Korean Chemical Engineering Research

  • 제53권3호
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  • Pages.401-406
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  • 2015
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  • 0304-128X(pISSN)
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  • 2233-9558(eISSN)
한국화학공학회 (The Korean Institute of Chemical Engineers)
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실리콘 표면에 증착된 다공성 알루미나의 수분 흡착 거동

Moisture Gettering by Porous Alumina Films on Textured Silicon Wafer

  • Lim, Hyo Ryoung (Department of Fusion Chemical Engineering, Hanyang University) ;
  • Eom, Nu Si A (Department of Fusion Chemical Engineering, Hanyang University) ;
  • Cho, Jeong-Ho (Electronic Components Center, Korea Institute of Ceramic Engineering & Technology) ;
  • Choa, Yong-Ho (Department of Fusion Chemical Engineering, Hanyang University)
  • 투고 : 2014.09.02
  • 심사 : 2014.10.18
  • 발행 : 2015.06.01
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초록

게터는 반도체와 초소형 전자패키지 소자 내부의 수소와 수증기 같은 기체를 흡착하여 기기 작동 시 방해 기체를 제거하는 기능을 한다. 본 연구에서는 재료와 공정 측면에서 높은 가격 경쟁력을 갖는 게터로, 실리콘 기판에 올라간 다공성 알루미나 구조체를 제조하는 연구를 진행하였다. 기공의 크기가 조절된 양극산화 알루미나(AAO)는 높은 비표면적을 가지며 표면에 OH-기를 다수 포함하므로 높은 효율을 갖는 수분 흡착제로 사용되었다. 등온 수분 흡탈착 곡선으로 분석한 수분 흡착도는 상대습도 35%일 때 2.02%로 우수한 성능을 나타내었다. 즉, 저온에서 사용가능하며, 추가 열원이 필요하지 않아 박막구조의 소형화가 용이하여 내부 손상 및 오염을 방지할 수 있는 게터재를 합성하였다.

Getter is a class of materials used in absorbing gases such as hydrogen and moisture in microelectronics or semiconductor devices to operate properly. In this study, we developed a new device structure consisting of porous anodized alumina films on textured silicon wafer, which have cost efficiency in materials and processing aspects. Anodic aluminum oxide (AAO) with controlled pore sizes can be applied to a high-efficiency moisture absorber due to the high surface area and OH- saturated surface property. The moisture sorption capacity was 2.02% (RH=35%), obtained by analyzing isothermal adsorption/desorption curve.

키워드

참고문헌

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피인용 문헌

  1. Anodic Alumina Membranes: From Electrochemical Growth to Use as Template for Fabrication of Nanostructured Electrodes vol.12, pp.2, 2015, https://doi.org/10.3390/app12020869