• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.197-198
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• 2009

This paper describes the Raman scattering characteristics of polycrystalline (poly) 3C-SiC films, which were deposited on the thermally oxidized Si(100) substrate by the atmosphere pressure chemical vapor deposition (APCVD) method according to growth temperature. TO and LO phonon modes to 2.0m thick poly 3C-SiC deposited at $1180^{\circ}C$ were measured at 794.4 and $965.7\;cm^{-1}$ respectively. From the intensity ratio of $I_{(LO)}/I_{(TO)}$ 1.0 and the broad full width half maximum (FWHM) of TO modes, itcan be elucidated that the crystallinity of 3C-SiC forms polycrystal instead of disordered crystal and the crystal defect is small. At the interface between 3C-SiC and $SiO_2$, $1122.6\;cm^{-1}$ related to C-O bonding was measured. Here poly 3C-SiC admixes with nanoparticle graphite with the Raman shifts of D and G bands of C-C bonding 1355.8 and $1596.8\;cm^{-1}$. Using TO mode of 2.0 m thick poly 3C-SiC, the biaxial stress was calculated as 428 MPa.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.23 no.6
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• pp.487-490
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• 2010

This paper describes the elecrtical and optical characteristics of $N_2$ doped porous 3C-SiC films. Polycrystalline 3C-SiC thin films are anodized by $HF+C_2H_5OH$ solution with UV-LED exposure. The growth of in-situ doped 3C-SiC thin films on p-type Si (100) wafers is carried out by using APCVD (atmospheric pressure chemical vapor deposition) with a single-precursor of HMDS (hexamethyildisilane: $Si_2(CH_3)_6)$. 0 ~ 40 sccm $N_2$ was used for doping. After the growth of doped 3C-SiC, porous 3C-SiC is formed by anodization with $7.1\;mA/cm^2$ current density for anodization time of 60 sec. The average pore diameter is about 30 nm, and etched area is increased with $N_2$ doping rate. These results are attributed to the decrease of crystallinity by $N_2$ doping. Mobility is dramatically decreased in porous 3C-SiC. The band gaps of polycrystalline 3C-SiC films and doped porous 3C-SiC are 2.5 eV and 2.7 eV, respectively.

• Journal of Information Display
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• v.10 no.3
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• pp.125-130
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• 2009

The new organic semiconductor, which is composed of a divinylbenzene core unit and alkoxynaphthalene on both sides, 1,4-bis-2-(6-hexyloxy)naphthalen-2-yl-vinylbenzene, was synthesized via Wittig reaction. The obtained oligomer was characterized via FT-IR, mass and elemental analysis, UV-visible spectroscopy, cyclovoltammetry, differential scanning calorimetry (DSC), and thermogravimetric analysis (TGA). The vacuum-evaporated film was characterized via X-ray diffraction and atomicforce microscopy (AFM). It formed a highly ordered polycrystalline vacuum-evaporated film and exhibited a good field-effect performance, with a hole mobility of $0.015cm^2/V{\cdot}s$, an on/off ratio of $1.18{\times}10^5$, and a subthreshold slope of 0.69 V when it was deposited at Ts=$90^{\circ}C$ on HMDS-treated $SiO_2$.

• International journal of advanced smart convergence
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• v.7 no.2
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• pp.135-142
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• 2018

Virtual reality (VR) technology has been increasingly more frequently used day by day in industries, entertainment and performances due to the development of AR and MR technologies. Performance arts also actively utilize $360^{\circ}$ VR technology due to the free expression of stage settings and auditoriums. However, technologies for systems in which performers wear VR devices firsthand rather than being in the sandpoint of bystanders while audiences wear VR head mounted displays(HMDs) to see performance stages have been rarely studied yet. This study investigated the technical possibilities of possible methods of expression that will enable performers to appear on the stage wearing VR devices. Since VR can maximize the sense of immersion with its closed HMD structure unlike augmented reality (AR), VR was judged to be suitable for studies centered on the mental interactions in the inner side of humans. Among them, to implement shamanistic expression methods with the phantoms of the body and soul, a motion capture technology linked with VR display devices and real-time cameras was realized on the stage. In this process, the importance of body ownership experienced by the performers (participants), reactions when they lost it, and the mental phenomena of the desire to possess the subjects of gaze could be seen. In addition, high possibility of development of this technology hereafter could be expected because this technology includes the technical openness that enables the audience to appear on the stage firsthand to become performers.

• Journal of Sensor Science and Technology
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• v.18 no.4
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• pp.307-310
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• 2009

This paper describes the formation of porous 3C-SiC by anodization. 3C-SiC thin films were deposited on p-type Si(100) substrates by APCVD using HMDS(Hexamethyildisilane: $Si_2(CH_3)_6$). UV-LED(380 nm) was used as a light source. The surface morphology was observed by SEM and the pore size was increased with increase of current density. Pore diameter of 70 $\sim$ 90 nm was achieved at 7.1 mA/cm$^2$ current density and 90 sec anodization time. FT-IR was conducted for chemical bonding of thin film and porous 3C-SiC. The Si-H bonding was observed in porous 3C-SiC around wavenumber 2100 cm$^{-1}$. PL shows the band gap enegry of thin film(2.5 eV) and porous 3C-SiC(2.7 eV).

• Journal of Sensor Science and Technology
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• v.16 no.4
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• pp.259-262
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• 2007

This paper describes the electrical characteristics of polycrystalline (poly) 3C-SiC thin film diodes, in which poly 3C-SiC thin films on n-type and p-type Si wafers, respectively, were deposited by APCVD using HMDS, $H_{2}$, and Ar gas at $1150^{\circ}C$ for 3 hr. The schottky diode with Au/poly 3C-SiC/Si (n-type) structure was fabricated. Its threshold voltage ($V_{bi}$), breakdown voltage, thickness of depletion layer, and doping concentration ($N_{D}$) value were measured as 0.84 V, over 140 V, 61 nm, and $2.7{\times}10^{19}cm^{-3}$, respectively. Moreover, for the good ohmic contact, Al/poly 3C-SiC/Si (n-type) structure was annealed at 300, 400, and $500^{\circ}C$, respectively for 30 min under the vacuum condition of $5.0{\times}10^{-6}$ Torr. Finally, the p-n junction diodes fabricated on the poly 3C-Si/Si (p-type) were obtained like characteristics of single 3CSiC p-n junction diode. Therefore, poly 3C-SiC thin film diodes will be suitable for microsensors in conjunction with Si fabrication technology.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.167-167
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• 2012

최근 들어 유연한 폴리머 기판을 이용한 차세대 Flexible display는 다양한 장점으로 인해 많은 연구가들에 의해 유망한 차세대 디스플레이로 주목받고 있다. 일반적 폴리머 기판은 산소, 수분 등에 취약하기 때문에 무기막 또는 멀티레이어를 증착한다. 본 연구는 remote-type과 direct-type DBD로 구성되어 있는 double discharge system을 이용한 SiOx 무기막 증착 실험에 관한 연구이다. 본 연구에서는 HMDS/$O_2$/He/Ar gas mixture를 통해 발생된 대기압 플라즈마를 이용하여 공정을 진행하였다. SiOx를 증착할 때 SiOx 무기막 증착 실험은 $O_2$의 유량이 감소할수록 그리고 HMDS의 유량이 증가함에 따라 deposition rate, 즉 공정효율이 증가하는 것을 알 수 있었다. 하지만 HMDS의 유량이 증가하고 $O_2$ gas 유량이 감소함에 따라 carbon과 hydrogen 등의 불순물의 함유도 함께 증가하게 되고 이로 인해 무기막의 특성이 약해지고, 유기적인 막 특성이 강해지게 된다. Double discharge system을 사용하였을 경우에는 remote-type DBD system을 사용하였을 때 보다 더 높은 공정 효율을 관찰할 수 있었고 동시에 더 낮은 불순물 함량을 가지는 것을 알 수 있었다. 이는 기판에 추가적으로 인가되는 power에 따라 discharge efficiency가 향상되어 Si-O bond 결합을 유도, 무기막적 특성이 강해지고, 또한 기판 바이어스 효과에 따라 증착무기막의 기계적인 강도 역시 향상됨을 관찰할 수 있었다.

• Journal of the Korean institute of surface engineering
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• v.36 no.3
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• pp.234-241
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• 2003

SiC nanorod was synthesized directly on Si substrate using hexamethyldisilabutane and Fe catalyst with (111) direction. Fe acted a liquid catalyst at growth condition. Grown SiC nanorod has about 30nm diameter and $5{\mu}m$ length. SiC nanorod growth was divided by trro regions with diameter distribution. This diameter distribution were occurred by surface deposition at as - grown nanorod's surface by limitation of growth rate. At higher temperature, these division not occurred. Growth temperature and flow rates affected diameter and morphology of nanorods. With increasing flow rate of source gas, nanorod's diameter increased because of deactivation effect. Case of the increasing temperature, growth rate increased so deactivation did not occurred.

• Korean Journal of Optics and Photonics
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• v.25 no.3
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• pp.125-130
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• 2014

Holographic optical elements (HOEs) provide systems of thin-film optics that could include a variety of functions and have many advantages as optical devices in various research fields. Research and developments based on the use of HOEs in the fields of communications and displays are in progress. This paper introduces the properties of HOEs and their applications in diffractive optical elements (DOEs), holographic projection screens, and head-mounted displays (HMDs). For widespread use of HOE technology in these various applications some challenges need to be solved, as discussed in this paper.

• Journal of the Korea Computer Graphics Society
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• v.22 no.5
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• pp.49-56
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• 2016

Mobile Virtual Reality Head Mount Displays such as Google Cardboard and Samsung Gear VR are being released, as well as PC-based VR HMDs such as Oculus Rift and HTC Vive. However, when the user wears HMD, it hides the external view of the user. Therefore, it may happen that the user is struck by the surrounding objects such as furniture, and there is no definite solution to this problem. In this paper, we propose a method to reduce the risk of injuries by visualizing the location and information of obstacles scanned by using a RGB-D camera.