Browse > Article
http://dx.doi.org/10.4313/JKEM.2004.17.5.521

A Study on the Humidity Sensing Properties of Crystalline Carbon Nitride Films  

이지공 (경남대학교 전기전자공학부)
하세근 (경남대학교 전기전자공학)
김정훈 (경남대학교 전기전자공학)
이성필 (경남대학교 전기전자공학부)
Publication Information
Journal of the Korean Institute of Electrical and Electronic Material Engineers / v.17, no.5, 2004 , pp. 521-525 More about this Journal
Abstract
Crystalline carbon nitride films were attempted for an application of humidity sensors. The films were deposited on $Al_2$O$_3$substrate having intermigrated electrodes by reactive rf magnetron sputtering system. The film revealed a good humidity-resistance characteristics as well as humidity-capacitance ones in the humidity range of 10∼95 RH(%). Temperature dependence was also investigated. These results suggest that the carbon nitride film has a possibility for new humidity-sensitive material.
Keywords
Humidity sensors; Carbon nitride films; Sputtering system;
Citations & Related Records
Times Cited By KSCI : 2  (Citation Analysis)
연도 인용수 순위
1 Prediction of new low compressibility solids /
[ A.Y.Liu;M.L.Cohen ] / Science   DOI   ScienceOn
2 A capacitive humidity sensors with very fast response time and very low hysteresis /
[ H.Grange;C.Bieth;H.Boucher;G.Delapierre ] / Proc. of the 2nd IMCS
3 resonant-microbridge vapor sensor /
[ R.T.Howe;R.S.Muller ] / IEEE
4 A thin-film resistance humidity sensor /
[ M.Hijikigawa;S.Miydshi;T.Sugihara;A.Jinda ] / Sensors and Actuators   DOI   ScienceOn
5 반응성 스퍼터링으로 성장된 결정성 질화탄소막의 결정성 분석 /
[ 이지공;하세근;이성필 ] / 전기전자재료학회지
6 Effect of hydrogen on carbon nitride film deposition /
[ S.P.Lee;J.B.Kang;S.Chowdhury ] / J. Korean Phys. Soc.
7 Nanostructured carbon nitride films for fumidity sensor application /
[ 이지공;이성필 ] / 3rd International Conference on Advanced Materials and Devices
8 Humidity sensors: principles and application /
[ N.Yamazoe;Y.Shimizu ] / Sensors and Actuators   DOI   ScienceOn
9 반응성 스퍼터링으로 성장된 결정성 질화탄소막의 기계적 특성 /
[ 이성필;강종봉 ] / 전기전자재료학회논문지   과학기술학회마을   DOI   ScienceOn
10 Humidity-sensitive and water-resistive polymeric materials /
[ Y.Sakai;Y.Sadaoka;Jukumoto ] / Sensors and Actuators   DOI   ScienceOn
11 기판과 성장조건에 따른 질화 탄소막의 결정성장 특성 /
[ 이지공;이성필 ] / 전기전자재료학회논문지   과학기술학회마을
12 Humidity-sensitive electrical conduction of MgCr₂O₄-TiO₂ porous ceramics /
[ T.Nitta;Z.Terada;S.Hayagawa ] / J. Am. Cer. Soc.
13 Humidity effect on the critical number of friction cycles for wear particle generation in carbon nitride coatings /
[ D.F.Wang;K.Kato ] / Wear   DOI   ScienceOn
14 Humidity sensitive field effect transistors /
[ S.P.Lee;K.J.Park ] / Sensors and Actuators