression of a floral inducer, FLOWERING LOCUS T (FT) protein. Recent discoveries made using the model plant Arabidopsis thaliana have shown that the functions of photoreceptors are essential for the timing of FT gene induction, via modulation of the transcriptional activator CONSTANS (CO) at transcriptional and post-translational levels in response to seasonal variations. The activation of FT transcription by the fine-tuned CO protein enables plants to switch from vegetative growth to flowering under inductive environmental conditions. The present review briefly summarizes our current understanding of the molecular mechanisms by which the information of environmental stimuli is sensed and transduced to trigger FT induction in leaves.

Variable Control in Inductive Inference for Engineering Education (공학교육에서 귀납법 추론을 위한 변수 통제)

  • Hwang, Un Hak
    • Journal of Practical Engineering Education
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    • v.6 no.1
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    • pp.1-7
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    • 2014
  • The variable control in the inductive inference for the confirmation and verification when the experimental data are collected is studied by applying the principle of probability inference. The control in engineering experiments is to protect any effect by of intervening variable except primary independent variable on the dependent variable. By the special condition the possibility for developing a phenomenon will be maximized; otherwise, by the extraneous condition the possibility for developing a phenomenon will be minimized. By doing so, the control may provide insurance for the causal relationship between the certain prior event (independent variable) and the post-event (the dependent variable). Some experiments by using both elliptical trainer and tread mill under the variable control are performed in order to find the relations between the energy expenditure, the respiratory exchange ratio (RER), and the heart rate (HR) against the exercise speed.

Multichannel Transimpedance Amplifier Away in a $0.35\mu m$ CMOS Technology for Optical Communication Applications (광통신용 다채널 CMOS 차동 전치증폭기 어레이)

  • Heo Tae-Kwan;Cho Sang-Bock;Park Min Park
    • Journal of the Institute of Electronics Engineers of Korea SD
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    • v.42 no.8 s.338
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    • pp.53-60
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    • 2005
  • Recently, sub-micron CMOS technologies have taken the place of III-V materials in a number of areas in integrated circuit designs, in particular even for the applications of gjgabit optical communication applications due to its low cost, high integration level, low power dissipation, and short turn-around time characteristics. In this paper, a four-channel transimpedance amplifier (TIA) array is realized in a standard 0.35mm CMOS technology Each channel includes an optical PIN photodiode and a TIA incorporating the fully differential regulated cascode (RGC) input configuration to achieve effectively enhanced transconductance(gm) and also exploiting the inductive peaking technique to extend the bandwidth. Post-layout simulations show that each TIA demonstrates the mid-band transimpedance gain of 59.3dBW, the -3dB bandwidth of 2.45GHz for 0.5pF photodiode capacitance, and the average noise current spectral density of 18.4pA/sqrt(Hz). The TIA array dissipates 92mw p in total from a single 3.3V supply The four-channel RGC TIA array is suitable for low-power, high-speed optical interconnect applications.

Design Optimization of Hybrid-Integrated 20-Gb/s Optical Receivers

  • Jung, Hyun-Yong;Youn, Jin-Sung;Choi, Woo-Young
    • JSTS:Journal of Semiconductor Technology and Science
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    • v.14 no.4
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    • pp.443-450
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    • 2014
  • This paper presents a 20-Gb/s optical receiver circuit fabricated with standard 65-nm CMOS technology. Our receiver circuits are designed with consideration for parasitic inductance and capacitance due to bonding wires connecting the photodetector and the circuit realized separately. Such parasitic inductance and capacitance usually disturb the high-speed performance but, with careful circuit design, we achieve optimized wide and flat response. The receiver circuit is composed of a transimpedance amplifier (TIA) with a DC-balancing buffer, a post amplifier (PA), and an output buffer. The TIA is designed in the shunt-feedback configuration with inductive peaking. The PA is composed of a 6-stage differential amplifier having interleaved active feedback. The receiver circuit is mounted on a FR4 PCB and wire-bonded to an equivalent circuit that emulates a photodetector. The measured transimpedance gain and 3-dB bandwidth of our optical receiver circuit is 84 $dB{\Omega}$ and 12 GHz, respectively. 20-Gb/s $2^{31}-1$ electrical pseudo-random bit sequence data are successfully received with the bit-error rate less than $10^{-12}$. The receiver circuit has chip area of $0.5mm{\times}0.44mm$ and it consumes excluding the output buffer 84 mW with 1.2-V supply voltage.

Effects of Active Immunization against Somatostatin or its Analogues on Milk Protein Synthesis of Rat Mammary Gland Cells

  • Kim, J.Y.;Cho, K.K.;Chung, M.I.;Kim, J.D.;Woo, J.H.;Yun, C.H.;Choi, Y.J.
    • Asian-Australasian Journal of Animal Sciences
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    • v.15 no.4
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    • pp.570-575
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    • 2002
  • Effects of active immunization against native 14-mer somatostatin (SRIF, somatotropin releasing inhibiting factor) and its two 14-mer-somatostatin analogues on the milk production in rat mammary cells were studied. Native SRIF, Tyr11-somatostatin (Tyr11-SRIF), and D-Trp8, D-Cys14-somatostatin (Trp8Cys14-SRIF) were conjugated to bovine serum albumin (BSA) for immunogen preparation. Twenty-four female Sprague-Dawley rats were divided into four groups and immunized against saline (Control), SRIF, Tyr11-SRIF, and Trp8Cys14-SRIF at five weeks of age. Booster immunizations were performed at 7, 9, and 11 weeks of age. SRIFimmunized rats were mated at 10 weeks of age. The blood and mammary glands were collected at day 15 post-pregnancy and -lactation. To measure the amount of milk protein synthesis in the mammary gland, mammary cells isolated from the pregnant and the lactating rats, were cultured in the presence of $^3H$-lysine. No significant differences in growth performance, concentration of growth hormone in the circulation, and the amount of milk protein synthesis were observed among the groups. Inductive levels of serum anti-SRIF antibody in the SRIF and Tyr11-SRIF groups but not in the Trp8Cys14-SRIF group, were significantly higher than that of the control group during the pregnancy and lactation periods. The result suggests that active immunization against native 14-mer SRIF and Tyr11-SRIF was able to induce anti-SRIF antibodies, but did not affect the milk protein synthesis.

Etching characteristics of Al-Nd alloy thin films using magnetized inductively coupled plasma

  • Lee, Y.J.;Han, H.R.;Yeom, G.Y.
    • Proceedings of the Korean Institute of Surface Engineering Conference
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    • 1999.10a
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    • pp.56-56
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    • 1999
  • For advanced TFT-LCD manufacturing processes, dry etching of thin-film layers(a-Si, $SiN_x$, SID & gate electrodes, ITO etc.) is increasingly preferred instead of conventional wet etching processes. To dry etch Al gate electrode which is advantageous for reducing propagation delay time of scan signals, high etch rate, slope angle control, and etch uniformity are required. For the Al gate electrode, some metals such as Ti and Nd are added in Al to prevent hillocks during post-annealing processes in addition to gaining low-resistivity($<10u{\Omega}{\cdot}cm$), high performance to heat tolerance and corrosion tolerance of Al thin films. In the case of AI-Nd alloy films, however, low etch rate and poor selectivity over photoresist are remained as a problem. In this study, to enhance the etch rates together with etch uniformity of AI-Nd alloys, magnetized inductively coupled plasma(MICP) have been used instead of conventional ICP and the effects of various magnets and processes conditions have been studied. MICP was consisted of fourteen pairs of permanent magnets arranged along the inside of chamber wall and also a Helmholtz type axial electromagnets was located outside the chamber. Gas combinations of $Cl_2,{\;}BCl_3$, and HBr were used with pressures between 5mTorr and 30mTorr, rf-bias voltages from -50Vto -200V, and inductive powers from 400W to 800W. In the case of $Cl_2/BCl_3$ plasma chemistry, the etch rate of AI-Nd films and etch selectivity over photoresist increased with $BCl_3$ rich etch chemistries for both with and without the magnets. The highest etch rate of $1,000{\AA}/min$, however, could be obtained with the magnets(both the multi-dipole magnets and the electromagnets). Under an optimized electromagnetic strength, etch uniformity of less than 5% also could be obtained under the above conditions.

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Exploring American Indian Students' Problem-Solving Propensity in the Context of Culturally Relevant STEM Topics (문화 반영적 융합교육(STEM) 주제 상황에서 미국 토착민 학생들의 문제 해결 성향에 대한 탐색)

  • Kim, Young-Rae;Nam, Youn-Kyeong
    • Journal of the Korean Society of Earth Science Education
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    • v.10 no.1
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    • pp.1-16
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    • 2017
  • This study presents an out-of-school problem-solving lesson we designed for American Indian students using a culturally relevant STEM topic. The lesson was titled "Shelter Design for Severe Weather Conditions." This shelter design lesson was developed based on an engineering design allowing us to integrate STEM topics within a traditional indigenous house-building context. This problem context was used to encourage students to apply their prior knowledge, experience, and community/cultural practice to solve problems. We implemented the lesson at a summer program on an American Indian reservation. Using the lesson, this study explores how American Indian students use cultural knowledge and experience to solve a STEM problem. We collected student data through pre- and post-STEM content knowledge tests, drawings and explanations of shelter models on the students' group worksheets, and classroom observations. We used interpretive and inductive methods to analyze the data. This study demonstrates that our culturally relevant, STEM problem-solving lesson helped the American Indian students solve a complex, real-world problem. This study examines how students' prior experiences and cultural knowledge affect their problem-solving strategies. Our findings have implications for further research on designing problem-solving lessons with culturally relevant STEM topics for students from historically marginalized populations.

Safety Culture: A Retrospective Analysis of Occupational Health and Safety Mining Reports

  • Tetzlaff, Emily J.;Goggins, Katie A.;Pegoraro, Ann L.;Dorman, Sandra C.;Pakalnis, Vic;Eger, Tammy R.
    • Safety and Health at Work
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    • v.12 no.2
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    • pp.201-208
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    • 2021
  • Background: In the mining industry, various methods of accident analysis have utilized official accident investigations to try and establish broader causation mechanisms. An emerging area of interest is identifying the extent to which cultural influences, such as safety culture, are acting as drivers in the reoccurrence of accidents. Thus, the overall objective of this study was to analyze occupational health and safety (OHS) reports in mining to investigate if/how safety culture has historically been framed in the mining industry, as it relates to accident causation. Methods: Using a computer-assisted qualitative data analysis software, 34 definitions of safety culture were analyzed to highlight key terms. Based on word count and contextual relevance, 26 key terms were captured. Ten OHS reports were then analyzed via an inductive thematic analysis, using the key terms. This analysis provided a concept map representing the 50-year data set and facilitated the use of text framing to highlight safety culture in the selected OHS mining reports. Results: Overall, 954 references and six themes, safety culture, attitude, competence, belief, patterns, and norms, were identified in the data set. Of the 26 key terms originally identified, 24 of them were captured within the text. The results made evident two distinct frames in which to interpret the data: the role of the individual and the role of the organization, in safety culture. Conclusion: Unless efforts are made to understand and alter cultural drivers and share these findings within and across industries, the same accidents are likely to continue to occur.