Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Fabrication and Humidity Sensing Characteristics of $TiO_2-Co_3O_4$ Humidity Sensors

$TiO_2-Co_3O_4$ 습도센서의 제조 및 감습 특성

  • Lee, Jung-Ho (Department of Electrical and Electronic Engineering, Kyungnam University) ;
  • Jung, Jae-Up (Department of Electrical and Electronic Engineering, Kyungnam University) ;
  • Lee, Sung-Pil (Department of Electrical and Electronic Engineering, Kyungnam University)
  • 이정호 (경남대학교 전기전자공학부) ;
  • 정재업 (경남대학교 전기전자공학부) ;
  • 이성필 (경남대학교 전기전자공학부)
  • Published : 2002.11.07
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Abstract

$TiO_{2}-Co_{3}O_{4}$ humidity sensors were fabricated by conventional ceramic process and their humid sensing characteristics were investigated. The sample which was added 10wt% $Co_{3}O_{4}$ and heat-treated $1200^{\circ}C$ showed the highest sensitivity to humidity changes and improved a linearity. As $Co_{3}O_{4}$ content was increasing, the sensor consists a uniform pore distribution and grain in the surface. This was analyzed by SEM photographs.

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