• Proceedings of the KIEE Conference
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• 2002.07c
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• pp.1823-1826
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• 2002

The purpose of this experiment was to develope Triggered Vacuum Switch (TVS) for the high voltage and high current. The TVS has an array of rods of alternate polarity in which a fixed gap spacing is maintained between the rods. The cross section of each rod has trapezoidal shape. It consists of electrode, ceramic chamber, getter and trigger. Currently, triggered vacuum switch (TVS) with seal-off has been designed and fabricated at PAL. An experimentation and trigger devices for TVS were designed for testing characteristics of electricity. For making the prototype of TVS, it is developed of fabrication process and fined of electrode material. The fabrication of the TVS is a lot of process which have manufacturing of part, chemical clean, ceramic brazing and metal welding. The fabricated TVS is tested of leak for vacuum, hold-off voltage and conditioning of trigger system. The TVS has pinch-off after it is removed of gas in the TVS and activated of getter in degassing furnace. The prototype TVS tested about 20 kV, 75 kA, 83 ${\mu}s$ with 100 kJ capacitor bank and inductance 5 ${\mu}H$. This paper describes the results of tests and the characteristics of the switch.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.547-547
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• 2013

This paper presents the understandings carried out for the installation of the hydrogen reservoir of the multi-gap pseudospark switch under developing for the accelerator applications. As a cold cold cathode switch, the pseudospark switch could replace the thyratron switch which has hot cathode and being used well currently in the high power field such as laser and accelerator applications. Especially in the klystron modulator, the key component is a switch which mostly defines the jitter and the instability of the modulator system. To get the less jitter and the instability, we need to find proper range of the pressure for the gas discharge inside gas switch. This could be achieved by the understanding of the characteristic of the nonevaporable getter (NEG) which is used as a hydrogen reservoir for the switch. Therefore we verified the characteristics of the NEG (St 172, Saes) and its installation in the switch. Finally we controlled the getter to find best pressure point for the pseudospark switch.

• Korean Chemical Engineering Research
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• v.53 no.3
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• pp.401-406
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• 2015

Getter is a class of materials used in absorbing gases such as hydrogen and moisture in microelectronics or semiconductor devices to operate properly. In this study, we developed a new device structure consisting of porous anodized alumina films on textured silicon wafer, which have cost efficiency in materials and processing aspects. Anodic aluminum oxide (AAO) with controlled pore sizes can be applied to a high-efficiency moisture absorber due to the high surface area and OH- saturated surface property. The moisture sorption capacity was 2.02% (RH=35%), obtained by analyzing isothermal adsorption/desorption curve.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.02a
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• pp.252-252
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• 2010

적외선 센서는 빛의 유무에 관계없이 주 야간 전방의 물체에서 발산하는 미약한 적외선(열선)을 감지하여 영상으로 재현하는 열상시스템은 자동차 야간 운전자 보조용 나이트 비젼, 핵심 시설의 감시 관리, 군수 등의 분야에 적용되어지고 있는 최첨단, 고부가가치를 지니고 있는 기술이다. 양자형은 센서 특성은 좋으나 냉각기(작동온도: $-196^{\circ}C$) 및 고진공 패키지인 dewar를 사용하는 반면에, 열형은 대부분 상온에서 동작되는 온도안정화를 위한 전자냉각모듈만을 구비하면 되므로 저가형으로 제작이 가능한 비냉각형 적외선 센서이다. 본 연구에서는 적외선 센서용 진공패키지 조립공정 및 패키지된 센서의 측정기술을 개발하였다. 금속 메탈패키지를 제작하였으며, 금속 진공패키지는 소자냉각용 TE Cooler와 장수명 진공유지를 위한 getter, 그리고 센서칩, 온도센서를. 장착하여 칩을 조립하였다. Cap ass'y와 base envelop의 솔더링 공정을 수행하였으며, 진공패키지의 진공유지를 위해 TMP를 이용하여 진공을 유지하고, 약 5일동안 패키지 bake-out을 수행하였다. 진공압력은 $10^{-7}\;torr$ 이하를 유지하였으며, getter를 활성화시키고, pinch-off 공정으로 조립 ass'y를 완성하였다. 진공 패키지의 기밀성은 He leak tester를 이용하여 측정하였으며, ${\sim}10^{-9}\;std.cm^3/sec$로 기밀성을 유지하였다. TE cooler를 작동한 온도안정성은 0.05 K 이하였다. 볼로미터 센서의 반응도는 $10^2\;V/W$ 이상을 나타내었으며, 탐지도는 $2{\times}10^8cm-Hz^{1/2}/W$를 나타내었다. 본 연구를 통하여 얻어진 결과는 향후 2차원 열영상용 어레이 검출기 및 웨이퍼수준의 패키징 공정에 유용하게 응용될 것으로 판단된다.

• Applied Science and Convergence Technology
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• v.24 no.4
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• pp.84-89
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• 2015

The base pressure and outgassing rate of a mild steel chamber were measured and compared to those of a stainless steel chamber. A combined sputter-ion and non-evaporable getter pump with a nominal pumping speed of 490 l/s generated the base pressure of $2.7{\times}10^{-11}$ mbar in the mild steel chamber and $1.2{\times}10^{-10}$ mbar in the stainless steel chamber. The rate-of-rise measurements show that the mild steel has an extremely low outgassing rate of $2.6{\times}10^{-13}$ mbar $ls^{-1}cm^{-2}$, which is about one-order of magnitude smaller than the outgassing rate of the stainless steels. Vacuum annealing of the mild steel at $850^{\circ}C$ reduced the outgassing rate further to $8.8{\times}10^{-14}$ mbar $ls^{-1}cm^{-2}$, which was comparable to the outgassing rate of a heat treated stainless steel for extreme-high vacuum use.

• Journal of the Korean Vacuum Society
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• v.10 no.3
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• pp.312-320
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• 2001

A Non-Evaporable Getter(NEG) pump was fabricated using Zr-V-Fe alloy modules to obtain $10^{-9}$ Pa range pressures. Pumping performances and activation characteristics were investigated and the pumping speeds for hydrogen, deuterium and carbon monoxide gases of the NEG pump were measured. And hydrogen desorption characteristics were examined during activation at $450^{\circ}C$. Futhermore the vacuum performance was compared with those of other high vacuum pumps as turbo-molecular pump, sputter-ion pump, and cryo pump by analyzing the residual gases of the system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2001.05b
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• pp.46-49
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• 2001

To estimate the influence of electrical properties due to the poly back seal(PBS). we were investigated defect density in surface by deposition thickness and breakdown voltage in specimens. Deposition thickness of specimen is prepared from 7,000[$\AA$] to 13,000[$\AA$], respectively. From the results, it is confirmed that PBS deposition thickness of 10,000[$\AA$] among the specimen is decreased defect density by contribution of the gettering effect.

• Journal of Korean Vacuum Science & Technology
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• v.3 no.1
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• pp.85-89
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• 1999

FDE panel was successfully fabricated through the integration of a 0.7" diagonal Si-based Mo-tip FEA with 25${\times}$25 pixels, Y2O3:Eu or ZnO:Zn phosphor screen, and vacuum sealing through an exhausting glass tube, including a getter. The panel system was driven by an external driver circuit having pulse width modulation(PWM) driving scheme. Before character imaging, it was stabilized through tip aging by slowly increasing a pulse-mode emission current and phosphor aging by a coulombic charging process. After aging, luminescent characteristics such as emission uniformity, charging and arcing phenomena were shown to be improved significantly.

• Proceedings of the KIEE Conference
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• 2000.07c
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• pp.1800-1802
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• 2000

본 연구에서는 냉음극 발광 소자인 FEA를 이용하여 Cold Cathode Lamp 제작과 그 구조에 대해서 연구하였다. Anode plate에는 ZnO:Zn 형광체를 전기영동법으로 증착한 후 tube slabs와 anode plate를 frit glass를 이용하여 접합하였다. FEA와 substrate의 bonding, addressing을 위한 wire bonding, substrate와 집속전극, setter를 stem base의 외부전극에 연결하기 위한 spot welding, tube와 stem base를 glass melting method로 접합 공정을 하였다. 진공배기 시스템에 배기판을 연결하여 ${\sim}10^{-7}$torr까지 배기한 후 heater를 이용하여 배기관을 tip-off하였다. 최종적으로 진공을 유지하기 위해 getter를 RF 고주파로 활성화하였다. 결론적으로 lamp외 특성을 비교분석한 후 휘도 및 발광효율을 향상시키기 위한 구조절 개선과 방안을 고찰하였다.

• The Korean Journal of Community Living Science
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• v.12 no.1
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• pp.23-27
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• 2001

This study is designed to find out the physicochemical quality and the morphological features of Korean wheat flour and imported wheat flour with a view to shed light on their difference. In terms of components, Korean wheat flour and imported wheat flour are similar, but the latter turns out to be better than the former when it comes to crude protein, the ratio of water absorption and the power of maintenance. Yet Korean wheat flour turns out to be better than imported wheat flour. In terms of the chromaticity of wheat flour, the latter turns out to be higher than the former when it comes to L value, while the former turns out to be higher than the latter when it comes to a value and b value. In terms of the morphological features of wheat flour, both are in the shape of an oval with starch particles irregularly attached to gluten. And imported wheat flour is getter than Korean wheat flour in terms of the size of particles.