Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Humidity Dependence Removal Technology in Oxide Semiconductor Gas Sensors

산화물 반도체 가스 센서의 습도 의존성 제거 기술

  • Jiho Park (Division of Advanced Materials Engineering, College of Engineering, Jeonbuk National University) ;
  • Ji-Wook Yoon (Division of Advanced Materials Engineering, College of Engineering, Jeonbuk National University)
  • 박지호 (전북대학교 신소재공학부 정보소재공학전공) ;
  • 윤지욱 (전북대학교 신소재공학부 정보소재공학전공)
  • Received : 2024.05.13
  • Accepted : 2024.05.21
  • Published : 2024.07.01
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Abstract

Oxide semiconductor gas sensors are widely used for detecting toxic, explosive, and flammable gases due to their simple structure, cost-effectiveness, and potential integration into compact devices. However, their reliable gas detection is hindered by a longstanding issue known as humidity dependence, wherein the sensor resistance and gas response change significantly in the presence of moisture. This problem has persisted since the inception of oxide semiconductor gas sensors in the 1960s. This paper explores the root causes of humidity dependence in oxide semiconductor gas sensors and presents strategies to address this challenge. Mitigation strategies include functionalizing the gas-sensing material with noble metal/transition metal oxides and rare-earth/rare-earth oxides, as well as implementing a moisture barrier layer to prevent moisture diffusion into the gas-sensing film. Developing oxide semiconductor gas sensors immune to humidity dependence is expected to yield substantial socioeconomic benefits by enabling medical diagnosis, food quality assessment, environmental monitoring, and sensor network establishment.

Keywords

Acknowledgement

This research was supported by Korea Institute of Marine Science & Technology Promotion (KIMST) funded by the Ministry of Oceans and Fisheries (RS-2023-00239826). This work was also carried out with the support of 'Cooperative Research Program for Agriculture Science and Technology Development (Project No.PJ016994)' Rural Development Administration, Republic of Korea.

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