• 제목/요약/키워드: Grain-orientation

검색결과 350건 처리시간 0.027초

원통형 타겟 형태의 DC 마그네트론 스퍼터링을 이용한 산화 아연 박막의 전기적 기제에 대한 분석 (Electrical mechanism analysis of $Al_2O_3$ doped zinc oxide thin films deposited by rotating cylindrical DC magnetron sputtering)

  • 장주연;박형식;안시현;조재현;장경수;이준신
    • 한국신재생에너지학회:학술대회논문집
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    • 한국신재생에너지학회 2010년도 추계학술대회 초록집
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    • pp.55.1-55.1
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    • 2010
  • Cost efficient and large area deposition of superior quality $Al_2O_3$ doped zinc oxide (AZO) films is instrumental in many of its applications including solar cell fabrication due to its numerous advantages over ITO films. In this study, AZO films were prepared by a highly efficient rotating cylindrical dc magnetron sputtering system using AZO target, which has a target material utilization above 80%, on glass substrates in argon ambient. A detailed analysis on the electrical, optical and structural characteristics of AZO thin films was carried out for solar cell application. The properties of films were found to critically depend on deposition parameters such as sputtering power, substrate temperature, working pressure, and thickness of the films. A low resistivity of ${\sim}5.5{\times}10-4{\Omega}-cm$ was obtained for films deposited at 2kW, keeping the pressure and substrate temperature constant at 3 mtorr and $230^{\circ}C$ respectively, mainly due to an increase in carrier mobility and large grain size which would reduce the grain boundary scattering. The increase in carrier mobility with power can be attributed to the columnar growth of AZO film with (002) preferred orientation as revealed by XRD analysis. The AZO films showed a high transparency of>87% in the visible wavelength region irrespective of deposition conditions. Our results offers a cost-efficient AZO film deposition method which can fabricate films with significant low resistivity and high transmittance that can find application in thin-film solar cells.

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플립칩 패키지에서의 일렉트로마이그레이션 현상 (Electro-migration Phenomenon in Flip-chip Packages)

  • 이기주;김근수;가차와키스가누마
    • 마이크로전자및패키징학회지
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    • 제17권4호
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    • pp.11-17
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    • 2010
  • 차세대 패키징 기술을 실현하기 위해서는 극복해야 할 기술적인 과제들이 많이 존재한다. 그 중에서 솔더 접합부의 EM에 의한 고장은 오랜전부터 알려진 과제이지만, 고밀도화, 파인핏치화, 발열문제가 심각해지면서 현실적인 문제로 인식되기 시작했다. 더욱이 솔더가 무연화 되면서 다양해진 구성원소들의 영향에 대한 연구가 시작되었다. 지금까지의 연구결과를 종합해보면 Sn-Pb 공정솔더 보다 무연솔더는 EM에 대한 저항성이 강한 것으로 보여진다. 하지만, 무연솔더 접합부에서 발생하는 EM현상에 대해서는 아직 밝혀지지 않은 부분이 많다. 보이드의 핵 생성 및 성장속도와 전기저항의 급격한 변화와의 관계, Sn 결정립의 방향과 전류밀도에 따른 마이그레이션 속도계수와 수명예측기술, 각종 무연솔더와 시험조건에서의 언더필의 효과 등에 관한 다양한 연구가 필요하다. 또한 무연 플립칩 패키지의 총체적인 신뢰성 확보를 위해, EM과 반도체칩 내부배선의 발열에 기인하는 Thermomigraton, 응력에 기인하는 Stress-migration과의 상관관계에 대한 연구도 요구된다.

RF 마그네트론 스퍼터링 방법으로 증착된 CuS 박막의 구조적 및 광학적 특성에 대한 스퍼터링 전력의 영향 (Effect of Sputtering Power on Structural and Optical Properties of CuS Thin Films Deposited by RF Magnetron Sputtering Method)

  • 이상운;신동혁;손영국;손창식;황동현
    • Current Photovoltaic Research
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    • 제8권1호
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    • pp.27-32
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    • 2020
  • CuS thin films were deposited on glass substrates at room temperature by RF magnetron sputtering. The structural and optical properties of CuS thin films grown by varying RF-power from 40 W to 100 W were studied. From the XRD analysis, we confirmed hexagonal crystal structures grown in the preferred orientation of the (110) plane in all CuS thin films, and the intensity of the main diffraction peak increased in proportion to the increase of RF-power. In the case of CuS thin film deposited at 40W, small-sized particles formed a thin and dense surface morphology with narrow pore spacing, relatively. As the power increased, the grain size and grain boundary spacing increased sequentially. The peaks for the binding energy of Cu 2p3/2 and Cu 2p1/2 were determined at 932.1 eV and 952.0 eV, respectively. The difference in binding energy for the Cu2+ states was the same at 19.9 eV regardless of process parameters. The transmittance and band gap energy in the visible region tended to decrease with increasing sputtering powers.

양축 정렬된 Ni 기판의 특성에 미치는 W 첨가의 효과 (The Influence of W Addition on Cube Textured Ni Substrates for YBCO Coated Conductor)

  • 김규태;임준형;김정호;장석헌;김호진;주진호;김찬중;송규정;신형섭
    • Progress in Superconductivity
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    • 제6권1호
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    • pp.64-68
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    • 2004
  • We fabricated cube-textured Ni and Ni-W alloy substrates for coated conductors and characterized the effects of W addition on microstructure, mechanical strength, and magnetic properties of the substrate. Pure Ni and Ni-(2, 3, 5at.%)W alloys were prepared by plasma arc melting, heavily cold rolled and then annealed at various temperatures of $600-1300^{\circ}C$. The texture was evaluated by pole-figure and orientation distribution function (ODF) analysis. Mechanical properties were investigated by micro Vickers hardness and tension test. Ferromagnetism of the substrate was measured by physical property measurement system (PPMS). It was observed that Ni-W substrates had sharp cube texture, and the full-width at half-maximums (FWHMs) of in-plane texture was $^{\circ}$-5.57$4.42^{\circ}$, which is better than that of pure Ni substrate. In addition cube texture of Ni-W substrates was retained at higher temperature up to $1300^{\circ}C$. Microstructural observation showed that the Ni-W substrates had fine grain size and higher mechanical properties than the pure Ni substrate. These improvements are probably due to strengthening mechanisms such as solid solution hardening and/or grain size strengthening. PPMS analysis showed that addition of W effectively reduced saturation magnetization in applied magnetic field and Curie temperature.

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배향화된 금속기관에서 산화물막의 제조와 분석 (Fabrication and characterization of metal oxide films on textured metal substrates)

  • 최은철;홍인기;이창호;성태현;노광수
    • 한국초전도학회:학술대회논문집
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    • 한국초전도학회 2000년도 High Temperature Superconductivity Vol.X
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    • pp.111-120
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    • 2000
  • Recently, metal oxide films such as MgO or ZrO$_2$ have been studied as buffer layers to fabricate the superconductor with preferred orientation and as diffusion barriers to prevent the reaction between superconductor and metal substrate. In this research, we focused fabrication and characterization of MgO and ZrO$_2$ films on textured metal substrates. We fabricated MgO and ZrO$_2$ films on the Ni metal sheets by sol-gel dipping method. The microstrcures of the films were investigated by SEM and AES analyses. The films were coated with different cycles and dryed at 400$^{\circ}$C and 500$^{\circ}$C . The final films were heat-treated at 700$^{\circ}$C, 800$^{\circ}$C, and 1000$^{\circ}$C, in air atmosphere. We investigated the alignment of MgO and ZrO$_2$ films on Ni metal sheets by XRD and pole figure. The grain growth of metal oxide films was improved by the increase of the drying temperature and annealing temperature. The grain growth was increased with the annealing temperature. The alignment of metal oxide films depended on the thickness.

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Characterization of Microstructure and Mechanical Properties of High-Purity Iron Added with Copper

  • Taguchi, O.;Lee, Su Yeon;Uchikoshi, M.;Isshiki, M.;Lee, Chan Gyu;Suzuki, S.;Gornakov, Vladimir S.
    • 열처리공학회지
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    • 제25권1호
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    • pp.22-26
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    • 2012
  • An influence of the addition of copper (0.5, 1.0 and 1.5 mass% Cu) on the microstructure and mechanical properties of high purity iron (99.998 mass%) was characterized. The microstructure and microhardness of high-purity iron based samples, which were rolled at room temperature and subsequently annealed, were investigated in this work. The microstructure of the samples has been observed by electron back scattering diffraction (EBSD) and the mechanical properties have been studied by using micro-Vickers hardness test. The results of microstructural observation showed that deformation band was formed in high purity iron by rolling at room temperature, and it was recovered by annealing up to about 900 K. The microhardness results showed that the softening of high-purity iron occurred by annealing up to about 900 K, while the hardness of iron added with about 0.5-1.5 mass% copper was kept over 100 Hv and at the early time of annealing reached a maximum. The hardness of iron added with a small amount of copper may be attributed to precipitation hardening as well as solution hardening. The orientation of crystal in recrystallized grain was almost same as that of deformed grain.

Investigation of Spark Plasma Sintering Temperature on Microstructure and Thermoelectric Properties of p-type Bi-Sb-Te alloys

  • Han, Jin-Koo;Shin, Dong-won;Madavali, Babu;Hong, Soon-Jik
    • 한국분말재료학회지
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    • 제24권2호
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    • pp.115-121
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    • 2017
  • In this work, p-type Bi-Sb-Te alloys powders are prepared using gas atomization, a mass production powder preparation method involving rapid solidification. To study the effect of the sintering temperature on the microstructure and thermoelectric properties, gas-atomized powders are consolidated at different temperatures (623, 703, and 743 K) using spark plasma sintering. The crystal structures of the gas-atomized powders and sintered bulks are identified using an X-ray diffraction technique. Texture analysis by electron backscatter diffraction reveals that the grains are randomly oriented in the entire matrix, and no preferred orientation in any unique direction is observed. The hardness values decrease with increasing sintering temperature owing to a decrease in grain size. The conductivity increases gradually with increasing sintering temperature, whereas the Seebeck coefficient decreases owing to increases in the carrier mobility with grain size. The lowest thermal conductivity is obtained for the bulk sintered at a low temperature (603 K), mainly because of its fine-grained microstructure. A peak ZT of 1.06 is achieved for the sample sintered at 703 K owing to its moderate electrical conductivity and sustainable thermal conductivity.

Effects of Precipitate Element Addition on Microstructure and Magnetic Properties in Magnetostrictive Fe83Ga17 alloy

  • Li, Jiheng;Yuan, Chao;Zhang, Wenlan;Bao, Xiaoqian;Gao, Xuexu
    • Journal of Magnetics
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    • 제21권1호
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    • pp.12-19
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    • 2016
  • The <100> oriented $Fe_{83}Ga_{17}$ alloys with various contents of NbC or B were prepared by directionally solidification method at the growth rate of $720mm{\cdot}h^{-1}$. With a small amount of precipitates, the columnar grains grew with cellular mode during directional solidification process, while like-dendrite mode of grains growth was observed in the alloys with higher contents of 0.5 at% due to the dragging effect of precipitates on the boundaries. The NbC precipitates disperse both inside grains and along the boundaries of $Fe_{83}Ga_{17}$ alloys with NbC addition, and the Fe2B secondary phase particles preferentially distribute along the grain boundaries in B-doped alloys. Precipitates could affect grain growth and improved the <100> orientation during directional solidification process. Small amount of precipitate element addition slightly increased the magnetostrictive strain, and a high value of 335 ppm under pre-stress of 15 MPa was achieved in the alloys with 0.1 at% NbC. Despite the fact that the effect on magnetic induction density of small amount of precipitates could be negligible, the coercivity markedly increased with addition of precipitate element for $Fe_{83}Ga_{17}$ alloy due to the retarded domain motion resulted by precipitates.

CVD를 이용해 증착한 III-V 화합물 보론 포스파이드의 물성분석에 관한 연구 (A Study on the Physical Characteristics of III-V Compound Boron Phosphide using CVD)

  • 홍근기;김철주
    • 한국전기전자재료학회:학술대회논문집
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    • 한국전기전자재료학회 2004년도 하계학술대회 논문집 Vol.5 No.1
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    • pp.332-335
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    • 2004
  • Boron Phosphide films were deposited on(III) Si substrate at $650^{\circ}C$, by the reaction of $B_2H_6$ with $PH_3$ using CVD. $N_2$ was employed as carrier gas. The optimal gas rates were 20 ml/min for $B_2H_6$, 60 ml/min for $PH_3$ ml/min and $1{\ell}/min$ for $N_2$. The films were annealed for 1hour in $N_2$ ambient at $550^{\circ}C$ and measured. The measurement of AFM shows that the average surface roughness is each $10.108{\AA}$ and $29.626{\AA}$. So, we could know every commonplace thing. The measurement of XRD shows that the films have the preferred orientation of(1 0 1). From SEM images, we could see that Boron Phosphide is showed of a structure, which is grain size, which is grain boundary size. Also, the measurement of AES is shown the films have $B_{13}P_2$ Stoichiometry. From WDX See that ingredient is detected each Boron and Phosporus. So, we could see that deposited BP thin film. In this study, we obtained the BP thin film by deposited in atmosphere pressure, and known to applicate as microwave absorbtion material of BP thin film.

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Preparation and Structure Properties of LaBa2Cu2O9, LaBa22CaCu3O12 and LaBa2Ca2Cu5O15 Perovskites

  • Kareem Ali Jasim;Hind Abdulmajeed Mahdi;Rafah Ismael Noori;Marwa Ayad Abdulmajeed
    • 한국재료학회지
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    • 제33권9호
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    • pp.367-371
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    • 2023
  • In this study we examine variations in the structure of perovskite compounds of LaBa2Cu2O9, LaBa22CaCu3O12 and LaBa2Ca2Cu5O15 synthesized using the solid state reaction method. The samples' compositions were assessed using X-ray fluorescence (XRF) analysis. The La: Ba: Ca: Cu ratios for samples LaBa2Cu2O9, LaBa22CaCu3O12 and LaBa2Ca2Cu5O15 were found by XRF analysis to be around 1:2:0:2, 1:2:1:3, and 1:2:2:5, respectively. The samples' well-known structures were then analyzed using X-ray diffraction. The three samples largely consist of phases 1202, 1213, and 1225, with a trace quantity of an unknown secondary phase, based on the intensities and locations of the diffraction peaks. According to the measured parameters a, b, and c, every sample has a tetragonal symmetry structure. Each sample's mass density was observed to alter as the lead oxide content rose. Scanning electron microscope (SEM) images of the three phases revealed that different Ca-O and Cu-O layers can cause different grain sizes, characterized by elongated thin grains, without a preferred orientation.