Digital recess etching for advanced performance of 0.25$\mu\textrm{m}$ Double-heterostructure AIGaAs/GaAs PHEMT
(0-25 $\mu\textrm{m}$ gate Double-heterostructure AIGaAs/GaAs PHEMT의 성능향상을 위한 디지털 리세스에 대한 연구)
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- Proceedings of the IEEK Conference
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- 2002.06b
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- pp.213-216
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- 2002