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http://dx.doi.org/10.9713/kcer.2015.53.3.401

Moisture Gettering by Porous Alumina Films on Textured Silicon Wafer  

Lim, Hyo Ryoung (Department of Fusion Chemical Engineering, Hanyang University)
Eom, Nu Si A (Department of Fusion Chemical Engineering, Hanyang University)
Cho, Jeong-Ho (Electronic Components Center, Korea Institute of Ceramic Engineering & Technology)
Choa, Yong-Ho (Department of Fusion Chemical Engineering, Hanyang University)
Publication Information
Korean Chemical Engineering Research / v.53, no.3, 2015 , pp. 401-406 More about this Journal
Abstract
Getter is a class of materials used in absorbing gases such as hydrogen and moisture in microelectronics or semiconductor devices to operate properly. In this study, we developed a new device structure consisting of porous anodized alumina films on textured silicon wafer, which have cost efficiency in materials and processing aspects. Anodic aluminum oxide (AAO) with controlled pore sizes can be applied to a high-efficiency moisture absorber due to the high surface area and OH- saturated surface property. The moisture sorption capacity was 2.02% (RH=35%), obtained by analyzing isothermal adsorption/desorption curve.
Keywords
Getter; Moisture Adsorption; Solution Process; Anodizing; Anodic Aluminum Oxide;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
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