Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)
- 1998.11c
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- Pages.816-818
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- 1998
A Study on the curing characteristics of 6FDA/4-4' DDE Polyimide thin film fabricated by vapor deposition polymerization
진공증착중합에 의해 제조된 6FDA/4-4' DDE 폴리이미드 박막의 열처리 특성에 관한 연구
- Hwang, S.Y. (Inha University) ;
- Lee, B.J. (Inha University) ;
- Kim, H.G. (Inha University) ;
- Kim, J.T. (Inha University) ;
- Kim, Y.B. (Inha Jr Coll) ;
- Park, K.S. (Tae Dok Coll) ;
- Lee, D.C. (Inha University)
- Published : 1998.11.28
Abstract
In this paper Polyimide(PI) thin film are fabricated by vapor deposition polymerization(VDP) of dry process which are easy to control the film's thickness and hard to pollute due to volatile solvent. The FT-IR spectrum show that PAA thin films fabricated by VDP are changed to PI thin film by thermal curing. From AFM(Atomic Force Microscopy) experimental as the higher curing temperature. the thin film thickness decreases and roughness decresse.
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