Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on the Development of $TiO_2-V_2O_5$ Thin Film Type Humidity Sensors

$TiO_2-V_2O_5$ 박막형 습도센서의 개발에 관한 연구

  • You, D.H. (Dept. of Electrical Eng. Inha Univ.) ;
  • Jin, Y.Y. (Dept. of Electrical Eng. Inha Univ.) ;
  • Park, C.B. (Dept. of Materials Eng. Wonkwang Univ.) ;
  • Kim, Y.B. (Dept. of Electrical Eng. Inha Industrial Col.) ;
  • Cho, S.Y. (Dept. of Electrical Eng. Inha Industrial Col.) ;
  • Lee, D.C. (Dept. of Electrical Eng. Inha Univ.)
  • Published : 1993.05.15
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Abstract

$TiO_2-V_2O_5$ thin films are fabricated by Sol-Gel method and humidity sensing properties have been investigated. As the results of humidity sensing properties of thin films fabricated as humidity sensor, it is confirmed to have good humidity sensing properties in high humidity and low frequency regions.

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