• 반도체디스플레이기술학회지
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• 제15권2호
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• pp.6-10
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• 2016

In RF plasma processing, when the plasma is generated, there is the difference of impedance between RF generator and plasma source. Its difference is normally reduced by using the matcher and the RF power is transferred efficiently from the power generator to the plasma source. The generated plasma has source impedance that it can be changed during processing by pressure, frequency, density and so on. If the range of source impedance excesses the matching range of the matcher, it cannot match all value of the impedance. In this research, we studied the elevation mechanism of the RF power delivery efficiency between RF generator to the plasma source by using the transmission line and impedance tuning of the plasma source. We focus on two plasma sources (capacitive coupled plasma (CCP), inductive coupled plasma (ICP)) which is most widely used in industry recently.

• Journal of Information Processing Systems
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• 제16권1호
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• pp.120-131
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• 2020

In order to solve the problem of point clouds coordinate conversion of non-directional scanners, this paper proposes a basic Rodrigues rotation method. Specifically, we convert the 6 degree-of-freedom (6-DOF) rotation and translation matrix into the uniaxial rotation matrix, and establish the equation of objective vector conversion based on the basic Rodrigues rotation scheme. We demonstrate the applicability of the new method by using a bar-shaped emboss point clouds as experimental input, the three-axis error and three-term error as validate indicators. The results suggest that the new method does not need linearization and is suitable for optional rotation angle. Meanwhile, the new method achieves the seamless splicing of point clouds. Furthermore, the coordinate conversion scheme proposed in this paper performs superiority by comparing with the iterative closest point (ICP) conversion method. Therefore, the basic Rodrigues rotation method is not only regarded as a suitable tool to achieve the conversion of point clouds, but also provides certain reference and guidance for similar projects.

• 한국표면공학회지
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• 제49권1호
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• pp.98-103
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• 2016

The dry etching characteristics of SnO thin films were investigated using inductively coupled plasma (ICP) in Ar, $CF_4$, $Cl_2$ chemistries. the SnO thin films were deposited by reactive rf magnetron sputtering with Sn metal target. In order to study the etching rates of SnO, the processing factors of processing pressure, source power, bias power, and etching gas were controlled. The etching behavior of SnO films under various conditions was obtained and discussed by comparing to that of $SiO_2$ films. In our results, the etch rate of SnO film was obtained as 94nm/min. The etch rates were mainly affected by physical etching and the contribution of chemical etching to SnO films appeared relatively week.

• Journal of Ceramic Processing Research
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• 제19권6호
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• pp.492-498
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• 2018

In this study, a sea shell was converted into bioceramic phases at three different sintering temperatures ($450^{\circ}C$, $850^{\circ}C$, $1000^{\circ}C$). Among the obtained bioceramic phases, a valuable ${\beta}-TCP$ was produced via mechanochemical conversion method from sea snail Turritella terebra at $1000^{\circ}C$ sintering temperature. For this reason, only the bioceramic sintered at $1000^{\circ}C$ was concentrated on and FT-IR, SEM/EDX, BET, XRD, ICP-OES analyses were carried out for the complete characterization of ${\beta}-TCP$ phase. Biodegradation test in Tris-buffer solution, bioactivity tests in simulated body fluid (SBF) and cell studies were conducted. Bioactivity test results were promising and high rate of cell viability was observed in MTT assay after 24 hours and 7 days incubation. Results demonstrated that the produced ${\beta}-TCP$ bioceramic is qualified for further consideration and experimentation with its features of pore size and ability to support bone tissue growth and cell proliferation. This study suggests an easy, economic method of nanobioceramic production.

• 한국식품영양과학회지
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• 제35권6호
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• pp.729-733
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• 2006

굴 자숙시 사용한 세척수를 농축하여 만든 굴 엑기스 제품에서 발생한 미세 결정물질을 분리하여 성분의 본체를 규명하고, 발생 원인을 추정하였다. 결정물질은 수분 8.1%, 유기물이 21.6%, 무기물 70.2%로 되어 있었으며, 유기물은 taurine, phosphoserine 등 9개의 유리아미노산을 함유하고 있었고, 무기물의 주성분은 ICP에 의하여 분석한 결과, Ca이 54.8%, P이 43.8%로 이 두 성분이 전체 무기질의 98.6%를 차지하였다. XRD 분석결과와 SEM 사진의 분석에 의하여 이 결정물질은 Ca와 인산이 결합된 $brushite(CaHPO_4{\cdot}2H_2O)$로 동정되었으며, 10 mg까지는 마우스에 독성을 나타내지 않았다. 결정물질이 생성된 굴 엑기스에서 결정물질을 제거한 다음 남은 엑기스와 결정물질이 생성되지 않은 굴 엑기스의 칼슘이나 인 등의 함량이 비슷하여, 이 결정물질이 원래 굴의 성분으로 함유되어 있거나 굴 엑기스의 제조과정 중에 만들어진 소량의 brushite가 농축과정에서 점차 농도가 진하여지고, 저장중 굴 엑기스 내의 다른 성분이나 외부의 요인들에 의하여 결정으로 성장하고, 이렇게 성장된 결정이 황갈색으로 착색된 굴 엑기스 내에서 혼재하여 확인되지 않고 있다가 비중 차이에 의하여 저장 중에 굴 엑기스를 담은 용기의 바닥에 침전된 것으로 추정된다.

• Carbon letters
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• 제10권1호
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• pp.5-8
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• 2009

We measured the non-carbon content of single-walled carbon nanotubes (SWCNTs) in SWCNT soot using thermogravimetric analysis. The weight increased percentage by the oxidation of metal in the raw soot is well obtained by TGA graph which was confirmed with ICP-AES, XRD, and XPS. This work will be very useful for the purity precise evaluation of SWCNT with UN-vis-NIR spectroscopy.

• 소성∙가공
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• 제14권7호
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• pp.624-627
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• 2005

In this paper, we investigated the possibility of replicating patterned media by nano-injection molding process with a metallic nano-stamper. The original nano-master was fabricated by I-beam lithography and ICP etching process. The metallic nano-stamper was fabricated using a nanoimprint lithography and nano-electroforming process. Finally, the nano-patterned substrate was replicated using a nano-injection molding process without additional etching process. The replicated patterns using nano-injection molding process were as small as 50nm in diameter, 150nm in pitch, and 50nm in depth.

• Journal of Computational Design and Engineering
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• 제1권4호
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• pp.223-232
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• 2014

This paper describes a variant of the extended Gaussian image based registration algorithm for point clouds with surface color information. The method correlates the distributions of surface normals for rotational alignment and grid occupancy for translational alignment with hue filters applied during the construction of surface normal histograms and occupancy grids. In this method, the size of the point cloud is reduced with a hue-based down sampling that is independent of the point sample density or local geometry. Experimental results show that use of the hue filters increases the registration speed and improves the registration accuracy. Coarse rigid transformations determined in this step enable fine alignment with dense, unfiltered point clouds or using Iterative Common Point (ICP) alignment techniques.

• 한국세라믹학회지
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• 제46권6호
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• pp.545-547
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• 2009

An immiscible Si/Sn (=7/3 by volume) powder mixture was subjected to simple grinding and subsequent leaching process to give Sn nanopowder reinforced or dispersed in Si powder. Crystallite and their agglomerates of Si were ca. 15 nm and 100 nm, respectively. Sn remained at 4.5 vol% in Si powder after aqueous HCl leaching, dispersively occluded in Si matrix as confirmed by ICP analysis and cross sectional TEM observation.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.144-144
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• 2011

Diagnostics of plasma density and temperature play an important role for monitoring plasma processing and Laser Thomson scattering is a one of the most accurate diagnostic technique for measuring plasma density and temperature because of none-perturbation to plasma among various diagnostic techniques invented to measure plasma density and temperature. I will briefly review Laser Thomson scattering experiment performed in KRISS and difficulties for measuring the electron velocity distribution such as Gaussian due to low signal-to-noise ratio with showing results that we got until now. This work is an intermediate step in a process that we will get a reliable data which shows physical phenomenon of plasma compared with other diagnostic techniques and results.