• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2533-2535
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• 1998

In this paper, an effect of drive-in process temperature on the residual stress profile of the p+ silicon film has been investigated. The residual stress profile has been calculated as the fourth-order polynomials. All coefficients of the polynomials have been determined from the measurement of the vertical deflections of the p+ silicon cantilevers with various thickness and the tip displacement of the p+ silicon rotating beam. From the determination results of the residual stress profile, the average stress of the film thermally oxidized at 1000 $^{\circ}C$ is 15 MPa and that of the film oxidized at 1100 $^{\circ}C$ is 25 MPa. The profile of the residual stress through the high temperature drive-in process has a steeper gradient than the other case.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1996.04a
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• pp.242-246
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• 1996

Accurate measurements of burr profile and burr size are very important for the automation of deburring. In this paper, a new burr measurement system using capacitance sensor is proposed. Ultra precision milling machine was used as a sensor positioning system. The possibility and limitation of employing a capacitance sensor to defect burrs are also investigated. The proposed system is proven to be relatively accurate, easy to setup and lower cost. This system will be applicable to a fully automated deburring system with minor modifications.

• Journal of Mechanical Science and Technology
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• v.19 no.8
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• pp.1576-1581
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• 2005

Generally, the optical components are fabricated by grinding, lapping, and polishing. And, those processes take long time to obtain such a high surface quality. Therefore, in the case of large optical component, the on-machine inspection (OMI) is essential. Because, the work piece is fragile and difficult to set up for fabricating and measuring. This paper is concerned about a swing-arm method for measuring surface profile of large optical concave mirror. The measuring accuracy and uncertainty for suggested method are studied. The experimental results show that this method is useful specially in lapping process with the accuracy of $3\~5\;{\mu}m$. Those inspection data are provided for correcting the residual figuring error in lapping or polishing processes.

• Journal of Welding and Joining
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• v.33 no.4
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• pp.24-29
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• 2015

The current waveform was analysed to monitor the weld quality in real time process. The acquired current waveform was discretely analysed for the top and bottom limits of peaks as well as the pulse frequency measurement. Fast Fourier Transform was implemented in the program to monitor the pulse frequency in real time. The developed algorithm or program was tested for the validation purpose. The cross-section of weld profile was compared to the current waveform profile to correlate the monitored signal and the actual parts. Pulse frequency was also used as auxiliary tool for the quality monitoring. Based on the results, it was possible to evaluate the quality of welding by measure the current waveform profile and frequency measurement.

• Proceedings of the KSME Conference
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• 2001.06c
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• pp.197-201
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• 2001

Output and cost efficiency in the production of hot-rolled strip depend to a large content on the uniformity of geometric and mechanical properties over the length and width of the rolled end product. To ensure the homogeneous temperatures required for this during the rolling process a system to measure and evaluate the transverse temperature profile was developed and implemented in production. The systems used consist of temperature scanners and computers for measurement and data evaluation. The systems have been installed in Kwangyang hot strip mills, in the cases at the exit of the finishing train and at the entry of the coiler. They are used in production to determine the effect of the finishing train and the cooling zone on the technological properties of the hot rolled strip.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.2
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• pp.90-95
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• 2001

f-$\theta$len is one of the important parts in Laser Scanning Unit because it affects on the optical performance of Laser Scanning Unit dominantly. It is necessary to find out the relationship between the surface profile error of f-$\theta$lens and the beam profile focusing on the Organic Photo Conductive drum in order to analysis the beam profile problems such as appearance of side lobe and expansion of center lobe. In this research, a simulation process which relates the surface profile characteristics to the beam profile has been developed by CODE V. The simulated beam profile also have been compared with the measurement results.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.1749-1754
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• 2004

In order to measure non-intrusively velocity profile in liquid metal flow, a modified electromagnetic flowmeter was designed, which was based on electromagnetic tomography technique. Under the assumption that flow is fully-developed, axisymmetric and rectilinear, the velocity profile was reconstructed after the flowmeter equation, the first kind of Fredholm integration equation, was linearized. In reconstruction process Tikhonov regularization method with regularization parameter was used. The reconstructed velocity profile had the nearly same as turbulent flow profile which was approximately represented as log law. In addition, flowmeter output for a fixed magnet rotation angle was linearly proportional to flow rate. When magnet rotation angle was $54^{\circ}$, axisymmetric weight function was nearly uniform so that the flowmeter gives a constant signal for any fully-developed, axisymmetric and rectilinear profile with a constant flow rate.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.289.1-289.1
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• 2016

Germanium (Ge) with higher carrier mobility and a lower crystallization temperature has been considered as the channel material of thin-film transistors for display applications. Various methods were studied for crystallizaion of poly-Ge from amorphous Ge at low temperature. Especially Metal induced crystalliazation (MIC) process was widely studied because low process cost. In this paper, we investigate copper diffusion process of different thick (70 nm, 350 nm) poly-Ge film obtained by MIC process at various temperatures (250, 300, and $350^{\circ}C$) through atomic force microscopy (AFM), Raman spectroscopy, and secondary ion mass spectroscopy (SIMS) measurement. Crystallization completeness and grain size was similar in all the conditions. Copper diffusion profile of 370 nm poly-Ge film show simirly results regardless of process temperature. However, copper diffusion profile of 70 nm poly-Ge film show different results by process temperature.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.28 no.10
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• pp.1271-1278
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• 2004

In order to measure non-intrusively velocity profile in liquid metal flow, a modified electromagnetic flowmeter was designed, which was based on electromagnetic tomography technique. Under the assumption that flow is fully-developed, axisymmetric and rectilinear, the velocity profile was reconstructed after the flowmeter equation, the first kind of Fredholm integration equation, was linearized. In reconstruction process Tikhonov regularization method with regularization parameter was used. The reconstructed velocity profile had the nearly same as turbulent flow profile which was approximately represented as log law. In addition, flowmeter output fur a fixed magnet rotation angle was linearly proportional to flow rate. When magnet rotation angle was 54$^{\circ}$, axisymmetric weight function was nearly uniform so that the flowmeter gives a constant signal for any fully-developed, axisymmetric and rectilinear profile with a constant flow rate.

• Korean Journal of Optics and Photonics
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• v.14 no.5
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• pp.504-508
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• 2003

We present a new point-diffraction interferometer, which has been devised for the three-dimensional profile measurement of light scattering rough surfaces. The interferometer system has multiple sources of two-point-diffraction and a CCD camera composed of an array of two-dimensional photodetectors. Each diffraction source is an independent two-point-diffraction interferometer made of a pair of single-mode optical fibers, which are housed in a ceramic ferrule to emit two spherical wave fronts by means of diffraction at their free ends. The two spherical wave fronts then interfere with each other and subsequently generate a unique fringe pattern on the test surface. A He-Ne source provides coherent light to the two fibers through a 2${\times}$l optical coupler, and one of the fibers is elongated by use of a piezoelectric tube to produce phase shifting. The xyz coordinates of the target surface are determined by fitting the measured phase data into a global model of multilateration. Measurement has been performed for the warpage inspection of chip scale packages (CSPs) that are tape-mounted on ball grid arrays (BGAs) and backside profile of a silicon wafer in the middle of integrated-circuit fabrication process. When a diagonal profile is measured across the wafer, the maximum discrepancy turns out to be 5.6 ${\mu}{\textrm}{m}$ with a standard deviation of 1.5 ${\mu}{\textrm}{m}$.