Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A study on humidity sensing properties of oxide aluminum films by Anodic oxidation

양극산화법으로 제조한 산화 알루미늄 막의 감습특성 연구

  • 전범진 (명지대학교 전자공학과) ;
  • 전용우 (명지대학교 전자공학과) ;
  • 이월인 (명지대학교 전자공학과) ;
  • 소대화 (명지대학교 전자공학과)
  • Published : 1994.11.01

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Abstract

In this paper, an experiment about humidity sensing properties of oxide aluminum films by Anodic oxidation method was made. The humidity sensing properties of films were investigated in the relative humidity range of 10∼85(%RH) , changing the frequency from 1[kHz] to 100[kHz]. The impedance of humidity sensing films were decreased in accordance with the increase of relative humidity. The decreasing rate of impedance were larger at low measuring frequency. The decreasing difference changes from 17.7M$\Omega$ to 3.68M$\Omega$ at low measuring frequency.

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