• The Korean Journal of Ceramics
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• 제5권3호
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• pp.284-287
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• 1999

CuO catalyst-coated alumino-silicate fiber filters were prepared for the simultaneous removal of particulate matter and gaseous contaminants such as NOx and SOx. Hot gas cleaning experiments similar to Shell UOP process other than the catalyst supporting materials were carried out between 300 and $500^{\circ}C$ for the evaluation of the gas removal efficiency of the catalytic filter. Experimental results showed that removel efficiency for $SO_2$ was greater than 99% in the temperature range 450~$500^{\circ}C$ and more than 90% of NO was collected between 350 and $370^{\circ}C$. It was found that the higher the CuO content, the higher the removal efficiency for $SO_2$. Removal efficiency for NO was more affected by the gas cleaning temperature than by the CuO content in the catalyst-filter.

• 한국응용과학기술학회지
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• 제28권2호
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• pp.232-239
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• 2011

Fabric fibrous filter has been used in various industrial applications owing to the low cost and wide generality. However, the basic properties of fabric materials often limit the practical utilization including hot gas cleaning. This study attempts to find new coatings of porous fibrous filter media in order to overcome its insufficient thermal resistance and durability. Teflon was one of the plausible chemicals to supplement the vulnerability against frequent external thermal impacts. A foaming agent composed of Teflon and some organic additives was tentatively coated on the glass fiber mat. The present test Teflon foam coated filter was fount to be useful for hot gas cleaning, up to $250^{\circ}C$-$300^{\circ}C$. Close examination using XPS(X-ray Photoelectron Spectroscopy) and Contact angle proved the binding interactions between carbon and fluorine, which implies coating stability. The PTFE/Glass foam coated filter consisted of more than 95% (C-F)n bond, and showed super-hydrophobic with good-oleophobic characteristics. The contact angle of liquid droplets on the filter surface enabled to find the filter wet-ability against liquid water or oil.

• 한국전기전자재료학회논문지
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• 제13권10호
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• pp.812-816
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• 2000

It is very important to understand the correlation of between inter dielectric(ILD) CMP process and various facility factors supplied to equipment to equipment system. In this paper, the correlation between the various facility factors supplied to CMP equipment system and ILD-CMP process was studied. To prevent the partial over-polishing(edge hot-spot) generated in the wafer edge area during polishing, we analyze various facilities supplied at supply system. With facility shortage of D.I water(DIW) pressure, we introduced an adding purified $N_2$(P$N_2$)gas in polishing head cleaning station for increasing a cleaning effect. DIW pressure and P$N_2$gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. We estimated two factors (DIW pressure and P$N_2$gas) for the improvement of CMP process. Especially, we obtained a uniform planarity in patterned wafer and prohibited more than 90% wafer edge over-polishing. In this study, we acknowledged that facility factors supplied to equipment system played an important role in ILD-CMP process.

• 한국막학회:학술대회논문집
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• 한국막학회 1999년도 추계 총회 및 학술발표회
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• pp.9-14
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• 1999

• 한국대기환경학회:학술대회논문집
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• 한국대기환경학회 2003년도 춘계학술대회 논문집
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• pp.277-278
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• 2003

Cyclone separators are widely used for cleaning gas streams or for catalyst recovery. For many years, the complexity of the gas flow pattern in cyclones has been a matter of many experimental and theoretical work. At present, precise flow measurements have been performed by means of LDA and hot-wire anemometry (Patterson and Munz, 1996; Hoekstra et al., 1999; Peng et al., 2002). In the theoretical work, Computational fluid dynamics (CFD) codes are frequently employed for simulating cyclone gas-particle flows(Hoekstra et al., 1999). (omitted)

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2000년도 춘계학술대회 논문집 전자세라믹스 센서 및 박막재료 반도체재료 일렉트렛트 및 응용기술
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• pp.31-34
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• 2000

It is very important to understand the correlation of between inter layer dielectric(ILD) CMP process and various facility factors supplied to equipment system. In this paper, the correlation between the various facility factors supplied to CMP equipment system and ILD CMP process were studied. To prevent the partial over-polishing(edge hot-spot) generated in the wafer edge area during polishing, we analyzed various facilities supplied at supply system. With facility shortage of D.I. water(DIW) pressure, we introduced an adding purified $N_2(PN_2)$ gas in polishing head cleaning station for increasing a cleaning effect. DIW pressure and PN2 gas factors were not related with removal rate, but edge hot-spot of patterned wafer had a serious relation. We estimated two factors (DIW pressure and PN2 gas) for the improvement of CMP process. Especially, we obtained a uniform planarity in patterned wafer and prohibited more than 90% wafer edge over-polishing. In this study, we acknowledged that facility factors supplied to equipment system played an important role in ILD-CMP process.

• 한국대기환경학회지
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• 제19권1호
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• pp.25-31
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• 2003

Ceramic filter has been demonstrated as an attractive system to improve the thermal efficiency and to reduce the effluent pollutants. Removal of particulates from the hot gas stream is very important in air pollution control. In particular, the elimination of the particulate matters discharged from a gas turbine at high temperature can prevent the corrosion inside the IGCC. In this study, a Lab. scale test and numerical simulation were carried out to comprehend the relationship between pulse jet pressure and recovery of pressure drop and to characterize the reverse cleaning flow through a ceramic fil-ter element under high temperature and high pressure. When the pulse-jet pressures were 2, 3 and 4 kg/$ extrm{cm}^2$, the cleaning effect increase of about 10~30% by recovery of pressure drop caused by pulse pressure. Cleaning effect at 45$0^{\circ}C$ was greater than that at 55$0^{\circ}C$ or 650$^{\circ}$ for the same pulse pressure. According to the result of the present simulation, high pressure has been formed in terminal and central regions in our models and temperature distribution caused by pulse air is to be uniform comparatively on inner surface of filter.

• 에너지공학
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• 제3권2호
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• pp.172-178
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• 1994

고온, 고압하에서 효율적으로 분진을 제거하는 고온 여과재는 IGCC의 Hot Gas Cleaning, 화학공정 등에 유용하게 사용될 수 있으며 전세계적으로 pilot 또는 semicommercial scale로 연구개발 중에 있다. 본 논문에서는 디스크형(50 $\times$10t) 섬유형 여과재를 제조하여 $600^{\circ}C$에서 제철, 유리, 제지 및 석탄화력발전소 배출분진을 이용한 성능시험을 수행하였다. 개발된 여과재의 저항계수는 1010―5$\times$1011의 범위에 존재하였고 총집진효율은 99.7%이상의 높은 효율은 나타내었다. 또한 분진의 표면여과 속도는 10cm/sec로 기존여과 집진기의 5배이상으로 유지하였고 탈진강도 2기압, 탈진시간 0.1초에서 효율적인 집진 및 탈진이 되었다.

• 한국수소및신에너지학회논문집
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• 제25권1호
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• pp.97-104
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• 2014

In a coal gasifier for IGCC, hot syngas leaving the gasifier at about 1550oC is rapidly quenched by cold syngas recycled from the gas cleaning process. This study investigated the flow and heat transfer characteristics in the gas quench system of a commercial IGCC process plant under different operating pressures. As the operating pressure increased from 30 bar to 50 bar, the reduced gas velocity shortened the hot syngas core. The hot fly slag particles were retained within the core more effectively, and the heat transfer became more intensive around the hot gas core under higher pressures. Despite the high particle concentrations, the wall erosion by particle impaction was estimated not significant. However, large particles became more stagnant in the transfer duct due to the reduced gas velocity and drag force under higher pressures.

• 한국연소학회:학술대회논문집
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• 한국연소학회 제26회 KOSCO SYMPOSIUM 논문집
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• pp.295-300
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• 2003

In Korea, the emission standards for air pollutants will be more tighten from Jan. 2005. Especially, the new emission standards is focused on the nitrogen oxide. From this trend of standards, nitrogen oxide emission is hot issue in energy fields. Also, we have a new environmental problem, the carbon dioxide emission, which are related to the global warming. To solve the environmental problems, we must define the situation of clean-up technologies level in Korea and decide the direction of R&D for flue gas cleaning technologies. Now, this paper discus briefly on the De-NOx R&D activities and the large scale testing facility for flue gas clean-up technologies in Korea Institute of Energy Research. These discussions are contribute to the increasing of the R&D activities for flue gas clean-up technologies in Korea.