• 센서학회지
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• 제14권5호
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• pp.357-361
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• 2005

Low-stress silicon nitride (LSN) thin films with embedded metal line have been developed as free standing structures to keep microspheres in proper locations and localized heat source for application to a chip-based sensor array for the simultaneous and near-real-time detection of multiple analytes in solution. The LSN film has been utilized as a structural material as well as a hard mask layer for wet anisotropic etching of silicon. The LSN was deposited by LPCVD (Low Pressure Chemical Vapor Deposition) process by varing the ratio of source gas flows. The residual stress of the LSN film was measured by laser curvature method. The residual stress of the LSN film is 6 times lower than that of the stoichiometric silicon nitride film. The test results showed that not only the LSN film but also the stack of LSN layers with embedded metal line could stand without notable deflection.

• Tribology and Lubricants
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• 제20권3호
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• pp.132-139
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• 2004

Many researches about the contacts between cam and follower have investigated EHL film thickness either without dynamic loading effect or only with curve fitting formula such as Dowson-Hamrock's, because including squeeze film effect makes it hard to obtain convergence and stability of computation. Therefore, inaccurate information about minimum film thickness without dynamic loading condition causes inappropriate design of cam profiles and wrong selection of cam and follower materials. In this work, computation tools both for kinematics and dynamics of valve train system of push-rod type and for fluid film thickness with elastic deformation on the basis of dynamic loading condition with multigrid multi-level method is developed. The computational results of minimum film thickness with the respects of both static and dynamic loading conditions are compared for the contact of flat follower over the entire cycle.

• 한국표면공학회지
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• 제52권4호
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• pp.203-210
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• 2019

In this work, anodizing behavior of 6xxx series aluminum alloys was studied under constant current density and constant voltage conditions in 20% sulfuric acid solution by V-t curves, I-t curves, thickness measurement, observations of surface appearance and cross-sectional observation of anodizing films. The film growth rate of the anodizing films on Al6063, Al6061 and Al6082 obtained at 20 V were $0.63{\mu}m/min$. $0.46{\mu}m/min$ and $0.38{\mu}m/min$, respectively. Time to the initiation of imperfections at the oxide/substrate interface under constant current condition was shortened and colors of anodizing films became darker with the amount of alloying elements in 6xxx series aluminum alloys. Based upon the experimental results obtained in this work, it is concluded that maximum anodizing film thickness without interfacial defects is reduced with increasing amount of alloying elements and brighter anodizing films can be obtained by decreasing amount of alloying elements in the aluminum alloys.

• 반도체디스플레이기술학회지
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• 제18권2호
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• pp.48-52
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• 2019

Virtual metrology, which is one of APC techniques, is a method to predict characteristics of manufactured films using machine learning with saving time and resources. As the photoresist is no longer a mask material for use in high aspect ratios as the CD is reduced, hard mask is introduced to solve such problems. Among many types of hard mask materials, amorphous carbon layer(ACL) is widely investigated due to its advantages of high etch selectivity than conventional photoresist, high optical transmittance, easy deposition process, and removability by oxygen plasma. In this study, VM using different machine learning algorithms is applied to predict the thickness of ACL and trained models are evaluated which model shows best prediction performance. ACL specimens are deposited by plasma enhanced chemical vapor deposition(PECVD) with four different process parameters(Pressure, RF power, $C_3H_6$ gas flow, $N_2$ gas flow). Gradient boosting regression(GBR) algorithm, random forest regression(RFR) algorithm, and neural network(NN) are selected for modeling. The model using gradient boosting algorithm shows most proper performance with higher R-squared value. A model for predicting the thickness of the ACL film within the abovementioned conditions has been successfully constructed.

• 반도체디스플레이기술학회지
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• 제12권4호
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• pp.55-59
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• 2013

Mold die sticking arises from silica filler abrasion to the cavity surface. Ni-P electroplating was examined to substitute conventional hard Cr plating. More than 4% of Phosphorus in the electroplated film produces nano crystal structure and annealing makes $Ni_3P$ precipitated to get hardness values equivalent to hard Cr.

• 한국콘텐츠학회논문지
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• 제18권8호
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• pp.227-239
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• 2018

영화의 형식은 감독의 의도를 가장 감각적이고 직접적으로 확인할 수 있는 요소다. 영화의 배경이 주요한 구경거리가 되면서 현대영화는 가히 와이드 스크린 형식이 아닌 것이 드물 정도이며, 극장과 관객들은 1.85:1이상의 대형화면비율에 익숙해져 있다. 2015년 제작된 영화 <사울의 아들(원제)>은 이런 흐름에 걸맞지 않게 좁은 화면비, 깊지 않은 시야심도 등을 선택한 영화다. 나치의 홀로코스트 수용소를 배경으로 한 이 영화는 영화의 형식을 통해 결국 관객을 주인공의 시점 밖으로 나가지 못하도록 막은 영화이다. 그리고 종국에는 관객을 주인공 사울의 입장으로 만드는 영화이다. 본 논문에서는 <사울의 아들>의 형식적 스타일을 통해 감독 라즐로 네메즈가 어떻게 연출의도를 반영하였는지 연구한다.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.816-818
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• 1998

In this paper Polyimide(PI) thin film are fabricated by vapor deposition polymerization(VDP) of dry process which are easy to control the film's thickness and hard to pollute due to volatile solvent. The FT-IR spectrum show that PAA thin films fabricated by VDP are changed to PI thin film by thermal curing. From AFM(Atomic Force Microscopy) experimental as the higher curing temperature. the thin film thickness decreases and roughness decresse.

• 열처리공학회지
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• 제15권5호
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• pp.213-218
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• 2002

In order to develop the economic and environmental water-soluble black coloring agent, some adequate chemical mixtures were mixed and this solution was applied to coat quenched and tempered 51B20 steel bolt. Some basic properties of the solution and characteristics of the coated film in addition to the corrosion resistance were investigated. The developed 100 kg of water-soluble black coloring agent solution was a chemical mixture consisted of 10 kg of aqueous coloring agent, 40 kg of surface active agent, 0.3 kg of anti-foam agent and $50{\ell}$ of water. The coated film of the bolt was composed of hard layer of about $2{\mu}m$ and the disbondable soft layer of about $4{\mu}m$ above the hard layer. Many surface active agents peaks and a few hydrophilic peaks were observed in the coated film. Surface roughness value of the coated bolt was lower than that of the non-coated bolt. Corrosion resistance of the coated bolt considerably improved and also relatively showed a good polarization resistance at test condition of $40^{\circ}C$ colorizing temperature and 5% the solution concentration in 3% NaCl anodic polarization test. Initial appearance time of the surface rust was greatly retarded owing to the coated film in salt spray test.

• 디자인학연구
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• 제12권4호
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• pp.23-32
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• 1999

하드매트는 영화의 표현에 있어서 대형화면을 열망하던 초창기 영화 감독들의 희망을 반영한 장치였다. 그러나 이러한 희망이 실현되면서 하드매트 방식은 영상 내용을 규정짓는 또 다른 장치로 변모되어 오늘에 이르고 있다. 즉 하드매트는 하나의 띠처럼 이루어져 영화의 시작 부분에서 관객의 시선을 새롭게 유도하는 기능을 하고 있다. 이러한 기능은 영화의 끝 부분에서는 시작과는 다른 기능을 하지만 영상에서 하드매트는 색다르면서도 인상적인 기법으로 계속 사용되고 있다. 적지 않은 감독들이 영상의 내용을 규정하면서 한편으로, 관객들에게 은유의 방법으로써 하드매트를 보여주고 있으며 이러한 방식은 이른바 HDTV 방식이 개발되면서 레터박스 스타일로 이어지고 있다. 요즈음 들어서는 젊은 층을 겨냥한 뮤직 비디오에서 하드매트 방식이 보여짐에 따라 하나의 유행이 되다시피 하고 있다. CF들 중에서도 여러 작품에서 하드매트 방식을 볼 수 있는데 이것은 뮤직 비디오 등으로 하드매트에 익숙해진 젊은이들에게 적극 어필되고 있다. 비록 하드매트가 영화 초기 기술적 실험의 하나로 이루어진 방법이었지만 현대에 이르러 영상 내용을 규정하게 되는 중요한 사례로 볼 수 있다. 내용이 형식을 주로 규정해온 시각 문화 양상과 구별되는 중요한 기법인 셈이다. 그렇지만 하드매트가 보여주는 일시적인 시각적 장점에만 의존하여 영상을 옆으로 늘어나게 하거나, 외국 영화의 크레딧에서 하드매트를 쓰는 까닭에 아무런 의도도 없이 모방만 한다면 문제가 될 수 있다. 이런 관점에서 형식이 이루어낸 영상 내용 규정이라는 영상 언어를 통하여 우리 나라 영상의 발전을 모색해 본다.

• 한국진공학회지
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• 제6권S1호
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• pp.166-171
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• 1997

IBED is a very promosing thin film deposition method because of its many advantages, such as excellent adhesion property of films to substrates, room temperature processing, ease of control over the composition and thickness of films, and so on, over the conventional techniques, It has been widely applied in the field of surface modification of materials in the last decade. In our laboratory, many kinds of thin films, such as wear-resistant hard coatings, corrosion and oxidation protective coatings, biomaterial films, buffer layer for high temperature superconductor films, and oxygen sensitive film, have been synthesized by IBED, and several industrial applications of the IBED films have been conducted.