• 제목/요약/키워드: Humidity-sensing material

검색결과 39건 처리시간 0.026초

Fiber-optic humidity sensor system for the monitoring and detection of coolant leakage in nuclear power plants

  • Kim, Hye Jin;Shin, Hyun Young;Pyeon, Cheol Ho;Kim, Sin;Lee, Bongsoo
    • Nuclear Engineering and Technology
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    • 제52권8호
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    • pp.1689-1696
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    • 2020
  • In this study, we developed a fiber-optic humidity sensor (FOHS) system for the monitoring and detection of coolant leakage in nuclear power plants. The FOHS system includes an FOHS, a spectrometer, a halogen white-light source, and a Y-coupler. The FOHS is composed of a humidity-sensing material, a metal tube, a multi-mode plastic optical fiber, and a subminiature version A (SMA) fiber-optic connector. The humidity-sensing material is synthesized from a mixture of polyvinylidene fluoride (PVDF) in dimethyl sulfoxide (DMSO) and hydroxyethyl cellulose (HEC) in distilled water. We measured the optical intensity of the light signals reflected from the FOHS placed inside the humidity chamber with relative humidity (RH) variation from 40 to 95%. We found that the optical intensity of the sensing probe increased linearly with the RH. The reversibility and reproducibility of the FOHS were also evaluated.

양극산화법으로 제조한 산화 알루미늄 막의 감습특성 연구 (A study on humidity sensing properties of oxide aluminum films by Anodic oxidation)

  • 전범진;전용우;이월인;소대화
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1994년도 추계학술대회 논문집
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    • pp.113-117
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    • 1994
  • In this paper, an experiment about humidity sensing properties of oxide aluminum films by Anodic oxidation method was made. The humidity sensing properties of films were investigated in the relative humidity range of 10∼85(%RH) , changing the frequency from 1[kHz] to 100[kHz]. The impedance of humidity sensing films were decreased in accordance with the increase of relative humidity. The decreasing rate of impedance were larger at low measuring frequency. The decreasing difference changes from 17.7M$\Omega$ to 3.68M$\Omega$ at low measuring frequency.

${Sb_2}{O_3)$ 의 첨가가 $SnO_2$후막의 감습 특성에 미치는 영향 (The Influence ${Sb_2}{O_3)$ Addition on Humidity Sensing Properties of $SnO_2$Thick Film Devices)

  • 김종택;이덕출;김철수
    • 한국전기전자재료학회논문지
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    • 제13권4호
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    • pp.294-299
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    • 2000
  • For practical application as a humidity sensor SnO$_2$thick films devices were fabricated on the refresh type electrode by screen printing method and their material and humidity sensing properties were investigated. As a function of Sb$_{2}$/O$_{3}$ addition rate grain size was increased while porosity and initial resistance were rapidly decreased. And the area of resistance variation according to relative humidity was decreased with increasing heat treatment temperature. SnO$_2$thick film device heat treated at 95$0^{\circ}C$ and contained 0.05mole% Sb$_{2}$/O$_{3}$ had a best humidity sensing properties. From this result it is conformed that humidity sensing properties of SnO$_2$thick film devices could be approved by very small amount of Sb$_{2}$/O$_{3}$ addition.

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에어로졸 증착한 세라믹/금속 복합막의 금속 함량에 따른 습도 감지 특성 연구 (Study of Humidity Sensing Properties Related to Metal Content of Aerosol Deposited Ceramic/Metal Composite Films)

  • 김익수;구상모;박철환;신원호;이동원;오종민
    • 한국전기전자재료학회논문지
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    • 제34권5호
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    • pp.314-320
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    • 2021
  • Controlling ambient humid condition through high performance humidity sensors has become important for various fields, including industrial process, food storage, and the preservation of historic remains. Although aerosol deposited humidity sensors using ceramic BaTiO3 (BT) material have been widely studied because of their longtime stability, there remain critical disadvantages, such as low sensitivity, low linearity, and slow response/recovery time in case of the sensors fabricated at room temperature. To achieve superior humidity sensing properties even at room temperature condition, BT-Cu composite films utilizing aerosol deposition (AD) process have been proposed based on the percolation theory. The BT-Cu composite films showed gradually improved sensing properties until the Cu concentration reached 15 wt% in the composite film. However, the excessive Cu (above 30 wt%) containing BT-Cu composite films showed a rapid decrease of the sensing properties. The results of observed surface morphology of the AD fabricated composite films, to figure out the metal filler effect, showed correlation between surface topography as well as size and the amount of open pores according to the metal filler content. Overall, it is very important not only dielectric constant of the humidity sensing films but also microstructures, because they affect either the variation range of capacitance by ambient humidity or adsorption/desorption of ambient humidity onto/from the humidity sensing films.

$TiO_2-V_2O_5$ 박막형 습도센서의 개발에 관한 연구 (A Study on the Development of $TiO_2-V_2O_5$ Thin Film Type Humidity Sensors)

  • 유도현;진윤영;박춘배;김명봉;조성욱;이덕출
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1993년도 춘계학술대회 논문집
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    • pp.142-145
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    • 1993
  • $TiO_2-V_2O_5$ thin films are fabricated by Sol-Gel method and humidity sensing properties have been investigated. As the results of humidity sensing properties of thin films fabricated as humidity sensor, it is confirmed to have good humidity sensing properties in high humidity and low frequency regions.

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산화물 반도체 가스 센서의 습도 의존성 제거 기술 (Humidity Dependence Removal Technology in Oxide Semiconductor Gas Sensors)

  • 박지호;윤지욱
    • 한국전기전자재료학회논문지
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    • 제37권4호
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    • pp.347-357
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    • 2024
  • Oxide semiconductor gas sensors are widely used for detecting toxic, explosive, and flammable gases due to their simple structure, cost-effectiveness, and potential integration into compact devices. However, their reliable gas detection is hindered by a longstanding issue known as humidity dependence, wherein the sensor resistance and gas response change significantly in the presence of moisture. This problem has persisted since the inception of oxide semiconductor gas sensors in the 1960s. This paper explores the root causes of humidity dependence in oxide semiconductor gas sensors and presents strategies to address this challenge. Mitigation strategies include functionalizing the gas-sensing material with noble metal/transition metal oxides and rare-earth/rare-earth oxides, as well as implementing a moisture barrier layer to prevent moisture diffusion into the gas-sensing film. Developing oxide semiconductor gas sensors immune to humidity dependence is expected to yield substantial socioeconomic benefits by enabling medical diagnosis, food quality assessment, environmental monitoring, and sensor network establishment.

$TiO_2-Co_3O_4$ 습도센서의 제조 및 감습 특성 (Fabrication and Humidity Sensing Characteristics of $TiO_2-Co_3O_4$ Humidity Sensors)

  • 이정호;정재업;이성필
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2002년도 추계학술대회 논문집 Vol.15
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    • pp.464-467
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    • 2002
  • $TiO_{2}-Co_{3}O_{4}$ humidity sensors were fabricated by conventional ceramic process and their humid sensing characteristics were investigated. The sample which was added 10wt% $Co_{3}O_{4}$ and heat-treated $1200^{\circ}C$ showed the highest sensitivity to humidity changes and improved a linearity. As $Co_{3}O_{4}$ content was increasing, the sensor consists a uniform pore distribution and grain in the surface. This was analyzed by SEM photographs.

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Sol-Gel 법에 의한 $TiO_2$ 박막의 제조 및 물성에 관한 연구 (A study on the fabrication and properties of $TiO_2$ thin films by Sol-Gel Method)

  • 유도현;김진수;강대하;김용혁;이덕출
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 1992년도 추계학술대회 논문집
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    • pp.59-62
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    • 1992
  • In this study, $TiO_2$ thin films are fabricated by Sol-Gel method and dielectric, electric and humidity sensing properties have been investigated. The structure of Sol can be changed by controlling for hydrolysis reaction condition. The uniformity of the surface on $TiO_2$ thin films is confirmed by SEM. The permittivity of $TiO_2$ thin films increases according to heat treatment temperature, whereas the conductivity of $TiO_2$ thin films decreases according to heat treatment temperature, As the results of measuring humidity sensing properties of $TiO_2$ thin films fabricated as humidity sensor, it is confirmed to have good humidity sensing properties in high humidity and low frequency.

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Sol-Gel법에 의한 $TiO_2$ 박막의 제작과 전기적 특성에 관한 연구 (A study on the fabrication and the electrical properties of TiO$_{2}$ thin films by Sol-Gel method)

  • 유도현;강대하;이능현;김진수;이덕출
    • E2M - 전기 전자와 첨단 소재
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    • 제7권4호
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    • pp.325-330
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    • 1994
  • In this paper, $TiO_2$ thin films were fabricated by Sol-Gel method and their electrical conductivity and humidity sensing properties have been investigated. The structure of Sol can be changed by controlling for hydrolysis condition. The uniform surface of thin films was confirmed by SEM. The electrical conductivity of thin films decreased with increasing heat treatment temperature. The humidity sensing properties of thin films were good in high humidity and low frequency regions.

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결정성 질화탄소막의 습도 감지특성에 관한 연구 (A Study on the Humidity Sensing Properties of Crystalline Carbon Nitride Films)

  • 이지공;하세근;김정훈;이성필
    • 한국전기전자재료학회논문지
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    • 제17권5호
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    • pp.521-525
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    • 2004
  • Crystalline carbon nitride films were attempted for an application of humidity sensors. The films were deposited on $Al_2$O$_3$substrate having intermigrated electrodes by reactive rf magnetron sputtering system. The film revealed a good humidity-resistance characteristics as well as humidity-capacitance ones in the humidity range of 10∼95 RH(%). Temperature dependence was also investigated. These results suggest that the carbon nitride film has a possibility for new humidity-sensitive material.