• Transactions on Electrical and Electronic Materials
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• 제9권6호
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• pp.231-236
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• 2008

B, P, and Cs ions were implanted with various parameters into silicon nitride layers prepared by LPCVD. In order to get the maximum impurity concentration at the silicon nitride surface, a high temperature oxide (HTO) buffer layers was deposited prior to the implantation. Alkali ion and pH sensing properties of the layers were investigated with an electrolyte-insulator-silicon (EIS) structure using high frequency capacitance-voltage (HF-CV) measurements. The ion sensing properties of implanted silicon nitrides were compared to those of as-deposited silicon nitride. Band Cs co-implanted silicon nitrides showed a pronounced difference in pH and alkali ion sensing properties compared to those of as-deposited silicon nitride. B or P implanted silicon nitrides in contrast showed similar ion sensitivities like those of as-deposited silicon nitride.

• Journal of Electrochemical Science and Technology
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• 제10권3호
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• pp.294-301
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• 2019

The quasi-solid-state hybrid electrolytes were synthesized by chemical cross-linking reaction of methacrylate-functionalized $SiO_2$ ($MA-SiO_2$) and tetra (ethylene glycol) diacrylate in aqueous electrolyte. A quasi-solid-state electrolyte synthesized by 6 wt.% $MA-SiO_2$ exhibited a high ionic conductivity of $177mS\;cm^{-1}$ at room temperature. The electrochemical $H_2$ sensor assembled with quasi-solid-state electrolyte showed relatively fast response and high sensitivity for hydrogen gas at ambient temperature, and exhibited better durability and stability than the liquid electrolyte-based sensor. The simple construction of the sensor and its sensing characteristics make the quasi-solid-state hydrogen sensor promising for practical application.

• Transactions on Electrical and Electronic Materials
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• 제17권5호
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• pp.302-305
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• 2016

In this paper, a low on-resistance and high current driving capability trench gate power metal-oxide-semiconductor field-effect transistor (MOSFET) incorporating a current sensing feature is proposed and evaluated. In order to realize higher cell density, higher current driving capability, cost-effective production, and higher reliability, self-aligned trench etching and hydrogen annealing techniques are developed. While maintaining low threshold voltage and simultaneously improving gate oxide integrity, the double-layer gate oxide technology was adapted. The trench gate power MOSFET was designed with a 0.6 μm trench width and 3.0 μm cell pitch. The evaluated on-resistance and breakdown voltage of the device were less than 24 mΩ and 105 V, respectively. The measured sensing ratio was approximately 70:1. Sensing ratio variations depending on the gate applied voltage of 4 V ~ 10 V were less than 5.6%.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.359-359
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• 2011

This study reports the H2S gas sensing properties of CuO / ZnO nano-hetero structure bundle and the investigation of gas sensing mechanism. The 1-Dimensional ZnO nano-structure was synthesized by hydrothermal method and CuO / ZnO nano-heterostructures were prepared by photo chemical reaction. Scanning electron microscopy (SEM) and X-ray diffraction (XRD) spectra confirmed a well-crystalline ZnO of hexagonal structure. In order to improve the H2S gas sensing properties, simple type of gas sensor was fabricated with ZnO nano-heterostructures, which were prepared by photo-chemical deposition of CuO on the ZnO nanorods bundle. The furnace type gas sensing system was used to characterize sensing properties with diluted H2S gas (50 ppm) balanced air at various operating temperature up to 500$^{\circ}C$. The H2S gas response of ZnO nanorods bundle sensor increased with increasing temperature, which is thought to be due to chemical reaction of nanorods with gas molecules. Through analysis of X-ray photoelectron spectroscopy (XPS), the sensing mechanism of ZnO nanorods bundle sensor was explained by well-known surface reaction between ZnO surface atoms and hydrogen sulfide. However at high sensing temperature, chemical conversion of ZnO nanorods becomes a dominant sensing mechanism in current system. Photo-chemically fabricated CuO/ZnO heteronanostructures show higher gas response and higher current level than ZnO nanorods bundle. The gas sensing mechanism of the heteronanostructure can be explained by the chemical conversion of sensing material through the reaction with H2S gas.

• 센서학회지
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• 제23권3호
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• pp.207-210
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• 2014

$TiO_2$ oxide semiconductor is being widely studied in various applications such as photocatalyst and photosensor. Pd/$TiO_2$ gas sensor is mainly used to detect $H_2$, CO and ethanol. This study focus on increasing hydrogen detection ability of Pd/$TiO_2$ in room temperature through Al-doping. Pd/$TiO_2$ was fabricated by the hydrothermal method. Contacting to Aluminum (Al) foil led to Al doping effect in Pd/$TiO_2$ by thermal diffusion and enhanced hydrogen sensing response. $TiO_2$ nanoparticles were sized at ~30 nm of diameter from scanning electron microscope (SEM) and maintained anatase crystal structure after Al doping from X-ray diffraction analysis. Presence of Al in $TiO_2$ was confirmed by X-ray photoelectron spectroscopy at 73 eV. SEM-energy dispersive spectroscopy measurement also confirmed 2 wt% Al in Pd/$TiO_2$ bulk. The gas sensing test was performed with $O_2$, $N_2$ and $H_2$ gas ambient. Pd/Al-doped $TiO_2$ did not response $O_2$ and $N_2$ gas in vacuum except $H_2$. Finally, the normalized resistance ratio ($R_{H2on}/R_{H2off}$) of Pd/Al-doped $TiO_2$ increases about 80% compared to Pd/$TiO_2$.

• 대한원격탐사학회지
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• 제37권3호
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• pp.591-601
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• 2021

국내의 화학 산업이 지속적으로 발전이 이루어짐에 따라 화학물질의 취급량과 운송량은 매년 증가하고 있다. 우리나라 도로 화물운송은 90%이상을 차지하고 있으며, 화학물질 운송도 대부분 도로를 통해 이루어지고 있다. 이러한 화학물질 운송차량들은 사고가 발생하게 되면 대형사고로 이어질 수 있다. 운송차량은 1차 피해인 교통사고뿐만 아니라 2차 피해인 환경 피해 요인들인 수질오염, 토양오염 등을 발생시킬 가능성이 높다. 본 연구는 반포IC와 서초IC 구간을 연구지역으로 설정하여 염화수소 가스 누출에 대한 시나리오를 작성하여, ALOHA 프로그램을 사용하여 예측거리를 측정하고 거리에 따라 염화수소 가스가 도달한 시간을 분석하였다. 또한 GIS를 이용해 시간별로 발생한 피해 영역에 대해서 인구밀도를 이용한 리스크 평가를 수행하였다. 이를 통해 피해 영역에 대해서 예방·대응 방안의 필요성을 제시하였다.

• 공업화학
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• 제22권3호
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• pp.243-248
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• 2011

상온에서 작동하는 고감도 수소 가스센서를 제조하기 위하여 Pt 촉매가 증착된 다공성 탄소나노섬유를 제조하였다. 나노섬유는 polyacrylonitrile을 탄소전구체로 하여 전기방사법을 이용하여 제조되었고, 탄소나노섬유의 제조를 위하여 열처리 공정을 거쳤다. 다음으로, 탄소나노섬유에 화학적 활성화 공정을 통하여 가스 흡착을 위한 높은 비표면적과 기공구조를 부여하였다. Pt는 수소가스에 대한 촉매효과를 위하여 스퍼터링법을 통해 다공성 탄소나노섬유에 증착되었다. 탄소나노섬유는 화학적 활성화 공정을 통해 비표면적이 $2093m^2/g$으로 100배 이상 증가하였고, 약 60 vol%의 미세기공이 부여되었다. Pt는 다공성 탄소나노섬유의 형태를 그대로 유지하면서 얇고 고르게 증착되었다. 제조된 가스센서의 반응속도와 민감도는 비표면적, 미세기공율의 증가와 Pt 증착에 의하여 증가하였다. 결과적으로 수소가스에 대한 탄소나노섬유 상온에서 감응특성은 화학적 활성화와 Pt의 촉매효과에 의하여 향상됨을 알 수 있었다.

• 센서학회지
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• 제32권3호
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• pp.194-198
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• 2023

With the recent development of industrial technology, the problem of odor due to leakage of toxic gas discharged from industrial complexes is gradually increasing. Among them, hydrogen sulfide is a colorless representative odorous substance that can cause pain through irritation of the mucous membranes of the eyes and respiratory tract, and is a gas that can cause central nervous system paralysis and suffocation when exposed to high concentrations. Therefore, in order to improve the odor problem, research on a gas sensor capable of quickly and reliably detecting a leak of hydrogen sulfide is being actively conducted. A lot of research has been done on the existing metal oxide-based hydrogen sulfide gas sensor, but it has the disadvantage of requiring low selectivity and high temperature operating conditions. Therefore, in this study, a Pt/CNT-based electrochemical hydrogen sulfide gas sensor capable of detecting at low temperatures with high selectivity for hydrogen sulfide was developed. A working electrode capable of selectively detecting only hydrogen sulfide was fabricated by synthesizing Pt nanoparticles as a catalyst on functionalized CNT and applied to an electrochemical hydrogen sulfide gas sensor. It was confirmed that the manufactured Pt/CNT-based electrochemical hydrogen sulfide gas sensor has a current change of up to 100uA for hydrogen sulfide, and the both response time and recovery time were within 15 seconds.

• 한국인터넷방송통신학회논문지
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• 제23권6호
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• pp.81-87
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• 2023

수소충전소와 수소전기차 간의 통신 프로토콜인 SAE J2601과 SAE J2799는 수소 충전에 관련된 내용만을 다루고 있다. 본 논문에서는 수소전기차의 수소검출, 전류, 전압을 측정하여, 수소충전소로 WiFi 프로토콜을 변화시켜 가면서 센서 데이터를 전송한다. 수소전기차의 센싱, 제어 및 센서 데이터 전송을 위해, 라즈베리파이를 이용하여 소규모 실험실 모델을 만들었다. 센서 데이터를 수소충전소의 데이터베이스에 저장하였고, 저장된 데이터 분석을 위해 그라파나를 이용하여 대쉬보드를 구성하였다. 수소가 검출되면 수소충전소의 디스펜서 밸브를 잠근다. 그리고 WiFi 프로토콜에 따른 평균 전송 지연을 측정하였다. 전송 지연 측정 결과, 수소충전소와 수소전기차간의 센서 데이터 전송을 위한 WiFi 프로토콜은 IEEE 802.11a가 가장 적합하였다.

• 센서학회지
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• 제17권2호
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• pp.143-146
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• 2008

Polymer-coated film SAW sensors have been fabricated and their sensing properties for toxic chemicals have been extensively investigated. Four types of the toxic chemical compounds of hydrogen cyanide(AC), carbonyl dichloride(CG), pinacolyl methylfluorophosphonate(GD), 2,2'-dichlorodiethylthio ether(HD) were used as target gases. SAW sensors using five different kinds of polymers were used to detect toxic chemicals and their gas sensing characteristics were investigated. The polymers used as the sensing materials were polyisobutylene(PIB), polyepichlorohydrin(PECH), polydimethylsiloxane(PDMS), polybutadiene(PBD) and polyisoprene(PIP). The recommendable mixing ratio of PIB, PECH, PDMS, PBD and PIP to solvents were 1:30, 1:40, 1:10, 1:30 and 1:30, respectively. The sensing characteristics of the SAW sensors were measured by using E-5061A network analyzer.