• 센서학회지
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• 제21권6호
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• pp.420-424
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• 2012

We have investigated temperature dependence and long-term change of humidity measurement from 32 relative humidity sensors. The readings of the humidity sensors depended not only the reference humidity, but also temperature of the chamber. Approximately, the temperature dependence of the humidity sensor in average was 0.05 %R.H./$^{\circ}C$ in the temperature range from $5^{\circ}C$ to $55^{\circ}C$. For humidity sensors that have an internal temperature compensation circuit, the resulting temperature dependence was weaker by 20%. It should be also noted that for the humidity sensors used in this work underwent ${\pm}3$ %R.H. change per year for level of confidence of 95%. The users of relative humidity sensors may refer this value as a minimum change when they set the calibration interval of the humidity sensors.

• 한국전기전자재료학회논문지
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• 제37권4호
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• pp.347-357
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• 2024

Oxide semiconductor gas sensors are widely used for detecting toxic, explosive, and flammable gases due to their simple structure, cost-effectiveness, and potential integration into compact devices. However, their reliable gas detection is hindered by a longstanding issue known as humidity dependence, wherein the sensor resistance and gas response change significantly in the presence of moisture. This problem has persisted since the inception of oxide semiconductor gas sensors in the 1960s. This paper explores the root causes of humidity dependence in oxide semiconductor gas sensors and presents strategies to address this challenge. Mitigation strategies include functionalizing the gas-sensing material with noble metal/transition metal oxides and rare-earth/rare-earth oxides, as well as implementing a moisture barrier layer to prevent moisture diffusion into the gas-sensing film. Developing oxide semiconductor gas sensors immune to humidity dependence is expected to yield substantial socioeconomic benefits by enabling medical diagnosis, food quality assessment, environmental monitoring, and sensor network establishment.

• Macromolecular Research
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• 제13권2호
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• pp.96-101
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• 2005

Thin-film humidity sensors were prepared using inorganic/organic hybrid polyelectrolytes, which were prepared from the sol-gel reaction of copolymers of [2-(methacryloyloxy)ethyl]dimethylpropylammonium bromide (MEPAB), n-butyl methacrylate (BMA), and 3-(trimethoxysilyl)propyl methacrylate (TSPM) with tetraethyl ortho-silicate (TEOS). The humidity-sensitive polyelectrolytes were composed of the copolymers having the following mole ratios of MEPAB, BMA, and TSPM: 60/30/10, 55/30/15, and 50/30/20. We found that the impedance varied with the content of MEPAB or TEOS; it ranged from $10^{7} to 10^{3}\Omega$ between 20 and $95\%$ relative humidity, which is the range required for a humidity sensor operating at ambient humidity. In addition we investigated a number of characteristics of these humidity sensors, such as their hysteresis, response time, temperature dependence, frequency dependence, water durability, and long-term stability.

• Macromolecular Research
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• 제11권5호
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• pp.322-327
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• 2003

Two kinds of mutually cross-linkable copolymers were prepared to be used as humidity-sensing materials. The humidity-sensitive thin films consist of cross-linked polyelectrolytes of the following component: 4-vinylbenzyl dimethyl 2-(dimethylphosphino)ethyl phosphonium chloride (1)/ bis(2-methoxyethyl)itaconate (2)= 3/l, 2/l, 1/1 and 1/2 and 4-vinylbenzyl chloride (3)/ vinylbenzyl tributyl phosphonium chloride (4)= 3/l, 2/l, 1/1 and 1/2. The humidity sensor prepared from the reaction of 1/2= 2/l with 3/4= 2/l showed an average resistance of 723,36.2 and 2.42 ㏀ at 30, 60 and 90%RH, respectively. Temperature dependence, frequency dependence, and response time were measured and the reliability test such as water durability and long-term stability were also estimated.

• 한국진공학회지
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• 제15권3호
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• pp.287-293
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• 2006

R.F. PACVD법을 이용하여, 벤젠을 반응기체로 사용하여 순수한 DLC필름을 증착하였다. DLC필름의 마찰마모특성은 시험 환경을 제어하기 위하여 챔버로 고립된 ball-on-disk형식의 마모시험기를 이용하여 측정하였다. 상대습도에 따른 필름의 마찰특성을 관찰하기 위하여, 상압에서 챔버 내의 습도를 0-90%로 조절하면서 관찰하였다. 그리고 상대면 물질의 영향을 알아보기 위하여 스틸볼과 함께 DLC필름이 코팅된 스틸볼을 사용하였다. 스틸볼을 사용시 습도가 0%에서 90%로 증가함에 따라 마찰계수가 0.025에서 0.2로 크게 증가하였다. Ferich debris가 생성되지 않는 DLC가 코팅된 볼을 사용하여 실험한 경우에, 마찰계수는 상대 습도가 90%인 경우에도 0.08정도로, 스틸볼을 사용하였을 경우보다 훨씬 더 낮은 습도의존성을 보여주었다. 스틸볼 사용시 나타나는 DLC필름의 마찰계수의 큰 습도의존성은 습도가 증가함에 따라 debris의 크기 증가와 함께 스틸볼의 마모로 인한 Fe-rich debris의 생성과 밀접한 관계가 있음을 확인 할 수 있었다. 그리고 스틸볼을 사용하여 90%의 습도에서 마모시험을 하는 중간에 습도를 0%로 변화시키며 관찰한 결과, 마찰계수 값이 급격히 감소하였다. 이와 같은 결과를 통하여, Fe-rich debris가 마찰계수에 미치는 영향은 debris내의 Fe원소가 습도에 매우 민감한 흑연상의 전이층을 형성시킨다는 것을 확인 할 수 있었다.

• 한국진공학회지
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• 제13권4호
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• pp.157-163
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• 2004

라디오파 플라즈마 화학증착법 (radio frequency plasma assisted chemical vapor deposition: r.f.-PACVD) 법으로 증착된 다이아몬드성 카본 (Diamond-like Carbon : DLC) 필름에서 나타나는 습도에 따른 압축 잔류 응력의 변화 거동을 체계적으로 조사하였다. 합성에 사용된 탄화수소 가스의 종류와 -100V에서 -800V 범위의 기판 바이어스 전압의 조절을 통해 폴리머성 필름에서 흑연성 필름까지 광범위한 구조의 DLC 필름을 합성하였다. 상대습도가 10％-90％ 범위에서 변화하는 분위기 챔버 내에서 박막의 잔류응력의 변화를 실시간으로 측정하였다 박막의 경도와 잔류응력이 최고 값을 가지는 합성조건에서 얻어진 치밀한 DLC박막에서는 습도에 따른 잔류응력의 변화가 관찰되지 않았다. 그러나, 폴리머상이나 흑연상의 박막에서는 두 경우 모두 습도가 높아짐에 따라 압축 잔류응력이 증가함을 관찰할 수 있었으며, 습도의 변화에 대해 잔류응력이 즉각적으로 변화하였다. 한편, 동일한 습도에서 압축 잔류응력의 증가량은 필름의 두께에 반비례하는 것이 관찰되었다. 이 결과는 물분자가 필름의 구조내로 침투하면서 생기는 변화가 아니라, 박막의 표면에서 일어나는 물분자와의 반응에 의해 필름의 잔류응력이 변할 수 있음을 의미한다.

• 한국세라믹학회지
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• 제53권5호
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• pp.511-520
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• 2016

Electrolyte-supported symmetric Ni-YSZ cermet electrodes of ca. $23{\mu}m$ were prepared by screenprinting and the impedance was measured as a function of humidity from 2% to 90% balanced in $H_2$ at a total flow rate of 50 sccm. The Ni felt current collector of 1 mm thickness exhibited a Gerischer-like gas concentration impedance in the low frequency range, which was similarly observed in the cermet-supported solid oxide cells, while the Pt paste collector exhibited only electrochemical polarization. The electrochemical polarization of both samples was modeled by a non-ideal diffusion-reaction transmission line model including CPEs with ${\alpha}$= 0.5. In the case of the Pt paste collector, all the Bisquert parameters exhibited humidity dependence to the -1/2 power, supporting a non-faradaic chemical reaction mechanism at three phase boundaries. Consequently, the surface diffusivity and reaction rate increased linearly with humidity. Less pronounced humidity dependence and somewhat lower utilization length with an Ni felt collector can be attributed to the diffusion-limited gas flow through the collector.

• Journal of Electrochemical Science and Technology
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• 제4권4호
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• pp.153-156
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• 2013

Charge transfer between STM tip and Au(100) has been investigated by using a Scanning Tunneling Microscopy (STM) technique in dry, $H_2O$, and $D_2O$ atmospheres. Dry atmosphere was indicated by humidity as low as 5 % and high humidity as high as 98% was managed by injecting $H_2O$ and $D_2O$ to the chamber. The current decayed more slowly in high humidity than in dry atmosphere. The plateau currents were found to appear at separations larger than ca. $5{\AA}$ where the current decay stopped depending on applied bias voltages. The polarity dependence was observed at the STM junction between Pt-Ir tip and the gold. On the contrary, little dependence was seen at the one between Au tip and the substrate electrode.

• 폴리머
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• 제33권4호
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• pp.326-332
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• 2009

새로운 감습성 단량체인 N-methacryloyl-N'-ethyl-N'-propyl piperazinium bromide(MANEPPB)를 N-methacryloyl-N'-ethyl piperazine(MANEP)와 1-bromopropane의 4차염화 반응에 의하여 합성하였다. MANEPPB/MMA/AA=60/35/5, 70/25/5, 80/15/5, 90/5/5 및 95/0/5 조성의 전해질 공중합체를 감습막으로 사용하기 위하여 제조하였다. 상기 감습액에 아지리딘 가교제인 trimethylolpropane tris(2-methyl-1-aziridinopropionate)(TTAP)를 혼합하여 금 전극 위에 침적법에 의하여 도포하고 가교반응을 진행하여 습도센서를 제조 하였다. 상대습도에 대한 습도센서의 저항을 측정하였을 때, $20{\sim}90%RH$ 상대습도 영역에서 $10^3$의 저항 값이 변화하였으며, 이것은 상용 습도센서로서 대기의 습도를 측정하는데 요구되는 특성을 보여주었다. 그 밖에 온도 의존성, 주파수 의존성, 히스테리시스, 응답 및 회복 속도 그리고 내수성을 측정하여 습도센서로서 특성을 평가하였다.

• KSTLE International Journal
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• 제2권2호
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• pp.150-153
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• 2001

The effects of humidity on friction performance of automotive brake materials were studied using a pad-on-disk type friction tester. Three different friction materials based on a simple formulation were investigated by changing the solid lubricant graphite, MoS$_2$, and Sb$_2$S$_3$. Friction materials without solid lubricants were also examined to study the effect of other ingredients in the matrix on humidity. The friction material containing graphite was strongly affected by the humidity showing lower friction coefficient at high humidity level than other conditions. On the other hand, the friction material containing MoS$_2$exhibited higher friction coefficient at initial stage under high humidity level. The friction material without solid lubricant or with Sb$_2$S$_3$ was not affected by humidity conditions. However, the friction material containing barite showed strong speed dependence.