• Title/Summary/Keyword: Gas target

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Properties of ZrO2 Gas Barrier Film using Facing Target Sputtering System with Low Temperature Deposition Process for Flexible Displays (플렉서블 디스플레이용 저온공정을 갖는 대향 타겟식 스퍼터링 장치를 이용한 ZrO2 가스 차단막의 특성)

  • Kim, Ji-Hwan;Cho, Do-Hyun;Sohn, Sun-Young;Kim, Hwa-Min;Kim, Jong-Jae
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.5
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    • pp.425-430
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    • 2009
  • $ZrO_2$ film was deposited by facing target sputtering (FTS) system on polyethylene naphthalate (PEN) substrate as a gas barrier layer for flexible organic light emitting devices (FOLEDs), In order to control the heat of the FTS system caused by the ion bombardment in the cathode compared with the conventional sputtering system, the process characteristics of the FTS apparatus are investigated under various sputtering conditions such as the distance between two targets ($d_{TT}$), the distance between the target and the substrate ($d_{TS}$), and the deposition time. The $ZrO_2$ film by the FTS system can reduce the damage on the films because the ion bombardment with high-energy particles like gamma-electrons, Moreover, the $ZrO_2$ film with optimized condition ($d_{TT}$=140 mm) as a function of the distance from center to edge showed a very uniform thickness below 5 % for a deposition time of 3 hours, which can improve the interface property between the anode and the plastics substrate for flexible displays, It is concluded that the $ZrO_2$ film prepared by the FTS system can be applied as a gas barrier layer or an interlayer between the anode and the plastic substrate with good properties of an uniform thickness and a low deposition-temperature.

Effect of sputtering parameters and targets on properties of ZnO:Al thin films prepared by reactive DC magnetron sputtering (직류 반응성 sputtering법으로 제막된 ZnO:Al 박막의 물성에 미치는 증착조건 및 타겟의 영향)

  • 유병석;오근호
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.4
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    • pp.592-598
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    • 1998
  • AZO(Aluminum doped Zinc Oxide) thin films were fabricated by reactive DC magnetron sputtering method using zinc metal target (Al 2%) and zinc oxide target ($Al_2O_3\;2%$) respectively. The intermediate condition with optimum transmittance and conductivity was obtained by controlling the sputtering parameters. Oxygen gas ratio for this condition was $0.5{\times}10^{-2}~1.0{\times}10^{-2}$ in oxide target and. In case of metal target, this optimum oxygen gas ratio at the applied power of 0.6 kW and 1.0 kW was 0.215~0.227 and 0.305~0.315, respectively. The resistivity of AZO film deposited was obtained $1.2~1.4{\times}10^{-3} {\Omega}{\cdot}$cm as deposited state regardless of target species.

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Preparation of Precision Thin Film Resistor Sputtered by Magnetron Sputtering (IC용 초정밀 박막저항소자의 제조와 특성연구)

  • Ha, H.J.;Jang, D.J.;Moon, S.R.;Park, C.S.;Cho, J.S.;Park, C.H.
    • Proceedings of the KIEE Conference
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    • 1994.07b
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    • pp.1236-1238
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    • 1994
  • TiAlN thin films were prepared by a multi target r.f magnetron sputtering system under different conditions. We have investigated the resistivity and T.C.R. (Temperature Coefficient of Resistance) characteristics of TiAlN films deposited on $Al_2O_3$ and glass substrates by sputtering in an $Ar:N_2$ gas mixture. We used Al and Ti metal as Target Material and $Ar:N_2$ gas as working gas. We varied the partial pressure ratio of $N_2/Ar$ from 0.2/7 to 1.0/6.2 (SCCM). And the R.F power of Ti and Al Target also were varied as 160/240, 200/200 and 240/160(W). In this experiment, we can get the precision thin film resistor with a very low T.C.R. (Temperature Coefficient of Resistance) below 25 ppm ${\Omega}/^{\circ}C$.

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Analysis of LNG Perspectives for EERS (EERS시행을 위한 천연가스 에너지절감 추이분석)

  • Kim, Yong-Ha;Woo, Sung-Min;Park, Hwa-Young;Kim, Euy-Kyung;Yoo, Jeong-Hee
    • Journal of Energy Engineering
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    • v.23 no.3
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    • pp.7-12
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    • 2014
  • This paper suggest mandatory target predestinator of natural gas wholesale and retail provider will set appropriate target. To analysis natural gas energy saving trend forecast, reduce natural gas forecast and using technology and forecast analysis for equipment is draw based on result of developing tool that more detailed gas field. Also this paper calculate effect on energy saving through various scenarios, efficiency consideration of gas equipment and subsidy condition.

Photodegradation of Volatile Organic Compound (VOC) Through V-Doped or CuOx-grafted $TiO_2$ nanoparticles

  • Kim, Beum Woo;Kim, Seonmin
    • Proceedings of the Korean Vacuum Society Conference
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    • 2013.08a
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    • pp.271.1-271.1
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    • 2013
  • Titania is usually used in sun-screens, tooth paste, and other daily used objects as a pigment. However, scientists have focused on titania as photocatalyst due to its excellent activities. By fabricating vanadium doped TiO2 and CuOx co-catalyzed TiO2 nano-size filter, the degradation level of the volatile organic compound (VOC) concentration was tested using 365nm UV LED as light source in a closed chamber. Main purpose for this test is to evaluate the activities of various catalysts for degrading the VOCs which are detrimental to human body and toluene and p-xylene were chosen in the VOC removal test. Target gas materials were injected into the test chamber with dry air as carrier gas which was flowed into the gas washer bottle filled with liquid form of VOC substance. When the VOC gas flows into the chamber, it is circulated by 200 mm fan in order to contact with the set-up filter on the aluminum holder. Target gas concentration in the chamber was monitored using VOC detector (miniRae3000, Raesystems) which was also placed inside the chamber. With the measured concentration, the VOC degradation efficiency and the degradation rate were evaluated and used to compare the catalytic activities.

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Process Characteristics of SiOx and SiOxNy Films on a Gas Barrier Layer using Facing Target Sputtering (FTS) System (FTS 장치를 이용한 가스 차단막용 SiOx 및 SiOxNy 박막의 공정특성)

  • Son, Jin-Woon;Park, Yong-Jin;Sohn, Sun-Young;Kim, Hwa-Min
    • Journal of the Korean Institute of Electrical and Electronic Material Engineers
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    • v.22 no.12
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    • pp.1028-1032
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    • 2009
  • In this study, the influences of silicon-based gas barrier films fabricated by using a facing target sputtering(FTS) system on the gas permeability for flexible displays have been investigated. Under these optimum conditions on the $SiO_x$ film with oxygen concentration($O_2/Ar+O_2$) of 3.3% and the $SiO_xN_y$ film with nitrogen concentration($N_2/Ar+O_2+N_2$) of 30% deposited by the FTS system, it was found that the films were grown about 4 times higher deposition rate than that of the conventional sputtering system and showed high transmittance about 85% in the visible light range. Particularly, the polyethylene naphthalate(PEN) substrates with the $SiO_x$ and/or $SiO_xN_y$ films showed the enhanced properties of decreased water vapor transmission rate (WVTR) over $10^{-1}\;g/m^2{\cdot}day$ compared with the PEN substrate without any gas barrier films, which was due to high packing density in the Si-based films with high plasma density by FTS process and/or the denser chemical structure of Si-N bond in the $SiO_xN_y$ film.

Technology Trends of Fuel Cell Power Plant Based on Biogas Fuel (바이오가스 연료기반 연료전지발전 기술동향)

  • Lee, Jong-Gyu;Jeon, Jae-Ho;Lee, Jong-Yeon
    • New & Renewable Energy
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    • v.4 no.3
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    • pp.5-14
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    • 2008
  • The target for the reduction of $CO_2$ emissions, as specified in the Kyoto Protocol, can only be achieved by an extended use of renewable fuels and the increasing of the energy efficiency. The energy generation from waste gases with a reasonable content of methane like biogas can significantly contribute to reach this target. A further reduction of greenhouse gas emissions is possible by increasing the electrical efficiency using progressive technologies. Fuel cells can be highly energy conversion devices. Utilizing biogas as the fuel for fuel cell systems offers an option that is technically feasible, potentially economically attractive and greenhouse gas neutral. High temperature fuel cells that are able to operate with carbon monoxide in the feed are well suited to these applications. Furthermore, because they do not require noble metal catalysts, the cost of high-temperature fuel cells has the greatest potential to become competitive in the near future compared to other types of fuel cells.

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Methods to Reduce Greenhouse Gas for University Buildings to Make a Low-Carbon Green Campus - With Case Study on the 'E' University -

  • Song, Su Min;Peom, Sung Woo;Park, Hyo Soon;Song, Kyoo Dong
    • KIEAE Journal
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    • v.14 no.2
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    • pp.37-46
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    • 2014
  • University buildings are energy-guzzling facility that consume more than 10,000TOE within a campus annually. Even the consumption is on an upswing trend. Behind such high consumption are there cheap power rates for education facility, lack of high-efficiency equipment and ever-increasing use of various information equipment. Being keenly aware that greenhouse gas emission increases due to such rise of energy consumption, the present study carried out a case study. In the case study, the study chose the buildings of E university from top 10 universities that consume energy most in Seoul and examined the current status of their energy consumption and greenhouse gas emission. And then it set the reduction target of greenhouse gas by year. Putting aside a middle and long-termed strategy for later endeavor, it first established the 1st year's implementation plan (2014) for energy saving and greenhouse gas reduction with limited budget and according to greenhouse gas reduction target. The plan is specified as follows. Targets for energy saving are mainly divided into two sectors: machine equipment and electric equipment. 7 ideas were proposed. Three ideas to improve machine equipment are to replace with high-efficiency boilers and chillers and to adjust the position of the cooling tower. By doing so, it was estimated that energy could be saved by 176.34TOE in total and greenhouse gas could be reduced by 370.771t$CO_2$-eq. Four ideas to improve electric equipment include the replacement with LED lights, LED emergency lights and high-efficiency motors and the installation of motion sensors. It was calculated that such replacement could conserve 1,076.08TOE (electric energy) and reduce 2,181.420t$CO_2$-eq (greenhouse gas).

Study on the Influence of the Swim Bladder on Dorsal Aspect Target Strength of Fishes-I (부레가 어류의 등방향 반사강도에 미치는 영향에 관한 연구-I)

  • 안장영;정용진;강창익
    • Journal of the Korean Society of Fisheries and Ocean Technology
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    • v.37 no.3
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    • pp.174-180
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    • 2001
  • Dusky spinefoot, Siganus fuscescens live primarily in shore reefs with sea weeds, like around Jeju Island in Korean south sea. Therefore they are caught much by set net in the coast of Jeju Island. We carried out measurements of the dorsal aspect target strengths of Dusky spinefoot in order to study the influences of swim bladder for fishes. and have obtained some desired results though not sufficiently complete as comparison with target strengths of fishes before and after the air gas in the swim bladder of fish is taken off by an injector. The appropriate equations share the common form TS = A + 20 log L. TS = B + 20/3 log W where TS is the average dorsal aspect target strength in decibels. L is the fish total length in centimeters. W is the fish total weight in grams, and the coefficient A and B are determined by a least mean squares regression analysis. The results obtained before the air gas in the swim bladder of fish is taken off are TS = -63.16 + 20 log L TS = -50.50 + 20/3 low W and, the results obtained after the air gas in the swim bladder of fish is taken off are TS = -65.29 + 20 log L TS = -52.62 + 20/3 log W As above result, the differences of target strengths before and after the air gas is taken off from swim bladder are 2.12-2.13 dB, but the maximum difference of target strengths of both cases averaged according to the fish aspects from $-45^\circ$ to $45^\circ$ is 5.87 dB, and the average difference of them is 2.01 dB.

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The R&D - Validity of Gas hydrates (가스 하이드레이트 R&D 타당성 평가)

  • Kim Yu Jeong;Kim Seong Yong;Huh Dae-Gee
    • 한국신재생에너지학회:학술대회논문집
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    • 2005.06a
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    • pp.647-650
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    • 2005
  • Gas hydrates draw great at tent ion recently as a new clean energy resources substituting conventional oil and gas hydrate its presumed huge amount of volume reaching 10 trillion tons of gas and environmentally friendly characteristics. Gas hydrate can contribute to the rapidly increasing consumption of natural gas in Korea and achieve the self support target by 2010 which is $30\%$ of total natural gas demand. This paper shows the importance and benefit of Gas hydrate comparing with new & renewable energy in Korea

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