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http://dx.doi.org/10.5228/KSPP.2005.14.7.624

Replication of Patterned Media Using Nano-injection Molding Process  

Lee, Nam-Seok (연세대학교 기계공학부)
Choi, Yong (연세대학교 기계공학부)
Kang, Shin-Ill (연세대학교 기계공학부)
Publication Information
Transactions of Materials Processing / v.14, no.7, 2005 , pp. 624-627 More about this Journal
Abstract
In this paper, we investigated the possibility of replicating patterned media by nano-injection molding process with a metallic nano-stamper. The original nano-master was fabricated by I-beam lithography and ICP etching process. The metallic nano-stamper was fabricated using a nanoimprint lithography and nano-electroforming process. Finally, the nano-patterned substrate was replicated using a nano-injection molding process without additional etching process. The replicated patterns using nano-injection molding process were as small as 50nm in diameter, 150nm in pitch, and 50nm in depth.
Keywords
Metallic Nano-stamper; Polymeric Nano-pattern; Nano-injection Molding; Patterned Media;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
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